• Title/Summary/Keyword: Metal oxide gas sensor

Search Result 114, Processing Time 0.024 seconds

Sensing Properties of Ga-doped ZnO Nanowire Gas Sensor

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
    • /
    • v.16 no.2
    • /
    • pp.78-81
    • /
    • 2015
  • Pure ZnO and ZnO nanowires doped with 3 wt.% Ga (‘3GZO’) were grown by pulsed laser deposition in a furnace system. The doping of Ga in ZnO nanowires was analyzed by observing the optical and chemical properties of the doped nanowires. The diameter and length of nanowires were under 200 nm and several ${\mu}m$, respectively. Changes of significant resistance were observed and the sensitivities of ZnO and 3GZO nanowires were compared. The sensitivities of ZnO and 3GZO nanowire sensors measured at 300℃ for 1 ppm of ethanol gas were 97% and 48%, respectively.

스마트 호기 센서 응용 금속 산화물 반도체 나노입자 연구 동향

  • Yu, Ran;Lee, U-Yeong
    • Ceramist
    • /
    • v.21 no.2
    • /
    • pp.38-48
    • /
    • 2018
  • This paper reports a comprehensive review of the state-of-the-art in research on the enhancement of sensing properties for the detection of gases in exhaled breath. Daily health monitoring and early diagnosis of specific diseases via the analysis of exhaled breath is possible. Because biomarkers in exhaled breath are emitted in a very small amount, it is necessary to develop highly sensitive gas sensors. In recent years, a number of researches have been carried out using various strategies for the enhancement of sensing properties such as doping, catalyst, hollow sphere, heterojunction, size effect. We introduced each strategy and summarized recent progress on sensing properties for detection of biomarkers in exhaled breath.

Nano Porous Tin Oxide Film Fabricated by Anodization (양극산화법으로 제작된 나노 다공성 주석 산화물 박막)

  • Mun, Kyu-Shik;Cheon, Se-Jon;No, Hee-Kyu;Chun, Seung-Chul;Park, Sung-Yong;Lee, Ro-Un;Park, Yong-Joon;Choi, Won-Youl
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2007.11a
    • /
    • pp.328-328
    • /
    • 2007
  • $SnO_2$ has a high potential for electric and electronic applications. We have anodized pure tin metal and nano porous tin oxide film was obtained on pure Sn. Nano porous tin oxide were grown by anodization in nonaqueous-base electrolytes at different potentials between 5 V and 100 V. Pore size of ~100nm was observed by FE-SEM. Pore sizes as a function of applied voltage and anodizing time were characterized. We obtained nano porous tin oxide film having an uniform pore size at low temperature. High specific surface area of $SnO_2$ will be very useful for gas sensor, lithium battery, and dye sensitized solar cell.

  • PDF

Comparative Investigation of Flavors in Cigarettes by Electronic Nose and GC/MS

  • Lee, Yelin;Park, Jin-Won;Lee, Hwan-Woo;Lee, Seung-Yong;Lee, Hyung-Suk
    • Journal of the Korean Society of Tobacco Science
    • /
    • v.35 no.1
    • /
    • pp.20-27
    • /
    • 2013
  • An Electronic Nose(E-Nose) and Gas Chromatography/Mass Spectroscopy (GC/MS) are meanwhile conventional technique to analyze volatile materials in many industries (e.g., food, medicine, environment) and have broad acceptance in the analysis of tobacco products. In this study, an experiment where tin oxide gas sensor array responses and GC/MS profiles are used to characterize the volatile compounds of different cigarettes at the same time is performed and the measurements of two instruments are compared for cigarette samples with a known chemical information. E-Nose and GC/MS were employed to differentiate and match flavored cigarettes with commercial tobacco flavoring agents (lavender, vanilla, peppermint, orange, star anise). For verifying reliability of two systems, the analyses were conducted in terms of amount of flavors in each cigarettes using partial least squares (PLS) and with the principal components analysis (PCA). Various chemical sensors and GC/MS data was reduced into two principal factors (PC1, PC2) for being distinguished with visualized regions. Both systems provided adequate results for odor characteristics of cigarettes in this study with each instrument having its own advantages and disadvantages.

