• 한국전기전자재료학회논문지
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• 제35권1호
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• pp.11-17
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• 2022

Direct exposure to toxic and hazardous gases has always been considered as the most pervasive problem worldwide, leading to a gradual increase in the number of asthma patients due to NO_x/SO_x gases inhaling and exposure to 50 ppm formaldehyde gases. Therefore, the development of accurate gas sensors is a key issue for resolving these problems. To address such issues, the development of membranes for selective filtering of target molecules as well as nanocatalyst for enhancing the sensing selectivity is highly crucial. In this review, the research progress for porous membrane materials (e.g. MOFs, and graphene) and nanocatalyst technology for the development of selective and accurate gas sensors will be discussed.

• 공업화학
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• 제33권1호
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• pp.11-16
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• 2022

금속유기골격체(metal-organic frameworks, MOFs)는 나노사이즈의 기공을 가진 다공성 물질로, 금속이온과 유기리간드의 종류에 따라 기체흡착도 및 기공크기의 조절이 가능하다. 이러한 장점을 이용하여, 기체 포집 및 분리, 그리고 기체센서분야에서 금속유기골격체에 대한 연구가 많이 이루어지고 있다. 신속하고, 정량적인 기체 흡탈착 분석을 위해서는, 센서 표면에 균일한 필름 형태의 다양한 MOF 구조체를 형성해야 한다. 본 총설논문에서는 양극산화알루미늄, 산화아연 나노막대, 구리 박막으로부터 직접합성법을 이용하여 각각 MIL-53 (Al), ZIF-8, Cu-BDC와 같은 MOF를 마이크로진동자 센서 표면에 균일하게 합성하는 방법에 대해 정리하였다. 또한, 대표적인 마이크로진동자인 수정진동자미세저울과 마이크로캔틸레버의 작동원리와 금속유기골격체에 기체흡착 시 변하는 신호해석에 대한 내용을 다룬다. 이를 통해, 마이크로진동자 기반 금속유기골격체의 기체 흡탈착 분석에 대한 이해를 높이고자 한다.

• 한국전기전자재료학회논문지
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• 제29권6호
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• pp.353-358
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• 2016

In this paper, we have studied about the optimum fabrication condition of the printed Indium Tin Oxide (ITO) layers for the electrical resistance-type sensor application. We have investigated on the substrates surface treatments, mixing ratio of organic binder/ITO powder, and viscosity of the printing paste to determine the optimum condition of the screen printed ITO layer. Also, we found that the printing condition is closely related with the sensor performance. To know the feasibility of printed ITO layer as an electrical resistance-type sensor, we have fabricated the ITO sensors with a printed and sputtered ITO layers. The printed ITO films revealed $10^2$ times higher sensitivity than the sputtered ITO layer. Also, the sputtered ITO layer exhibited an operating temperature of $127^{\circ}C$ at the operating voltage of 5 V. While, in case of the printed ITO layer showed the operating temperature of $27.6^{\circ}C$ in high operating voltage of 30 V. We found that the printed ITO layer is suitable for the various sensor applications.

• 센서학회지
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• 제22권4호
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• pp.249-255
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• 2013

Gas-sensor array technology, which has been much utilized in the field of food technology by the name of 'electronic nose' is drawing attention in diagnosing lung cancer based on the analysis of the exhaled human breath. Much understanding has been accomplished about the composition of the volatile organic compounds (VOCs) of the human exhaled breath, in spite of some variations depending on research groups due mainly to lack of the standardization of the sensing procedures. Since VOCs may be produced during the process of cellular metabolism, difference in the cellular metabolism between healthy cells and lung cancer cells are expected to be reflected on the composition variation of the exhaled VOCs. Several studies have attempted to apply the gas-sensor array technology to lung cancer analysis using many different types of sensors including metal oxide, carbon black-polymer composite, surface acoustic wave, and gold nanoparticles. In this mini-review VOC as biomarkers, sensor array technology and application of the array technology for the diagnosis of cancer disease have been described.

• 한국군사과학기술학회지
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• 제6권3호
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• pp.54-61
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• 2003

$SnO_2$ gas sensor for the detection DMMP, simulant of nerve gas was fabricated and its characteristics were examined. Sensing materials were $SnO_2$ added by TEX>$\alpha$-$Al_{2}O_{3}$ with 0∼20wt.% and $In_{2}O_{3}$ with 0∼3wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Its dimension was 7$\times$10$\times$0.6$\textrm{mm}^2$. Crystallite size 8t phase identification, specific surface area and morphology of fabricated $SnO_2$ powders were analyzed by X-ray diffraction(XRD), surface area analyzer(BET) and by a scanning electron microscope(SEM), respectively. Sensor was measured as flow type and sensor resistance change was monitored as real time using LabVIEW program. The best sensitivities were 75% at adding 4wt.% TEX>$\alpha$-$Al_{2}O_{3}$, operating temperature $300^{\circ}C$ and 87% at adding 2wt.% $In_{2}O_{3}$, operating temperature $350^{\circ}C$ to DMMP 0.5ppm. Response and recovery times were about 1 and 3 min., respectively. Repetition measurement was very good with $\pm$3% in full scale. As a result, operating temperature was lower TEX>$\alpha$-$Al_{2}O_{3}$ than $In_{2}O_{3}$, but sensitivity was higher $In_{2}O_{3}$ than $\alpha$-$Al_{2}O_{3}$.

