• Title/Summary/Keyword: Micro/Nano Fabrication

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Fabrication of Alloy Target for Formation of Ti-Al-Si-N Composite Thin Film and Their Mechanical Properties (Ti-Al-Si-N 박막 제작을 위한 합금 타겟 제조 및 박막의 기계적 특성)

  • Lee, Han-Chan
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.10
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    • pp.665-670
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    • 2016
  • Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

Growth and characterization of periodically polarity-inverted ZnO structures grown on Cr-compound buffer layers

  • Park, J.S.;Goto, T.;Hong, S.K.;Chang, J.H.;Yoon, E.;Yao, T.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.259-259
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    • 2010
  • Periodically polarity inverted (PPI) ZnO structures on (0001) Al2O3 substrates are demonstrated by plasmas assisted molecular beam epitaxy. The patterning and re-growth methods are used to realize the PPI ZnO by employing the polarity controlling method. For the in-situ polarity controlling of ZnO films, Cr-compound buffer layers are used.[1, 2] The region with the CrN intermediate layer and the region with the Cr2O3 and Al2O3 substrate were used to grow the Zn- and O-polar ZnO films, respectively. The growth behaviors with anisotropic properties of PPI ZnO heterostructures are investigated. The periodical polarity inversion is evaluated by contrast images of piezo-response microscopy. Structural and optical interface properties of PPI ZnO are investigated by the transmission electron microcopy (TEM) and micro photoluminescence ($\mu$-PL). The inversion domain boundaries (IDBs) between the Zn and the O-polar ZnO regions were clearly observed by TEM. Moreover, the investigation of spatially resolved local photoluminescence characteristics of PPI ZnO revealed stronger excitonic emission at the interfacial region with the IDBs compared to the Zn-polar or the O-polar ZnO region. The possible mechanisms will be discussed with the consideration of the atomic configuration, carrier life time, and geometrical effects. The successful realization of PPI structures with nanometer scale period indicates the possibility for the application to the photonic band-gap structures or waveguide fabrication. The details of application and results will be discussed.

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Fabrication of Viewing Angle Direction Brightness-Enhancement Optical Films using Surface Textured Silicon Wafers

  • Jang, Wongun;Shim, Hamong;Lee, Dong-Kil;Park, Youngsik;Shin, Seong-Seon;Park, Jong-Rak;Lee, Ki Ho;Kim, Insun
    • Journal of the Optical Society of Korea
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    • v.18 no.5
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    • pp.569-573
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    • 2014
  • We demonstrate a low-cost, superbly efficient way of etching for the nano-, and micro-sized pyramid patterns on (100)-oriented Si wafer surfaces for use as a patterned master. We show a way of producing functional optical films for the viewing angle direction brightness-enhancement of Lambertian LED (light emitting diode)/OLED (organic light emitting diode) planar lighting applications. An optimally formulated KOH (Potassium hydroxide) wet etching process enabled random-positioned, and random size-distributed (within a certain size range) pyramid patterns to be developed over the entire (100) silicon wafer substrates up to 8" and a simple replication process of master patterns onto the PC (poly-carbonate) and PMMA (poly-methyl methacrylate) films were performed. Haze ratio values were measured for several film samples exhibiting excellent values over 90% suitable for LED/OLED lighting purposes. Brightness was also improved by 13~14% toward the viewing angle direction. Computational simulations using LightTools$^{TM}$ were also carried out and turned out to be in strong agreement with experimental data. Finally, we could check the feasibility of fabricating low-cost, large area, high performance optical films for commercialization.