Characterization of VO2 thick-film critical temperature sensors by heat treatment conditions (열처리조건에 따른 VO2 후막 급변온도센서의 특성연구)

  • Song, K.H.;Yoo, K.S.
    • Journal of Sensor Science and Technology
    • /
    • v.16 no.6
    • /
    • pp.407-412
    • /
    • 2007
  • For $VO_{2}$ sensors applicable to temperature measurement by using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were investigated systematically as a function of the annealing condition. The starting materials, vanadium pentoxide ($V_{2}O_{5}$) powders, were mixed with vehicle to form paste. This paste was screen-printed on $Al_{2}O_{3}$ substrates and then $VO_{2}$ thick films were heat-treated at $450^{\circ}C$ to $600^{\circ}C$, respectively, for 1 hr in $N_{2}$ gas atmosphere for the reduction. As results of the temperature vs. resistance property measurements, the electrical resistance of the $V_{2}O_{5}$ sensor in phase transition range was decreased by $10^{3.9}$ order. The presented critical temperature sensor could be used in fire-protection and control systems.

Characteristics and Fabrication of Micro Gas Sensor with Single Electrode (단일전극을 가진 마이크로 가스센서의 제작 및 특성)

  • Song, Kap-Duk;Bang, Yeung-Il;Lee, Sang-Mun;Lee, Yun-Su;Choi, Nak-Jin;Joo, Byung-Su;Seo, Moo-Gyo;Huh, Jeung-Soo;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
    • /
    • v.11 no.6
    • /
    • pp.350-357
    • /
    • 2002
  • Micro gas sensor with single electrode was proposed for improving stability and sensitivity. Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass substrate and a $SnO_2$ sensing material was thermally evaporated on Pt electrode. $SnO_2$ was patterned by lift-off process and then thermally oxidized in $O_2$ condition for 1 hr., $600^{\circ}C$. The size of fabricated sensor was $1.9{\times}2.1\;mm^2$. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearity for wide range($0{\sim}10,000\;ppm$) of gas concentrations. And the sensor shows a good recovery characteristics of 1% deviation compared to initial resistance.

A study on the highly sensitive metal nanowire sensor for detecting hydrogen (수소감지를 위한 고감도의 금속 나노선 센서에 관한 연구)

  • An, Ho-Myoung;Seo, Young-Ho;Yang, Won-Jae;Kim, Byungcheul
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.18 no.9
    • /
    • pp.2197-2202
    • /
    • 2014
  • In this paper, we report on an investigation of highly sensitive sensing performance of a hydrogen sensor composed of palladium (Pd) nanowires. The Pd nanowires have been grown by electrodeposition into nanochannels and liberated from the anodic aluminum oxide (AAO) template by dissolving in an aqueous solution of NaOH. A combination of photo-lithography, electron beam lithography and a lift-off process has been utilized to fabricate the sensor using the Pd nanowire. The hydrogen concentrations for 2% and 0.1% were obtained from the sensitivities (${\Delta}R/R$) for 1.92% and 0.18%, respectively. The resistance of the Pd nanowires depends on absorption and desorption of hydrogen. Therefore, we expect that the Pd nanowires can be applicable for detecting highly sensitive hydrogen gas at room temperature.

