• 제목/요약/키워드: Method of Measurement

검색결과 15,818건 처리시간 0.04초

Precise Edge Detection Method Using Sigmoid Function in Blurry and Noisy Image for TFT-LCD 2D Critical Dimension Measurement

  • Lee, Seung Woo;Lee, Sin Yong;Pahk, Heui Jae
    • Current Optics and Photonics
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    • 제2권1호
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    • pp.69-78
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    • 2018
  • This paper presents a precise edge detection algorithm for the critical dimension (CD) measurement of a Thin-Film Transistor Liquid-Crystal Display (TFT-LCD) pattern. The sigmoid surface function is proposed to model the blurred step edge. This model can simultaneously find the position and geometry of the edge precisely. The nonlinear least squares fitting method (Levenberg-Marquardt method) is used to model the image intensity distribution into the proposed sigmoid blurred edge model. The suggested algorithm is verified by comparing the CD measurement repeatability from high-magnified blurry and noisy TFT-LCD images with those from the previous Laplacian of Gaussian (LoG) based sub-pixel edge detection algorithm and error function fitting method. The proposed fitting-based edge detection algorithm produces more precise results than the previous method. The suggested algorithm can be applied to in-line precision CD measurement for high-resolution display devices.

Single-configuration FPP method에 의한 실리콘 웨이퍼의 비저항 정밀측정 (Precision Measurement of Silicon Wafer Resistivity Using Single-Configuration Four-Point Probe Method)

  • 강전홍;유광민;구경완;한상옥
    • 전기학회논문지
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    • 제60권7호
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    • pp.1434-1437
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    • 2011
  • Precision measurement of silicon wafer resistivity has been using single-configuration Four-Point Probe(FPP) method. This FPP method have to applying sample size, shape and thickness correction factor for a probe pin spacing to precision measurement of silicon wafer. The deference for resistivity measurement values applied correction factor and not applied correction factor was about 1.0 % deviation. The sample size, shape and thickness correction factor for a probe pin spacing have an effects on precision measurement for resistivity of silicon wafer.

콘서트홀의 Sound Strength 현장 측정법 고찰 (Investigation of an in-situ measurement method for Sound Strength in concert halls)

  • 정충일;유진;전진용
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2007년도 추계학술대회논문집
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    • pp.987-990
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    • 2007
  • The accuracy of sound strength (G) measurement method in ISO 3382 has been questioned. One of the main reason is the difficulty in measuring a reference sound level in an anechoic chamber with the same set-up which was applied for the actual hall measurements. In the present paper, an in-situ measurement method for G was proposed by investigating the present G measurement method shown in ISO 3382. In addition, the sound radiation characteristics of typical omnidirectional loudspeakers were investigated and Phi (O) of auto correlation function (ACF) parameters was also calculated from an actual music excerpt to characterize the sound energy distribution in concert halls.

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미소 힘 측정을 위한 이중 전자기힘 보상방법 (Double Electro-Magnetic Force Compensation Method for the Micro Force Measurement)

  • 최임묵;우삼용;김부식;김수현
    • 한국정밀공학회지
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    • 제20권2호
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    • pp.104-111
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    • 2003
  • Micro force measurement is required more frequently for a precision manufacturing and investment in fields of precision industries such as semiconductor, chemistry and biology, and so forth. Null balance method has been introduced as an alternative of a loadcell. Loadcells have advantages in aspects of low cost and easy manufacturing, but have also the limitation in resolution and sensitivity to environment variations. In this paper, null balance method is explained and the dominant parameters related to system performances are mentioned. Null position sensor, electromagnetic system and controller are investigated. Also, the characteristic experiment is carried out in order to estimate the resolution and the measurement range. In order to overcome the limitation by the drift of position sensor and the performance of controller, double electromagnetic force compensation method is proposed and experimented. After controlling and filtering, the resolution under $\pm$ 1mg and measurement range over 300g could be obtained.

적분구를 이용한 대형광원의 측정방법 (The Measurement Methods of a Large Light Source Using the Integrating Sphere)

  • 황명근;이세현
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권12호
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    • pp.585-587
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    • 2005
  • In this paper, We studied two methods to measure optical characteristics of an electrodeless light source using the integrating sphere(diameter 1.5m). One is to use a center measurement method and the other is to use a side measurement method. As a result of analysis, a side measurement methode without auxiliary lamp is almost similar against a center measurement with auxiliary lamp to reduce a measurement of an error for luminous flux, luminous efficacy and spectral distribution etc. Therefore, Sample which cannot measured by reason of big size and heavy weight can be measured by a side measurement method.

