• Title/Summary/Keyword: Metal oxide sensor

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Study on Porous Silicon Sensors to Measure Low Alcohol Concentration (저농도 알코올 측정을 위한 다공질 실리콘 센서에 관한 연구)

  • Kim Seong-Jeen
    • Journal of the Korean Electrochemical Society
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    • v.2 no.3
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    • pp.130-133
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    • 1999
  • In this work, a capacitance-type alcohol gas sensor using porous silicon layer is developed to apply for breath alcohol measurement and its characteristics are estimated at room temperature. Current alcohol sensors using metal oxides such as tin-oxide are not only difficult to measure low alcohol concentration, but also should heat at $200\;to\;400^{\circ}C$ to improve the sensitivity. But the sensor using porous silicon layer has good sensitivity even at room temperature by very large effective surface area and suitable structure to fabricate integrated micro sensors. In the experiment, the capacitance was measured for the range of 0 to $0.5\%$ alcohol concentration with the interval of $0.05\%$, in which alcohol solution was kept at 25, 36, and $45^{\circ}C$ by a heater. As the result, good linearity was observed and the capacitance increased about 1.1, 2.6 and $4.6\%$ per the increment of $0.1\%$ alcohol concentration each temperature, respectively, at the frequency of 120 Hz.

Design of OP-AMP using MOSFET of Sub-threshold Region (Sub-threshold 영역의 MOSFET 동작을 이용한 OP-AMP 설계)

  • Cho, Tae-Il;Yeo, Sung-Dae;Cho, Seung-Il;Kim, Seong-Kweon
    • The Journal of the Korea institute of electronic communication sciences
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    • v.11 no.7
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    • pp.665-670
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    • 2016
  • In this paper, we suggest the design of OP-AMP using MOSFET in the operation of sub-threshold condition as a basic unit of an IoT. The sub-threshold operation of MOSFET is useful for an ultra low power consumption of sensor network system in the IoT, because it cause the supply voltage to be reduced. From the simulation result using 0.35 um CMOS process, the supply voltage, VDD can be reduced with 0.6 V, open-loop gain of 43 dB and the power consumption was evaluated with about $1.3{\mu}W$ and the active size for an integration was measured with $64{\mu}m{\times}105{\mu}m$. It is expected that the proposed circuit is applied to the low power sensor network for IoT.

Analysis of Leakage Current of a Laser Diode by Equivalent Circuit Model (등가회로 모델에 의한 레이저다이오드의 누설전류 해석)

  • Choi, Young-Kyu;Kim, Ki-Rae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.11 no.2
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    • pp.330-336
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    • 2007
  • A single pixel photon counting type image sensor which is applicable for medical diagnosis with digitally obtained image and industrial purpose has tern designed with $0.18{\mu}m$ triple-well CMOS process. The designed single pixel for readout chip is able to be operated by single supply voltage to simplify digital X-ray image sensor module and a preamplifier which is consist of folded cascode CMOS operational amplifier has been designed to enlarge signal voltage(${\Delta}Vs$), the output voltage of preamplifier. And an externally tunable threshold voltage generator circuit which generates threshold voltage in the readout chip has been newly proposed against the conventional external threshold voltage supply. In addition, A dark current compensation circuit for reducing dark current noise from photo diode is proposed and 15bit LFSR(Linear Feedback Shift Resister) Counter which is able to have high counting frequency and small layout area is designed.

Effect of Surfactants on ZnO Synthesis by Hydrothermal Method and Photocatalytic Properties (계면활성제 첨가에 의한 산화아연의 수열합성과 광촉매 특성)

  • Hyeon, Hye-Hyeon;Lee, Dong-Kyu
    • Journal of the Korean Applied Science and Technology
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    • v.34 no.1
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    • pp.50-57
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    • 2017
  • Zinc oxide is, one of metal oxide semiconductor, harmless to human and environment-friendly. It has excellent chemical and thermal stability properties. Wurtzite-zinc oxide is a large band gap energy of 3.37 eV and high exciton binding energy of 60 meV. It can be applied to various fields, such as solar cells, degradation of the dye waste, the gas sensor. The photocatalytic activity of zinc oxide is varied according to the particle shape and change of crystallinity. Therefore, It is very important to specify the additives and the experimental variables. In this study, the zinc oxide were synthesized by using a microwave assisted hydrothermal synthesis. The precursor was used as the zinc nitrate, the pH value was controlled as 11 by NaOH. Surfactants are the ethanolamine, cetyltrimethylammonium bromide, sodium dodecyl sulfate, sorbitan monooleate was added by changing the concentration. The composite particles had the shape of a star-like, curcular cone, seed shape, flake-sphere. Physical and chemical properties of the obtained zinc oxide was characterized using x-ray diffractometer, field emission scanning electron microscopy, thermogravimetric analysis and optical properties was characterized using UV-visible spectroscopy, photoluminescence and raman spectroscopy.

