Characteristics Comparison of Prepared Films According to Influence of Adsorption Inhibitor in the Condition of Deposition (PVD증착용 흡착인히비터의 영향에 따른 제작막의 특성 비교)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2001.11a
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- pp.67-67
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- 2001