• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1094-1099
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• 2003

Nanometer-sized structures are being applied to many fields including micro/nano electronics, optoelectronics, quantum computing, biosensors, etc. Multi-scale analysis technology is required for designing the reliable nanometer-sized structures and predicting their mechanical, chemical and electronic behaviors. In this paper, some techniques for multi-scale analysis are reviewed and their applicability and limitation are discussed. Research activity of nano process analysis team in KIMM is outlined. Especially, we concentrate on OCTA of Nagoya University in Japan for the analysis of polymeric materials. Detailed structure of OCTA is described and some examples are presented.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.649-654
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• 2003

This paper is focused on the research of the ultra precision linear motor by using piezo stack actuators. The development of linear motor which can be controlled nano or micro scale is necessary for the precision manufacturing. Self-moving-cell principle is used for the design of linear motor Self-moving-cell linear motor is consisted of three cell structures, and each cell has two shells and one piezo-stack actuator. Each cell can do clamping and moving by two shell structures. The shell structure deformation by piezo stack actuator can move the linear motor by losing the clamping between the shall and guideway. This paper presents the design, manufacturing and test of the motor.

• Smart Structures and Systems
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• v.23 no.5
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• pp.429-447
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• 2019

The present study analyzed free vibration of the three-layered micro annular/circular plate which its core and face sheets are made of saturated porous materials and FG-CNTRCs, respectively. The structure is subjected to magneto-electric fields and magneto-electro-mechanical pre loads. Mechanical properties of the porous core and also FG-CNTRC face sheets are varied through the thickness direction. Using dynamic Hamilton's principle, the motion equations based on MCS and FSD theories are derived and solved via GDQ as an efficient numerical method. Effect of different parameters such as pores distributions, porosity coefficient, pores compressibility, CNTs distribution, elastic foundation, multi-physical pre loads, small scale parameter and aspect ratio of the plate are investigated. The findings of this study can be useful for designing smart structures such as sensor and actuator.

• Wind and Structures
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• v.32 no.1
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• pp.31-46
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• 2021

The current research deals with, stability/instability and cylindrical composite nano-scaled shell's resonance frequency filled by graphene nanoplatelets (GPLs) under various thermal conditions (linear and nonlinear thermal loadings). The piece-wise GPL-reinforced composites' material properties change through the orientation of cylindrical nano-sized shell's thickness as the temperature changes. Moreover, in order to model all layers' efficient material properties, nanomechanical model of Halpin-Tsai has been applied. A functionally modified couple stress model (FMCS) has been employed to simulate GPLRC nano-sized shell's size dependency. It is firstly investigated that reaching the relative frequency's percentage to 30% would lead to thermal buckling. The current study's originality is in considering the multifarious influences of GPLRC and thermal loading along with FMCS on GPLRC nano-scaled shell's resonance frequencies, relative frequency, dynamic deflection, and thermal buckling. Furthermore, Hamilton's principle is applied to achieve boundary conditions (BCs) and governing motion equations, while the mentioned equations are solved using an analytical approach. The outcomes reveal that a range of distributions in temperature and other mechanical and configurational characteristics have an essential contribution in GPLRC cylindrical nano-scaled shell's relative frequency change, resonance frequency, stability/instability, and dynamic deflection. The current study's outcomes are practical assumptions for materials science designing, nano-mechanical, and micromechanical systems such as micro-sized sensors and actuators.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.571-571
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• 2012