• 센서학회지
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• 제25권3호
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• pp.184-188
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• 2016

Highly ordered $SnO_2$ and NiO nanocolumns have been successfully achieved by glancing-angle deposition (GLAD) using an electron beam evaporator. Nanocolumnar $SnO_2$ and NiO sensors exhibited high performance owing to the porous nanostructural effect with the formation of a double Schottky junction and high surface-to-volume ratios. When all gas sensors were exposed to various gases such as $C_2H_5OH$, $C_6H_6$, and $CH_3COCH_3$, the response of the highly ordered $SnO_2$ nanocolumn were over 50 times higher than that of the $SnO_2$ thin film. This work will bring broad interest and create a strong impact in many different fields owing to its particularly simple and reliable fabrication process.

• 센서학회지
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• 제23권1호
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• pp.15-18
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• 2014

We present gas sensing performance based on $2{\times}2$ sensor array with four different elements ($TiO_2$, $SnO_2$, $WO_3$ and $In_2O_3$ thin films) fabricated by rf sputter. Each thin film was deposited onto the selected $SiO_2$/Si substrate with Pt interdigitated electrodes (IDEs) of $5{\mu}m$ spacing which were fabricated on a $SiO_2$/Si substrate using photolithography and dry etching. For 5 ppm $NO_2$ and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, $2{\times}2$ sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.

• 센서학회지
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• 제10권2호
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• pp.108-117
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• 2001

폭발성 및 가연성 가스의 종류 및 그 정량화론 위한 10개의 개별 센서가 하나의 기판 위에 집적시킨 센서 어레이를 개발하였다. 이 센서어레이는 여러 가지 가연성 가스(부탄, 메탄, 프로판, 일산화탄소, LPG)에 대해서 차별화 된 감도 패턴을 가지도록, 나노 사이즈의 grain를 가지는 $SnO_2$를 모 물질로 하는 10개의 서로 다근 감지 물질로 구성하였고, 센서어레이 전반에서 균일한 온도 분포가 되도록 히터를 기판에 내장시켰다. $400^{\circ}C$에서 동작하는 어레이상의 센서들은 저농도에서도 고감도와 재현성의 특성을 보여 주었다. 이들 감도패턴을 이용하여, 주성분 분석 기법을 통해 환경기준치(LEL, TLV) 범위에서 부탄, 프로판, 메탄, LPG의 폭발성 및 가연성 가스의 종류 인식 및 정량화 할 수 있었다. 그리고, 주성분 분석 기법으로 치적 센서 개수 선정에 응용하였다.

• Journal of the Korean Physical Society
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• 제73권10호
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• pp.1444-1451
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• 2018

The surface-to-volume ratio of one-dimensional (1D) semiconductor metal-oxide sensors is an important factor for achieving good gas sensing properties because it offers a wide response area. To exploit this effect, in this study, we determined the optimal calcination temperature to maximize the specific surface area and thereby the sensitivity of the sensor. The $In_2O_3$ nanorods were synthesized by using vapor-liquid-solid growth of $In_2O_3$ powders and were decorated with the Pt nanoparticles by using a sol-gel method. Subsequently, the Pt nanoparticle-decorated $In_2O_3$ nanorods were calcined at different temperatures to determine the optimal calcination temperature. The $NO_2$ gas sensing properties of five different samples (pristine uncalcined $In_2O_3$ nanorods, Pt-decorated uncalcined $In_2O_3$ nanorods, and Pt-decorated $In_2O_3$ nanorods calcined at 400, 600, and $800^{\circ}C$) were determined and compared. The Pt-decorated $In_2O_3$ nanorods calcined at $600^{\circ}C$ showed the highest surface-to-volume ratio and the strongest response to $NO_2$ gas. Moreover, these nanorods showed the shortest response/recovery times toward $NO_2$. These enhanced sensing properties are attributed to a combination of increased surface-to-volume ratio (achieved through the optimal calcination) and increased electrical/chemical sensitization (provided by the noble-metal decoration).

• 해양환경안전학회:학술대회논문집
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• 해양환경안전학회 2017년도 추계학술발표회
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• pp.159-159
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• 2017