• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.77-77
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• 2011

These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.

• 한국균학회지
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• 제21권3호
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• pp.165-171
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• 1993

표고버섯 중의 광감응성 mitochondrial ATP synthase는 0.1 mM $Fe^{2+}$ 단독 이온에 의하여 그 활성이 대조구에 비해 102%, 증가되었으며, 반면 $Fe^{3+}$ 및 $Mg^{2+}$ 이온은 효소의 활성을 억제시켰다. 0.5 mM $Mg^{2+}$ 존재하에서 0.1 mM $Fe^{2+}$ 이온에 의한 이 효소의 활성은 32% 증가되었으며 0.5 mM $Mg^{2+}$ 존재하에서 $Fe^{3+}$ 이온효과는 단독 $Fe^{3+}$ 이온의 효과와 유사한 경향으로 효소의 활성을 저해하였다. 0.5 mM $Mg^{2+}$과 0.1 mM, 0.5 mM 및 1.0 mM $Fe^{3+}$ 이온의 공존하에서$Fe^{2+}$ 이온에 의한 효소의 활성은 모두 억제되었으며, 특히 0.5 mM $Mg^{2+}$과 0.1 mM $Fe^{3+}$ 이온의 공존하에서 5.0 mM $Fe^{2+}$ 이온에 의하여 53%의 억제현상을 나타내었다. 따라서 표고버섯 중의 광감응성 mitochondrial ATP synthase의 활성은 $Fe^{2+}$ 이온에 의하여 특이적으로 크게 증가되며, 이 효소에 대한 $Fe^{2+}$ 이온의 활성화 효과가 $Mg^{2+}$ 이온에 의하여 크게 영항을 받지 않으나, $Fe^{3+}$ 이온의 공존하에서는 억제됨을 알았다. 활성화 금속이온인 $Fe^{2+}$ 존재하에서 이 효소의 최적 pH는 7.6이며, 최적 온도는 $63^{\circ}C$이었다. 또한 이 효소는 금속 chelating agent인 EDTA에 의하여 효소의 활성이 상실됨으로써 metalloenzyme의 가능성을 제시하였다.

• Journal of the Korean Wood Science and Technology
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• 제15권4호
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• pp.12-17
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• 1987

To extract arabinogalactan from larch (Larix Leptolepis), chips immersed with water(20-$90^{\circ}C$) for 1hr, were defiberized by refiner. The liquors were recovered and purified to pure arabinogalactan by ion exchange resin(IRC-50 a. IR-45) or MgO. Additionally the optimal condition in purification with MgO was also investigated. 1. The amounts of solids(crude sugars) and pure arabinogalctan in solids are 8.6-11.3% and 7.3-8.5%(raw material = 100), respectively. 2. Phenolic materials in crude sugars are removed up to 96-89% by ion exchange resin and 94-88% by MgO, while recovery yields of pure arabinogalactan are 81-75% on purification with ion exchange resin and 91-87% on purification with MgO. 3. The optimal conditions of purification with MgO are the addition of 35mg MgO/0.5g of crude sugars, 45 minutes at $70^{\circ}C$, or 25 mg MgO, 30 minutes at $85^{\circ}C$.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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• pp.1372-1375
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• 2007

MgO thin films were deposited by $O^+$ IBAD method and results showed assisting oxygen ion beam energy plays a significant role in characteristics of MgO thin films. The lowest firing inception voltage, the highest brightness and the highest luminous efficiency were obtained when oxygen ion beam energy was 300 eV.

• 상하수도학회지
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• 제19권4호
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• pp.404-410
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• 2005

A series of batch type adsorption experiments were performed to remove aquatic phosphorus, where the layered double hydroxide (HTAL-CI) was used as an powdered adsorbent. It showed high adsorption capacity (T-P removal: 99.9%) in the range of pH 5.5 to 8.8 in spite of providing low adsorption characteristics (pH<4). The adsorption isotherm was approximated as a modified Langmuir type equation, where the maximum adsorption amount (50.5mg-P/g) was obtained at around 80mg-P/L of phosphorus concentration. A phosphate ion can occupy three adsorption sites with a chloride ion considering the result that 1 mol of phosphate ion adsorbed corresponded to the 3 moles of chloride ion released. Although the chloride ion at less than 1,000mg-CI/L did not significantly affect the adsorption capacity of phosphate, carbonate ion inhibited the adsorption property.

• 상하수도학회지
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• 제21권4호
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• pp.375-383
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• 2007

Treatment efficiency research was performed using Fenton process and the electrochemical process in the presence of ferrous ion and hydrogen peroxide for the industrial wastewater including 1,4-Dioxane produced during polymerization of polyester. The Fenton process and the electrochemical Iron Redox Reaction (IRR) process were applied for this research to use hydroxyl radical as the powerful oxidant which is continuously produced during the redox reaction with iron ion and hydrogen peroxide. The results of $COD_{Cr}$ and the concentration of 1,4-Dioxane were compared with time interval during the both processes. The rapid removal efficiency was obtained for Fenton process whereas the slow removal efficiency was occurred for the electrochemical IRR process. The removal efficiency of $COD_{Cr}$ for 310 minutes was 84% in the electrochemical IRR process with 1,000 mg/L of iron ion concentration, whereas it was 91% with 2,000 mg/L of iron ion concentration. The lap time to remove all of 1,4-Dioxane, 330 mg/L in the wastewater took 150 minutes with 1,000 mg/L of iron ion concentration, however it took 120 minutes with 2,000 mg/L of iron ion concentration in the electrochemical IRR process.

