• Title/Summary/Keyword: Metal Pattern

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Plasma Etching Process based on Real-time Monitoring of Radical Density and Substrate Temperature

  • Takeda, K.;Fukunaga, Y.;Tsutsumi, T.;Ishikawa, K.;Kondo, H.;Sekine, M.;Hori, M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.93-93
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    • 2016
  • Large scale integrated circuits (LSIs) has been improved by the shrinkage of the circuit dimensions. The smaller chip sizes and increase in circuit density require the miniaturization of the line-width and space between metal interconnections. Therefore, an extreme precise control of the critical dimension and pattern profile is necessary to fabricate next generation nano-electronics devices. The pattern profile control of plasma etching with an accuracy of sub-nanometer must be achieved. To realize the etching process which achieves the problem, understanding of the etching mechanism and precise control of the process based on the real-time monitoring of internal plasma parameters such as etching species density, surface temperature of substrate, etc. are very important. For instance, it is known that the etched profiles of organic low dielectric (low-k) films are sensitive to the substrate temperature and density ratio of H and N atoms in the H2/N2 plasma [1]. In this study, we introduced a feedback control of actual substrate temperature and radical density ratio monitored in real time. And then the dependence of etch rates and profiles of organic films have been evaluated based on the substrate temperatures. In this study, organic low-k films were etched by a dual frequency capacitively coupled plasma employing the mixture of H2/N2 gases. A 100-MHz power was supplied to an upper electrode for plasma generation. The Si substrate was electrostatically chucked to a lower electrode biased by supplying a 2-MHz power. To investigate the effects of H and N radical on the etching profile of organic low-k films, absolute H and N atom densities were measured by vacuum ultraviolet absorption spectroscopy [2]. Moreover, using the optical fiber-type low-coherence interferometer [3], substrate temperature has been measured in real time during etching process. From the measurement results, the temperature raised rapidly just after plasma ignition and was gradually saturated. The temporal change of substrate temperature is a crucial issue to control of surface reactions of reactive species. Therefore, by the intervals of on-off of the plasma discharge, the substrate temperature was maintained within ${\pm}1.5^{\circ}C$ from the set value. As a result, the temperatures were kept within $3^{\circ}C$ during the etching process. Then, we etched organic films with line-and-space pattern using this system. The cross-sections of the organic films etched for 50 s with the substrate temperatures at $20^{\circ}C$ and $100^{\circ}C$ were observed by SEM. From the results, they were different in the sidewall profile. It suggests that the reactions on the sidewalls changed according to the substrate temperature. The precise substrate temperature control method with real-time temperature monitoring and intermittent plasma generation was suggested to contribute on realization of fine pattern etching.

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The effect of chlorhexidine varnish application on the shear bond strength of orthodontic brackets (클로르헥시딘 바니쉬의 적용이 교정용 브라켓의 전단접착강도에 미치는 영향)

  • Im, Dong-Hyuk;Kim, Tae-Woo;Chang, Young-Il;Nahm, Dong-Suk;Yang, Won-Sik;Baek, Seung-Hak
    • The korean journal of orthodontics
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    • v.30 no.2 s.79
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    • pp.215-222
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    • 2000
  • The purpose of this study was to determine whether the application of chlorhexidine varnish affects the shear bond strength and failure pattern of orthodontic brackets or not. The experimental group consisted of 22 human premolars which extracted after chlorhexidine varnish application (4 times for 1 week interval) in vivo, and the control group consisted of 22 human premolars which extracted without any pre-treatment. After all teeth were etched with $37\%$ phosphoric acid gel, metal orthodontic brackets (Q-3002, RMO, USA) were bonded to each tooth using auto-polymerizing orthodontic resin (Ortho-One, Bisco, USA) with the same bonding procedure. The shear bond strength was measured with Instron universal testing machine (model 4466, Instron Ltd., England), and the failure pattern of each bracket was examined with Scanning Electron Microscope (SM 840A, JEOL, Japan). The data were analysed statistically with t-test. The results were as follows : 1. Application of chlorhexidine varnish had no significant effect on the shear bond strength of the orthodontic bracket. 2. There was no significant difference in the failure pattern of orthodontic bracket between the experimental group and the control group.

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Application of biodegradable metal based drug delivery carrier on Foot and Mouth Disease vaccination in pigs (돼지에서 생체 분해 금속성 전달체를 활용한 구제역 백신의 적용 연구)

  • Cho, Ara;Oh, Sang-Ik;Choe, Changyong;Jung, Young-Hun;Do, Yoon Jung;Kim, Suhee;Choo, Hyun Wook;Gu, Jong Su;Chung, Woo-Jin;Cho, Sung Youn;Yoo, Jae Gyu
    • Korean Journal of Veterinary Service
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    • v.43 no.3
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    • pp.129-137
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    • 2020
  • In this study, we applied biodegradable drug delivery carries (BDDC) for food-and-mouth (FMD) vaccination. After FMD vaccination using BDDC, we estimated the percentage inhibition (PI) of antibody, decomposed patterns, and histopathologic features of BDDC. PI of antibody was higher than 50 at two weeks after injection and sustained positive PI until 10 weeks after injection. BBDC injection group showed significantly an increased pattern of blood monocyte at two and three weeks after injection. According to the Micro CT, micro-cracks were observed at two weeks after injection and the morphology of BDDC was lost at four weeks after injection. For histopathological examination, acute inflammation with neutrophil infiltration and micro-metallic residues were observed around BDDC until four weeks after injection and inflammatory responses gradually decreased at 10 weeks. Based on our experiment, BDDC is considered as an alternative way to vaccine injection for veterinary applications. Our study can be used as basic data for the drug delivery system using biodegradable metals in the future.

