• Title/Summary/Keyword: Micrmirror

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Optical Microphone Based on a Reflective Micromirror Diaphragm (반사형 마이크로 미러를 이용한 광마이크로폰)

  • Song, Ju-Han;Lee, Sang-Shin
    • Korean Journal of Optics and Photonics
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    • v.17 no.4
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    • pp.366-370
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    • 2006
  • An optical microphone incorporating a reflective diaphragm and a fiber-optic head was demonstrated. The diaphragm was made of a micromirror membrane which is suspended by a silicon bar connected to a frame, allowing fer a displacement induced by acoustic waves. A compact, simple optical head was implemented by exploiting a single multimode fiber. For the assembled microphone, the static characteristics were investigated to find the operation point defined as the optimum distance between the head and the diaphragm, and a flat frequency response with a variation of $\sim$2dB for the range of up to 2 kHz was accomplished.