• 한국환경과학회지
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• 제22권12호
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• pp.1651-1660
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• 2013

The adsorption of lithium ion onto zeolite was investigated depending on contact time, initial concentration, cation forms, pH, and adsorption isotherms by employing batch adsorption experiment. The zeolite was converted into different forms such $K^+$, $Na^+$, $Mg^{2+}$, $Ca^{2+}$, and $Al^{3+}$. The zeolite had the higher adsorption capacity of lithium ion in $K^+$ form followed by $Na^+$, $Ca^{2+}$, $Mg^{2+}$, and $Al^{3+}$ forms, which was in accordance with their elctronegativities. The lithium ion adsorption was explained using the Langmuir, Freundlich, and Dubinin-Radushkevich adsorption isotherms and kinetic models. Adsorption rate of lithium ion by zeolite modified in $K^+$ form was controlled by pseudo-second-order and particle diffusion kinetic models. The maximum adsorption capacity obtained from Langmuir isotherm was 17.0 mg/g for zeolite modified in $K^+$ form. The solution pH influenced significantly the lithium ions adsorption capacity and best results were obtained at pH 5-10.

• 대한환경공학회지
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• 제29권2호
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• pp.197-204
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• 2007

이 연구는 EBPR(enhance biological phosphorus removal)의 혐기조건, 호기/무산소 조건 사이의 상호작용을 알아보고 인의 제거 속도와 인 제거에 미치는 영향인자들을 Batch-test로 조사하였다. 실험결과 무산소단계에서 인의 흡수율은 호기 단계보다 50% 정도 낮았고, 인 방출과 인 흡수의 상관관계는 다른 논문들에 비하여 낮았으며, 계수 b는 높았다. Batch-test의 측정 결과 다른 논문들에 비하여 인 방출과 인 흡수의 상관관계$(R^2=0.557)$는 낮았고 계수b (b=8.4049)는 높았다. 또한, 하수에서 인의 중요한 결합 파트너는 Ca, $Mg^{2+}$, Al, Fe 그리고 $K^+$인데 이 실험 결과 칼륨, 마그네슘 그리고 암모니움은 인과 함께 증감함으로써 인의 방출과 흡수에 밀접한 관계가 있음을 알 수 있었다. 즉, 혐기 단계에서 0.2 mol $K^+Ion$ / mol $PO_4-P$ Ion과 0.21 mol $Mg^{2+}Ion$ / mol $PO_4-P$ ion이 측정되어 인에 대한 칼륨 및 마그네슘의 비율은 1 : 5 정도임을 알 수 있었다.

• 생물환경조절학회지
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• 제6권4호
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• pp.264-269
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• 1997

본 실험은 고기능성 채소 생산을 위한 배양액내의 적정 셀레니움 농도를 구명하고자 수행되었다. 벨기에의 채소연구소에서 허브재배를 위해 개발된 양액을 이용하여 각각 $Na_2$SeO$_4$를 0, 2, 4, 6, 8mg/$\ell$농도로 처리하였다. 배양액내 셀레니움의 농도가 국화과 식물인 향쑥의 생육에 미치는 영향을 알아본 결과 저농도의 처리는 생육을 향상시켰으나 6mg/$\ell$이상의 고농도 처리는 생육을 감소시켰다. 엽록소의 함량은 셀레니움 처리에 의해 증가되었는데 배양액 내의 selenate ion 농도가 높을수록 전체 엽록소함량도 증가되었다. 비타민 C의 함량은 좋은 생장을 보였던 4mg/$\ell$처리까지는 증가하였으나 그 이상으로 농도가 증가했을 때 비타민C의 함량은 감소하였다. 저농도의 selenate 이온 농도는 정유의 함량을 증가시켰으나 고농도에서는 정유의 함량이 감소되었다. 식물에 의한 셀레니움의 흡수는 배양액내의 selenate 이온 농도가 증가할수록 촉진되었다.

• 한국진공학회지
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• 제16권5호
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• pp.338-342
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• 2007

MgO는 플라즈마 디스플레이 패널 (Plasma Display Panel, PDP)의 보호막으로 널리 쓰이고 있다. 본 실험에서는 산소 이온 빔을 이용하여 증착된 MgO 보호막의 특성을 조사하였다. MgO 증착 시 보조 산소 이온 빔의 에너지를 변화시킴에 따라 MgO 보호막의 특성과 PDP 패널 발광특성에 미치는 영향을 분석하였다. 본 연구에서는 산소 이온 에너지가 300 eV 일 때 소자의 방전개시전압이 가장 낮게 나타났고, 발광 휘도 및 발광 효율은 가장 높게 나타났다. 또한 산소 이온 빔의 조사에너지에 따라 MgO 박막의 결정성 및 표면조도가 크게 영향을 받는 것을 확인할 수 있었다. 산소 이온 빔 보조 증착 방법을 이용하여 패널의 발광 휘도와 발광 효율 등 발광특성을 개선하였다.