Deposition Mechanism of $SrTiO_3$ Thin Films by Plasma Enhanced Metal Organic Chemical Vapor Deposition
(플라즈마 MOCVD를 이용한 $SrTiO_3$ 박막 증착 메카니즘)
-
- Proceedings of the Materials Research Society of Korea Conference
- /
- 1999.11a
- /
- pp.132-132
- /
- 1999