We discovered the formation of C60 aggregates in solution by means of photoluminescence spectroscopic study on C60 in solutions. From the in-depth investigation of temperature dependence of the luminescence of C60 in toluene, benzene and CS2 solutions, we reported that the C60 aggregates are formed during cooling at the freezing temperature of these solvents. Furthermore, the C60 aggregates can be changed to stable structures by irradiating with UV pulse-laser (Nd:YAG laser, 355nm). As a consequence, we could obtain nano-scale photo-polymerized C60 clusters, which appear as round-shaped nano- scale particles in high resolution transmission electron-microscopy (HRTEM) images. However, the yield of the nano-scale C60 clusters obtained by this method is too small. So we designed and developed a system to obtain C60 cluster of macroscopic quantity by using ultrasonic nebulizer. In this system, C60 solution was vaporized to several micro-sized droplets in vacuum, resulting in the formation of C60 aggregates by evaporating solvent (toluene). The system was invented to produce nano-scale carbon clusters by the irradiation of UV light upon C60 aggregates in vacuum. We have characterized the products, C60 cluster, obtained from the system by using UV absorption spectra and HPLC spectra. Although the products have a possibility of inclusion various forms of C60 cluster, results support that the product formed from the system by using vaporizer method establishes a new method to obtain C60 cluster in macroscopic quantity. In the presentation, the details of the system and the results of characterization are reported.

• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.4
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• pp.333-346
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• 2002

The continuous indentation techniques are one of the most effective methods to nondestructively estimate mechanical properties. There are many applications in various dimensions of materials from macro-scale, through micro-scale, even to nano-scale range. The macro-range technology of kgf-load level is now focused on the evaluation of tensile properties and residual stress of bulk materials, for example, used in conventional load-bearing structures and in-use pipelines. The technology and the apparatus were successfully developed by a domestic research group. The micro-range technology of gf-load level can be applied to investigate some property-gradient materials such as weldment. Because it has better spatial resolution than the macro-range technology. The nano-range technology (called nanoindentation technique) of mgf-load level is basically used to evaluate hardness and modulus of micro- and nano-materials. Moreover, many researches are going on to measure tensile properties and residual stress. The nanoindentation technology is easy to be applied to the various fields, such as semiconductor devices, multiphase materials, and biomaterials, though other methods are too difficult to be applied due to dimensional or environmental limitations. On the basis of these accomplishments, the international and the domestic standards are being established.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• Advances in nano research
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• v.3 no.2
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• pp.81-96
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• 2015

Octahedral shaped single crystalline undoped and Ga-doped indium oxide nano-and microcrystals were fabricated using vapor-solid growth process. Effects of Ga doping on the crystallinity, defect structure, and optical properties of the nano-/microstructures have been studied using scanning electron microscopy, microRaman spectroscopy, transmission electron microscopy and cathodoluminescence spectroscopy. It has been observed that incorporation of Ga does not affect the morphology of $In_2O_3$ structures due to its smaller ionic radius, and similar oxidation state as that of In. However, incorporation of Ga in high concentration (~3.31 atom %) causes lattice compression, reduces optical band gap and defect induced CL emissions of $In_2O_3$ nano-/microcrystals. The single crystalline Ga-doped, $In_2O_3$ nano-/microcrystals with low defect contents are promising for optoelectronic applications.

• Journal of Adhesion and Interface
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• v.6 no.1
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• pp.7-10
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• 2005

Condensation control of nano-particles has become important in order to fabricate minute condensed structures. In this study, we focus our attention on condensation mechanism of polymer aggregates in a resist film. The polymer aggregate is structural component of a resist material which is used in lithography process. The condensation nature of polymer aggregates in the resist film surface is observed by using atomic force microscope (AFM). By using the AFM, the condensation of polymer aggregates can be observed clearly. The condensation of polymer aggregate strongly affects to precise fabrication of resist pattern below 100nm size. The interaction force among polymer aggregates can be analyzed based on Derjaguin approximation. We also discuss about condensation nature of polymer aggregates in the resist film surface with the help of micro sphere model.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1043-1047
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• 2003

With the advancement of micro-systems and nanotechnology, the need for ultra-precision fabrication techniques has been steadily increasing. In this paper, a novel nano-structure fabrication process that is based on the fundamental understanding of nano-scale tribological interaction is introduced. The process, which is called Mechano-Chemical Scanning Probe Lithography (MC-SPL), has two steps, namely, mechanical scribing for the removal of a resist layer and selective chemical etching on the scribed regions. Organic monolayers are used as a resist material, since it is essential for the resist to be as thin as possible in order to fabricate more precise patterns and surface structures. The results show that high resolution patterns with sub-micrometer scale width can be fabricated on both silicon and various metal surfaces by using this technique.