Analysis of Volatile Flavor Components of Pleurospermum kamtschaticum (누룩치의 휘발성 향미성분 분석)

  • 정미숙;이미순
    • Korean journal of food and cookery science
    • /
    • v.14 no.5
    • /
    • pp.541-546
    • /
    • 1998
  • Volatile flavor components in leaf and petiole of fresh Pleurospermum kamtschaticum H$\_$OFFM/ were extracted by SDE (simultaneous steam distillation and extraction) method using diethyl ether as solvent. Essential oils were analyzed by gas chromatography (GC) and combined gas chromatography-mass spectrometry (GC-MS). Identification of volatile flavor components was based on the Rl of GC and mass spectrum of GC-MS. A total of 31 components, including 15 hydrocarbons, 4 aldehydes, 1 ketone, 5 alcohols, 2 esters, 3 acids and 1 oxide were identified in the essential oils. (Z)-${\beta}$-Farnesene, (Z, E)-${\alpha}$-farnesene and farnesene were the major volatile flavor components in fresh Pleurospermum kamtschaticum. Volatile flavor patterns of Pleurospermum kamtschaticum were analyzed using electronic nose. Sensor T30/1 and PA2 that were sensitive to alcohols had the highest resistance for fresh Pleurospermum kamtschaticum. Resistance of six metal oxide sensors was decreased in dried sample compared with fresh one.

  • PDF

A Study on Hydrogen Detection Characteristics of the Pt-MIS Capacitor Device (Pt-MIS 커패시터 소자의 수소가스 검지특성 연구)

  • Sung, Yung-Kwon;Yi, Seung-Hwan;Koh, Jung-Hyuk;Rhie, Dong-Hee
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.48 no.2
    • /
    • pp.69-75
    • /
    • 1999
  • The characteristics of $H_2$ gas detection have been investigated using the Pt-MIS capacitor composed of the LPCVD nitride on the oxide. The flat band voltage shift is measured as 0.1 V in 1,000 ppm $H_2$ gas ambient and to be independent of Pt catalyst thickness. It is found that the flatband voltage shift is proportional to the hydrogen concentrations. The response and recovery time of Pt-MIS capacitor are 5 mins and 25 mins respectively. The samples of 30nm thick Pt revealed much higher sensitivity than that of 150nm samples. The samples of 150nm Pt showed that the flatband voltage shift of the device is due to the formation of the dipole layer of the adsorbed hydrogen atoms at the Pt-insulator interface.

  • PDF

Highly Sensitive Gas Sensors Based on Nanostructured $TiO_2$ Thin Films

  • Jang, Ho-Won;Mun, Hui-Gyu;Kim, Do-Hong;Sim, Yeong-Seok;Yun, Seok-Jin
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2011.05a
    • /
    • pp.16.1-16.1
    • /
    • 2011
  • $TiO_2$ is a promising material for gas sensors. To achieve high sensitivities, the material should exhibit a large surface-to-volume ratio and possess the high accessibility of the gas molecules to the surface. Accordingly, a wide variety of porous $TiO_2$ nanomaterials synthesized by wet-chemical methods have been reported for gas sensor applications. Nonetheless, achieving the large-area uniformity and comparability with well-established semiconductor production processes of the methods is still challenging. An alternative method is soft-templating which utilizes nanostructured inorganic or organic materials as sacrificial templates for the preparation of porous materials. Fabrication of macroporous $TiO_2$ films and hollow $TiO_2$ tubes by soft-templating and their gas sensing applications have been reported recently. In these porous materials composed of assemblies of individual micro/nanostructures, the form of links or necks between individual micro/nanostructures is a critical factor to determine gas sensing properties of the material. However, a systematic study to clarify the role of links between individual micro/nanostructures in gas sensing properties of a porous metal oxide matrix is thoroughly lacking. In this work, we have demonstrated a fabrication method to prepare highly-ordered, embossed $TiO_2$ films composed of anatase $TiO_2$ hollow hemispheres via soft-templating using polystyrene beads. The form of links between hollow hemispheres could be controlled by $O_2$ plasma etching on the bead templates. This approach reveals the strong correlation of gas sensitivity with the form of the links. Our experimental results highlight that not only the surface-to-volume ratio of an ensemble material composed of individual micro/nanostructures but also the links between individual micro/nanostructures play a critical role in evaluating the sensing properties of the material. In addition to this general finding, the facileness, large-scale productivity, and compatability with semiconductor production process of the proposed fabrication method promise applications of the embossed $TiO_2$ films to high-quality sensors.

  • PDF