A Cold model experiment on the thermal convection in the czochralski silicon single crystal growth process (저융점 금속을 사용한 초크랄스키 실리콘 단결정 성장 공정의 열유동 모사 실험)

  • 이상호;김민철;이경우
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.2
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    • pp.149-156
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    • 1999
  • An experimental simulation on the flow in Czochralski melt using a cold model was carried out to obtain the velocities of fluid flow which affects the oxygen concentration of Czochralski crystal growing system. Low melting point Woods metal with similar Pr number to the silicon melt was adopted as a working fluid. Local flow velocities at numerous positions in the melt were simulataneously measured in three dimension using incorporated magnet probe. The measured velocity field showed a non-axisymmetric pattern dominated by natural convection. The analysis on the correlation between data set of temperatures simultaneously measured at two melt positions showed that the values of correlation coefficients were smaller than those of previous study on the small size of silicon melt and these phenomena are believed to occur because turbulent behavior becomes stronger in large size of the melt.

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The study of Shear Bond Strength on recasting of non-beryllium non-precious alloy for Porcelain between Metal (베릴륨이 포함되지 않은 도재용착주조관용 비 귀금속 합금의 재사용에 따른 금속과 도재간의 전단결합강도에 관한 연구)

  • Kim, So-Ri;Kim, Woong-Chul;Kim, Hae-Young;Kim, Ji-Hwan
    • Journal of Technologic Dentistry
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    • v.35 no.1
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    • pp.43-48
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    • 2013
  • Purpose: This study aimed to investigate the shear bond strength for non-precious alloy castings without beryllium, which has been used repeatedly for economical reason. Methods: The Schmitz-Schulmeyer test method was used to evaluate the shear bond strength between the non-beryllium Ni-Cr alloy Vera Bond 2V(AlbaDent, Inc. USA) and the Ceramco 3(Dentstply, York, PA, USA) porcelain powder. The maximum loading and shear bond strength were measured. The average shear strength(MPa) was analyzed with the one-way ANOVA and the Tukey's test( =.05). The fracture specimens were examined using Microscope to determine the failure pattern. Results: The mean shear bond strengths(SD) in MPa were group A(100% new metal) control 28.72(3.31); group B(50% new + 50% reused) 27.28(1.13); group C(all reused) 26.61(5.47). Microscope examination showed that group A and B specimens presented mixed failure, and group C specimens showed adhesive failure. Conclusion: In conclusion, forward this non-precious alloy dose not contain beryllium for how should use a more systematic study and for future advanced research is performed giving effect to be considered desirable.

An Unequal Wilkinson Power Divider Using Defected Ground Structure in Double Layered Substrate (이중 기판 결함 접지 구조를 이용한 비대칭 월킨슨 전력 분배기)

  • Lim, Jong-Sik;Koo, Jae-Jin;Oh, Seong-Min;Jeong, Yong-Chae;Ahn, Dal
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.18 no.11
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    • pp.1291-1298
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    • 2007
  • A novel 1:4 unequal wilkinson power divider using rectangular-shaped defected ground structure(DGS) in double layered substrate is proposed for removing the ground problem of DGS in packaging. Rectangular-shared DGS produces the transmission line having much higher characteristic impedance than standard microstrip line. The proposed unequal divider is composed of DGS and double layered substrate in order to be free from the ground problem of DGS patterns in packaging in metal housings. The second substrate is attached to the first substrate which contains DGS pattern on its ground plane at the bottom side to form the double layered substrate. In order to show the validity of the proposed DGS in the double layered substrate, a 1:4 unequal power divider is designed and measured. The predicted and measured performances are shown with an excellent agreement between them.