Characteristics and Fabrication of Micro Gas Sensor with Single Electrode (단일전극을 가진 마이크로 가스센서의 제작 및 특성)

  • Song, Kap-Duk;Bang, Yeung-Il;Lee, Sang-Mun;Lee, Yun-Su;Choi, Nak-Jin;Joo, Byung-Su;Seo, Moo-Gyo;Huh, Jeung-Soo;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
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    • v.11 no.6
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    • pp.350-357
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    • 2002
  • Micro gas sensor with single electrode was proposed for improving stability and sensitivity. Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass substrate and a $SnO_2$ sensing material was thermally evaporated on Pt electrode. $SnO_2$ was patterned by lift-off process and then thermally oxidized in $O_2$ condition for 1 hr., $600^{\circ}C$. The size of fabricated sensor was $1.9{\times}2.1\;mm^2$. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearity for wide range($0{\sim}10,000\;ppm$) of gas concentrations. And the sensor shows a good recovery characteristics of 1% deviation compared to initial resistance.

A New HF/$NH_4F$/Glycerine Aqueous Solution for Protection of Al Layers During Sacrificial Etching of PSG Films (PSG 희생층 식각시 Al층을 보호하기 위한 새로운 HF/$NH_4F$/Glycerine 혼합 식각액)

  • Kim, Sung-Un;Paik, Seung-Joon;Kim, Im-Jung;Lee, Seung-Ki;Cho, Dong-Il
    • Journal of Sensor Science and Technology
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    • v.8 no.5
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    • pp.414-420
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    • 1999
  • The oxide sacrificial layer technology is one of the key technologies in surface micromachining. However, the commonly used aqueous HF solutions, including the $NH_4F$ buffered HF solutions (BHF), are known to attack the Al metal layers during the oxide sacrificial etch. A mixed $NH_4F$/HF/glycerine aqueous solution of 4:1:2 ratio is known to have the best etch selectivity between oxide and AI, but even this sacrificial etchant has a significant etch rate for AI. This paper reports an extensive experimental study on various concentration ratios for HF, $NH_4F$ and glycerine, and develops the optimal mixture ratio for sacrificial etching. At the $NH_4F$/HF/glycerine ratio of 2:1:4, the etch selectivity between PSG and Al improves by approximately 6 times over the previously known best selectivity, to a value of 7,700. At this condition, the measured etch rate of PSG film is approximately $2.1\;{\mu}m/min$, which is sufficiently fast. The developed sacrificial etchant allows the addition of a Al metal layer in surface micromachining, without the worry of Al layer erosion during sacrificial etch.

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Fabrication and Characteristics of $SnO_{2}/Al_{2}O_{3}/Pd$ Thick Film Devices for Detection of $CH_{3}CN$ Vapor ($CH_{3}CN$ 감지를 위한 $SnO_{2}/Al_{2}O_{3}/Pd$ 후막소자의 제조 및 그 특성)

  • Park, Hyo-Derk;Jo, Sung-Guk;Sohn, Jong-Rack;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
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    • v.1 no.2
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    • pp.107-116
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    • 1992
  • The optimum base material was selected by the thermal decomposition temperature of $CH_{3}CN$ on the surface of various metal oxides, and the FT-IR analyses of its products. On the surface of $SnO_{2}$, $CH_{3}CN$ was initiated to decompose at $130^{\circ}C$ and produced a lot of products at $200^{\circ}C$. The products from the reaction were found to be $H_{2}O$, $NH_{3}$ and CO, but $N_{2}O$ has started to produce at $320^{\circ}C$. The sensing characteristics of $SnO_{2}$ sensor to $CH_{3}CN$ are influenced by the absorbed species which are produced by the oxidation reaction of $CH_{3}CN$ on the surface of metal oxide. The gaseous species produced from the surface of sensing material in the oxidation reaction were found to be CO, $NH_{3}$, $H_{2}O$ and $NO_{x}$ etc.. It was assumed that the amount of $NO_{x}$ play a great role to the determining sensing properties. In the condition of 170 ppm $CH_{3}CN$, the sensitivity and optimum operating temperature of $SnO_{2}$ were 70% and $300^{\circ}C$, respectively. In this research, the response time of $CH_{3}CN$ to $SnO_{2}/Al_{2}O_{3}/Pd$ sensor added with 0.2 wt % Pd was found about 10 sec and sensitivity was also found relatively high.