Biodegradable PLGA Polymer Coating on Biomedical Metal Implants Using Electrospraying (전기분사를 이용한 의료용 금속 임플란트의 생분해성 PLGA 고분자 코팅)

  • Cho, Seong-Bae;Park, Chul-Ho;Park, Kwi-Deok;Chung, Dong-Jun;Han, Dong-Keun
    • Polymer(Korea)
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    • v.33 no.6
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    • pp.620-624
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    • 2009
  • Biomedical metal implants have been used clinically for replacement, restoration, or improvement of injury bodies based on high mechanical properties, but it has some risks such as the inflammatory, late thrombosis, or restenosis due to the low biocompatibility and toxicity. In various techniques of surface treatment developed to preserve these drawbacks, this study examined the electrospray coating technology with biodegradable poly (lactic-co-glycoic acid) (PLGA) on metal surface. Based on fundamental examination of electrospraying and solution parameters, the surface morphology of coated film was closely related to the boiling point of solvent, in-flight distance, and droplet size. The thickness of polymer film was linearly proportional to the emerged volume. This result exhibits that the polymeric droplets were continuously deposited on the polymer film. Therefore, the electrospray coating technology might be applied into the fabrication of single/multi-layered polymer film in nano-/micro-thickness and the control of the topology for biomedical metal implants including stents.

Investigating vibration behavior of smart imperfect functionally graded beam subjected to magnetic-electric fields based on refined shear deformation theory

  • Ebrahimi, Farzad;Jafari, Ali
    • Advances in nano research
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    • v.5 no.4
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    • pp.281-301
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    • 2017
  • In this disquisition, an exact solution method is developed for analyzing the vibration characteristics of magneto-electro-elastic functionally graded (MEE-FG) beams by considering porosity distribution and various boundary conditions via a four-variable shear deformation refined beam theory for the first time. Magneto-electroelastic properties of porous FG beam are supposed to vary through the thickness direction and are modeled via modified power-law rule which is formulated using the concept of even and uneven porosity distributions. Porosities possibly occurring inside functionally graded materials (FGMs) during fabrication because of technical problem that lead to creation micro-voids in FG materials. So, it is necessary to consider the effect of porosities on the vibration behavior of MEE-FG beam in the present study. The governing differential equations and related boundary conditions of porous MEE-FG beam subjected to physical field are derived by Hamilton's principle based on a four-variable tangential-exponential refined theory which avoids the use of shear correction factor. An analytical solution procedure is used to achieve the natural frequencies of porous-FG beam supposed to magneto-electrical field which satisfies various boundary conditions. A parametric study is led to carry out the effects of material graduation exponent, porosity parameter, external magnetic potential, external electric voltage, slenderness ratio and various boundary conditions on dimensionless frequencies of porous MEE-FG beam. It is concluded that these parameters play noticeable roles on the vibration behavior of MEE-FG beam with porosities. Presented numerical results can be applied as benchmarks for future design of MEE-FG structures with porosity phases.

Fabrication of Superhydrophobic molecules Nanoarray by Dip-pen Nanolithography (나노리소그라피 기술을 이용한 초소수성 불소 실란 분자의 나노패턴 제조)

  • Yeon, Kyung-Heum;Kang, Pil-Seon;Kim, Kyung-Min;Lim, Jun-Hyurk
    • Journal of Adhesion and Interface
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    • v.19 no.4
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    • pp.163-166
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    • 2018
  • Dip-pen nanolithography(DPN) is an atomic force microscope (AFM) based method of generating nano- or micro-patterns. This technique has been used to transfer various ink materials on the substrate through water meniscus formed between AFM tip and the substrate surface. In this study, the heptadecafluoro-1,1,2,2-tetrahydrodecyltrimethoxysilane (HDFDTMS) ink materials were coated on the pre-coated AFM tip surface with the HDFDTMS molecules. When the tip brought into contact with the hydroxyl-functionalized silicon surface, HDFDTMS ink molecules have been successfully transported from the tip onto the surface via water meniscus. The created array and passivation area showed stable structures on the surface, and the transport of ink materials from the AFM tip to the surface followed linear increase in pattern size with contact time.