Nanocomposite Magnetic Materials

  • Ludwig Schultz;Alberto Bollero;Axel Handstein;Dietrich Hinz;Karl-Hartmut Muller;Golden Kumar;Juergen Eckert;Oliver Gutfleisch;Anke Kirehner Aru Yan
    • Journal of Powder Materials
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    • v.9 no.6
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    • pp.381-393
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    • 2002
  • Recent developments in nanocrystalline and nanocomposite rare earth-transition metal magnets are reviewed and emphasis is placed on research work at IFW Dresden. Principal synthesis methods include high energy ball milling, melt spinning, mold casting and hydrogen assisted methods such as reactive milling and hydrogenation-disproportionation-desorption-recombination. These techniques are applied to NdFeB-, PrFeB- and SmCo-type systems with the aim to produce high remanence magnets with high coercivity. Concepts of maximizing the energy density in nanostructured magnets by either inducing a texture via anisotropic HDDR or hot deformation or enhancing the remanence via magnetic exchange coupling are evaluated. With respect to high temperature applications melt spun $Sm(Co_{0.74}Fe_{0.1}Cu_{0.12}Zr_{0.04})_{7.5}$ ribbons were prepared, which showed coercivities of up to 0.53 T at 50$0^{\circ}C$. Partially amorphous $Nd_{60}Fe_xCo_{30-x}Al_{10}(0{\leq}x{\leq}30)$ alloys were prepared by copper mold casting. The effect of transition metal content on the glass-forming ability and the magnetic properties was investigated. The $Nd_{60}Co_{30}Al_{10}$ alloy exhibits an amorphous structure shown by the corresponding diffraction pattern. A small substitution of Co by 2.5 at.% Fe results In the formation of Fe-rich crystallites embedded in the Nd-rich amorphous matrix. The Fe-rich crystallites show hard magnetic behaviour at room temperature with a coercivity value of about 0.4 T, relatively low saturation magnetization and a Curie temperature of 500 K.

Trends on Technology of Eco-friendly Metal and Ceramic Nanoparticle Inks for Direct Printing (다이렉트 프린팅용 청정 금속 및 세라믹 나노 입자 잉크 기술 동향)

  • Hong, Sung-Jei;Kim, Jong-Woong;Han, Chul-Jong;Kim, Young-Sung;Hong, Tae-Whan
    • Journal of the Microelectronics and Packaging Society
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    • v.17 no.2
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    • pp.1-9
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    • 2010
  • In this paper, trends on technology of metal and ceramic nanoparticle inks using eco-friendly process were reviewed. There are two types of eco-friendly processes, dry and wet. In case of dry process, gas evaporation process was being used to synthesize the ultrafine nanoparticles. Also, in case of wet process, low temperature process excluding harmful elements such as $Cl^-$ and ${NO_3}^-$ was being used to synthesize the ultrafine nanoparticles. Sizes of nanoparticles were less than 10 nm using the eco-friendly processes, and the nanoparticles were well dispersed into ink solvent. The ink was successfully applied to fabricate directly printed pattern.

A Study on the Material of Furniture in Goryeo (고려시대 가구재료 연구)

  • Cho, Sook-Kyung
    • Journal of the Korea Furniture Society
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    • v.25 no.1
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    • pp.19-27
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    • 2014
  • This paper studied the materials of the furniture which the noble men used in Goryeo, based on the furniture material category of solid wood furniture, lacquerware inlaid with mother-of-pearl and hardware. As for the solid wood furniture, the wood and furniture types are inferred based on the documents. The trees used for the wood furniture were zelkova, korean willow, pine, royal paulownia, maidenhair tree, korean pine, chinese juniper and elm. The furniture types were table, chair, wooden bench, small portable table, writing table, and folding screen. As to the types of lacquerware inlaid with mother-of-pearl, most of them were hams with top, which were made of abalone shells. The features of the lacquerware inlaid with mother-of-pearl were in detail and elaborate like the pattern of the full bloomed chrysanthemum. Writing tables were also made of lacquerware as pieces of furniture. Distinctively, the mother-of-pearl furniture material was popular enough to be used even in a horse saddle. Regarding the metal feldspar used as both a practical use and decoration, there are drop handle, hinge, the front basis, and lock seen in the artifacts, which were made of cast iron, bronze, and brass. Their manufacture techniques were eojamoon, bratticing and sheet metal. Through this study of the furniture materials used in Goryeo, it seems that Goryeo furniture focused on the functions rather than on the decorations, and in turn the forms were simple and basic. The technique of mother-of-pearl, a bit elaborate one, was used in the props furniture like kitchen wares, hams, or writing talbes. Probably, the solid wood is inferred to be used in a low wooden bench, a chair, and a table based on the documents.

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A Study on Fabrication of Photosensitive Sr0.9Bi2.1Ta2O9 Thin Film by Sol-gel Self-patterning Technique (Sol-gel Self-patterning 기술을 이용한 광감응성 Sr0.9Bi2.1Ta2O9 박막의 제조기술에 관한 연구)

  • Yang, Ki-Ho;Park, Tae-Ho;Lim, Tae-Young;Auh, Keon-Ho;Kim, Byong-Ho
    • Journal of the Korean Ceramic Society
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    • v.39 no.8
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    • pp.750-757
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    • 2002
  • Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study, ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$ thin films have been prepared by spin coating method using photosensitive sol solution. Strontium ethoxide, tertramethylheptanedionato bismuth and tantalum ethoxide were used as starting materials. As UV exposure time to the SBT thin film increased, the UV absorption peak intensity of metal ${\beta}$-diketonate decreased due to reduced solubility by M-O-M bond formation. Solubility difference by UV irradiation on SBT thin film allows to obtain a fine patterning of thin film. Also, The ferroelectric properties of the UV irradiated SBT thin films were superior to those of the no-UV irradiated films.