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Fabrication and characteristics of alcohol sensor using Fe2O3 (Fe2O3후막을 이용한 alcohol sensor 제작 및 감응특성)

  • Lee, Y.S.;Song, K.D.;Lee, S.M.;Shim, C.H.;Choi, N.J.;Joo, B.S.;Lee, D.D.;Huh, J.S.
    • Journal of Sensor Science and Technology
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    • v.11 no.2
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    • pp.77-83
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    • 2002
  • In order to get low cost and portability, semiconductor gas sensor need to have low operating temperature and high sensitivity. $Fe_2O_3$ based sensors which were doped with metal oxide catalysts($MoO_3$, $V_2O_5$, $TiO_2$, and CdO) were fabricated by screen printing method. To improve electrical stability of sensors, the $Fe_2O_3$ sensors were annealed in $N_2$ at $700^{\circ}C$ for 2 hours. The $V_2O_5$ doped $Fe_2O_3$ sensor showed about $80{\sim}90%$ sensitivity at alcohol 1,000 ppm and have good selectivity to hydrocarbon gas and tobacco odors. The fabricated sensor and PIC-chip were employed for portable alarm system.

Firmware Design and system of stepwise synchronization for CMOS image sensor (Stepwise 동기화 지원을 위한 CMOS 이미지 센서 Firmware 설계 및 개발)

  • Park, Hyun-Moon;Park, Soo-Huyn;Lee, Myung-Soo;Seo, Hae-Moon;Park, Woo-Chool;Jang, Yun-Jung
    • Journal of the Korea Society for Simulation
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    • v.17 no.4
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    • pp.199-208
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    • 2008
  • Lately, since Complementary Metal Oxide Semiconductor(CMOS) image sensor system has low power, low cost and been miniaturized, hardware and applied software studies using these strengths are being carrying on actively. However, the products equipped with CMOS image sensor based polling method yet has several problems in degree of completeness of applied software and firmware, compared with hardware’s. CMOS image sensor system has an ineffective synchronous problem due to superfluous message exchange. Also when a sending of data is delayed continually, overhead of re-sending is large. So because of these, it has a problem in structural stability according to Polling Method. In this study, polling cycle was subdivided in high-speed synchronization method of firmware -based through MCU and synchronization method of Stepwise was proposed. Also, re-connection and data sending were advanced more efficiently by using interrupt way. In conclusion, the proposed method showed more than 20 times better performance in synchronization time and error connection. Also, a board was created by using C328R board of CMOS image sensor-based and ATmega128L which has low power, MCU and camera modules of proposed firmware were compared with provided software and analyzed in synchronization time and error connection.

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The Characteristics of Pt Micro Heater Using Aluminum Oxide as Medium Layer (알루미늄산화막을 매개층으로 이용한 백금 미세발열체의 특성)

  • Chung, Gwiy-Sang;Noh, Sang-Soo;Choi, Young-Kyu;Kim, Jin-Han
    • Journal of Sensor Science and Technology
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    • v.6 no.5
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    • pp.400-406
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    • 1997
  • The electrical and physical characteristics of aluminum oxide and Pt thin films on it, deposited by reactive sputtering and DC magnetron sputtering, respectively, were analyzed with increasing annealing temperature($400{\sim}800^{\circ}C$) by four point probe, SEM and XRD. Under $600^{\circ}C$ of annealing temperature, aluminum oxide had the properties of improving Pt adhesion to $SiO_{2}$ and insulation without chemical reaction to Pt thin films and the resistivity of Pt thin films was improved. But these properties of aluminum oxide and Pt thin films on it were degraded over $700^{\circ}C$ of annealing temperature because aluminum oxide was changed into metal aluminum and then reacted to Pt thin films deposited on it. The thermal characteristics of Pt micro heater were analyzed with Pt-RTD integrated on the same substrate. In the analysis of properties of Pt micro heater, active area was smaller size, Pt micro heater had better thermal characteristics. The temperature of Pt micro heater with active area, $200{\mu}m{\times}200{\mu}m$ was up to $400^{\circ}C$ with 1.5watts of the heating power.

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