Fabrication of Porous Cellulose Acetate Propionate/Polybutylene Succinate Microfibers by High Speed Centrifugal Spinning (초고속 원심방사에 의한 아세트산프로피온산 셀룰로오스/폴리부틸렌 숙시네이트 다공성 마이크론 섬유 제조)

  • Tae Young Kim;Mi Kyung Kim;Jinsoo Kim;Jungeon Lee;Jae Hoon Jung;Youngkwon Kim;Tae Hyeon Kim;Ki Young Kim;Jeong Hyun Yeum
    • Textile Coloration and Finishing
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    • v.35 no.4
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    • pp.239-245
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    • 2023
  • Cellulose is an abundant biodegradable material in nature with excellent properties, but due to its poor processability, it has been widely studied for processing through modification. Cellulose acetate propionate (CAP) is a cellulose derivative in which the hydroxyl group of cellulose is replaced by acetyl and propionyl groups. CAP has several advantages, such as excellent solubility, structural stability, light and weather resistance, and good transparency. Porous nanofibers with excellent specific surface area, which can be applied in various fields, can be easily formed by the phase separation method using highly volatile solvents. High speed centrifugal spinning is a nano/micro fiber preparation method with advantages such as fast spinning and easy alignment control. In this study, a CAP/polybutylene succinate (PBS) spinning solution with chloroform as solvent was prepared to prepare porous microfibers and the fiber morphology was examined as a function of the disk rotation speed in an high speed centrifugal spinning device.

A Study on the Thermal Shock Resistance of Sintered Zirconia for Electron Beam Deposition (전자빔 증착을 위한 소결체 지르코니아의 열충격 저항성 연구)

  • Oh, Yoonsuk;Han, Yoonsoo;Chae, Jungmin;Kim, Seongwon;Lee, Sungmin;Kim, Hyungtae;Ahn, Jongkee;Kim, Taehyung;Kim, Donghoon
    • Journal of the Korean Society of Propulsion Engineers
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    • v.19 no.3
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    • pp.83-88
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    • 2015
  • Coating materials used in the electron beam (EB) deposition method, which is being studied as one of the fabrication methods of thermal barrier coating, are exposed to high power electron beam at focused area during the EB deposition. Therefore the coating source for EB process is needed to form as ingot with appropriate density and microstructure to sustain their shape and stable melts status during EB deposition. In this study, we tried to find the optimum powder condition for fabrication of ingot of 8 wt% yttria stabilized zirconia which can be used for EB irradiation. It seems that the ingot, which is fabricated through bi-modal type initial powder mixture which consists of tens of micro and nano size particles, was shown better performance than the ingot which is fabricated using monolithic nanoscale powder when exposed to high power EB.

TIR Holographic lithography using Surface Relief Hologram Mask (표면 부조 홀로그램 마스크를 이용한 내부전반사 홀로그래픽 노광기술)

  • Park, Woo-Jae;Lee, Joon-Sub;Song, Seok-Ho;Lee, Sung-Jin;Kim, Tae-Hyun
    • Korean Journal of Optics and Photonics
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    • v.20 no.3
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    • pp.175-181
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    • 2009
  • Holographic lithography is one of the potential technologies for next generation lithography which can print large areas (6") as well as very fine patterns ($0.35{\mu}m$). Usually, photolithography has been developed with two target purposes. One was for LCD applications which require large areas (over 6") and micro pattern (over $1.5{\mu}m$) exposure. The other was for semiconductor applications which require small areas (1.5") and nano pattern (under $0.2{\mu}m$) exposure. However, holographic lithography can print fine patterns from $0.35{\mu}m$ to $1.5{\mu}m$ keeping the exposure area inside 6". This is one of the great advantages in order to realize high speed fine pattern photolithography. How? It is because holographic lithography is taking holographic optics instead of projection optics. A hologram mask is the key component of holographic optics, which can perform the same function as projection optics. In this paper, Surface-Relief TIR Hologram Mask technology is introduced, and enables more robust hologram masks than those previously reported that were formed in photopolymer recording materials. We describe the important parameters in the fabrication process and their optimization, and we evaluate the patterns printed from the surface-relief TIR hologram masks.