등간격으로 배열된 마이크로폰을 이용한 관내 유량측정 방법 (A Method for the Measurement of Flow Rate in a Pipe Using a Microphone Array)

  • 김용범;김양한
    • 소음진동
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    • 제11권1호
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    • pp.57-67
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    • 2001
  • Proposed in this paper is a method of measurement of the flow rate in a pipe. The sound waves which are propagated within a pipe are characterized by that the wavenumber in the axial direction is changed according to the flow rate, and these characteristics are used in the present method of measurement of the flow rate. The amount of change in wavenumber of sound waves according to the flow rate can be obtained from the relationship among acoustic pressure signals within a pipe, which are measured by using a microphone array. The flow rate can be obtained by using the amount of change in wavenumber of sound waves and the relational equation of the flow rate. With respect to errors that can occur during the measurement of the flow rate, the types of errors and the method of correction of those errors are presented. This method of measurement of the flow rate has application limitation conditions due to the sensor interval, assumption of sound waves as plane waves, etc. The numerical simulation and experiments for measuring the flow rate of air in a pipe are performed in order to verify the applicability of this method of measurement of the flow rate. The experimental results are shown to be similar to those of the numerical simulation. And the flow rate measured is shown to be consistent with the actual value within 5% error bound.

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평면 오차 보정 가공을 위한 측정 방법에 관한 연구 (A Measurement Method to Compromise Surface Error in Machined Workpieces)

  • 장문주;홍성욱;박천홍
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.409-412
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    • 2002
  • This paper presents a measurement method to compromise surface error in surface machining processes. In order to compromise the surface error in machining process, on-machine measurement is essential. There are two kinds of on-machine measurement methods available to measure the surface errors in flat workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are inevitably engaged in both methods. This paper proposes a new idea to measure the surface error for error compensation. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The experimental results show that the proposed method is useful to compensate the surface errors of machined workpieces.

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발굴현장 수습 유물 보존처리 (On-site conservation of a gilt bronze crown)

  • 유재은
    • 보존과학연구
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    • 통권20호
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    • pp.49-64
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    • 1999
  • According to damage of papers by the chemical cause, papers become to acidify. Among the 3 kinds of method measuring the acidity of paper, one was nondestructive method measuring the surface of the paper by flat type electrode and the others were destructive methods measuring directly by cold water extract method and hot water extract method. In case of the cellulolytic cultural properties, the latter methods were not applied because those methods must bedissociated papers. To measure the paper acidity nondestructively, we investigated the correlation of the nondestructive method and the destructive methods. The conclusions are as follows. 1) In the relationship of the cold water extract method and the hot water extract method, It was indicated that the pH measured by the hot water extract method was high quality printing paper 0.08, rough printing paper 0.13, and Korean paper 0.29 higher than that by the cold water extract method.2) In the relationship of the cold water extract method and the surface measurement method, It showed that the pH value measured by the cold water extract method was high quality printing paper 1.86, rough printing paper 0.80,and Korean paper 0.58 higher than value that by the surface measurement.3) In the relationship of the hot water extract method and the surface measurement method, It showed that the pH value measured by the hot ABSTRACT water extract method was high quality printing paper 1.78, rough printing paper 0.66, and Korean paper 0.29 higher than that by the surface measurement. From the above-mentioned results, the pH value measured by the surface measurement was need to high about 1.78∼1.86 in high quality printing paper, 0.66-0.80 in rough printing paper, and 0.29∼0.58 in Korean paper and the surface measurement with flat type electrode was very available to measure the acidity of Korean papers actually.

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열역학적 방법을 이용한 펌프 운전성능 평가법 검토 (Evaluation of Thermodynamic Method for Pump Performance Measurement)

  • 강신형;김진권;홍순삼
    • 한국유체기계학회 논문집
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    • 제3권3호
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    • pp.25-30
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    • 2000
  • Thermodynamic method of pump performance measurement calculates pump efficiency and flowrate by measuring fluid temperature increase and pressure rise through the pump. The theory of this method is investigated and precise comparison experiment with classical hydraulic method was conducted to verify the accuracy. Classical hydraulic pump performance measurement results and Yatesmeter results based on the thermodynamic method showed good agreement in measured performance.

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Application of Phase-Shifting Method in Speckle Interferomtery to Measurement of Micro-Scale Displacement

  • Baek, Tae-Hyun;Kim, Myung-Soo
    • 비파괴검사학회지
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    • 제26권3호
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    • pp.162-168
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    • 2006
  • Speckle interferometry with phase-shifting method has been applied to measurement of micro-scale displacement through optical signal processing. Four-step phase-shifting method by PZT is used to measure out-of-plane displacement in spot-welded cantilever and results of optical experiments are comparable to those of FEM. Phase-shifting method using Fourier transform by PZT is applied to measurement of in-plane displacement on rectangular steel plate with a circular hole. The results of optical experiment agree well with theoretical calculation. New phase-shifting method in speckle interferometry has been implemented with a quarter wave plate. In-plane displacement of specimen is measured by the new phase-shifting method. Results of optical experiment show that the quarter wave plate can be used for phase-shifting method that is cheap and easy to use in speckle interferometry.