• 제목/요약/키워드: Membrane formation

검색결과 1,102건 처리시간 0.039초

멤브레인 구조 제작은 위한 단결정 실리콘의 이방성 습식 식각 (Anisotropic Wet Etching of Single Crystal Silicon for Formation of Membrane Structure)

  • 조남인;강창민
    • 반도체디스플레이기술학회지
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    • 제2권4호
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    • pp.37-40
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    • 2003
  • 반도체 장비의 기능성과 신뢰성을 높이기 위하여 부품의 제조기술은 점차 마이크로 머신 기술을 요구하고 있다. 마이크로머신 기술 중 hot junction이 위치하는 멤브레인 구조는 각종 센서와 히터의 미세부품에서 가장 이용도가 큰 구조이다. 실험에서는 마이크로머신의 기본 구조인 멤브레인 형태를 만들기 위해 KOH 용액과 TMAH 용액으로 단결정 실리콘을 이방성 습식식각 하였다. 실험결과, 식각액의 온도와 농도, 마스크 패턴과 웨이퍼의 결정성의 일치 등을 고려해야 하며, 식각 속도는 KOH 농도 및 온도에 따라 크게 변함을 알 수 있었다. KOH 용액은 30 wt% 80~$90^{\circ}C$ 온도 범위에서 가장 좋은 특성을 나타냈다. 한편, TMAH용액이 실리콘을 식각하는 용액으로 관심을 끄는 것은 단결정에서 상대적으로 $SiO_2$ 박막을 마스크로 사용할 수 있을 뿐 아니라 $SiO_2$ 박막을 마스크로 사용할 수 있을 뿐 아니라 다른 식각액보다 찌꺼기가 적다는 장점 때문이다. 그러나, 다른 용액에 비해 가격이 고가이며 식각 속도가 낮다는 것이 실용적인 측면에서 큰 단점이다. 실험결과를 종합적으로 고려할 때 KOH 용액 농도 30wt%와 온도 $90^{\circ}C$가 마이크로머신 기술에 의한 멤브레인 구조 제작에서 적합한 공정조건이라고 할 수 있다.

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무기인산염 함유 이상성 인산칼슘이 외방성 수직골 형성에 미치는 영향 (The effect of micro-macroporous biphasic calcium phosphate incorporated with polyphosphate on exophytic bone regeneration)

  • 김동환;권영혁;박준봉;정종혁;허익
    • Journal of Periodontal and Implant Science
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    • 제38권2호
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    • pp.179-190
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    • 2008
  • Purpose: In this study, the effect of micro-macroporous biphasic calcium phosphate(MBCP) incorporated with inorganic polyphosphate for bone regeneration in the calvaria of rabbit was evaluated. Materials and Methods: The procedure of guided bone regeneration was performed with titanium reinforced expanded polytetrafluoroethylene(TR-ePTFE) membrane. Four animal groups were compared : 1) TR-ePTFE membrane for negative control group, 2) TR-ePTFE membrane filled with MBCP for positive control group, 3) TR-ePTFE membrane filled with MBCP soaked in 4% inorganic polyphosphate for experimental group I, and 4) TR-ePTFE membrane filled with MBCP soaked in 8% inorganic polyphosphate for experimental group II. Results: 1. Negative control group showed the highest new bone formation at 16 weeks. 2. Positive control group showed the smallest new bone formation compared to other groups. 3. 8% inorganic polyphosphate induced more volume of bone formation, otherwise experimental group II did not show significant difference compared to negative control group. Conclusion: These results suggest that inorganic polyphosphate has a promoting effect on bone regeneration, possibly by enhancing osteoconductivity of the carrier and by increasing osteoinductivity of the defected alveolar bone tissue.

MEA 제조 방법에 따른 상대습도 변화가 PEMFC 내구성에 미치는 영향 (Effect of various MEA fabrication methods on the PEMFC durability testing at high and low humidity conditions)

  • 김근호
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 추계학술대회 초록집
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    • pp.86.2-86.2
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    • 2010
  • In order to improve polymer electrolyte membrane fuel cell (PEMFC) durability, the durability of membrane electrode assemblies (MEA), in which the electrochemical reactions actually occur, is one of the vital issues. Many articles have dealt with catalyst layer degradation of the durability-related factors on MEAs in relation to loss of catalyst surface area caused by agglomeration, dissolution, migration, formation of metal complexes and oxides, and/or instability of the carbon support. Degradation of catalyst layer during long-term operation includes cracking or delamination of the layer which result either from change in the catalyst microstructure or loss of electronic or ionic contact with the active surface, can result in apparent activity loss in the catalyst layer. Membrane degradation of the durability-related factors on MEAs can be caused by mechanical or thermal stress resulting in formation of pinholes and tears and/or by chemical attack of hydrogen peroxide radicals formed during the electrochemical reactions. All of these effects, the mechanical damage of membrane and degradation of catalyst layers are more facilitated by uneven stress or improper MEA fabrication process. In order to improve the PEMFC durability, therefore, it is most important to minimize the uneven stress or improper MEA fabrication process in the course of the fabrication of MEA. We analyzed the effects of the MEA fabrication condition on the PEMFC durability with MEA produced using CCM (catalyst coated membrane) method. This paper also investigated the effects of MEA fabrication condition on the PEMFC durability by adding additional treatment process, hot pressing and pressing, on the MEA produced using CCM method.

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응집-막분리 공정 적용시 전처리 응집조건에 따른 용존성 유기물 상(相)변화 특성 (The Characterization of Floc Formation Under Various Pre-coagulation Conditions)

  • 정철우;손희종
    • 대한환경공학회지
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    • 제30권11호
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    • pp.1139-1145
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    • 2008
  • 응집-막분리 공정의 적용시 전처리 응집공정에서 응집조건에 따라 발생하는 플럭 생성특성을 파악하고 생성된 플럭 특성에 따른 막투과 플럭스의 영향을 살펴본 결과 인공시수와 낙동강 원수에서 전처리 응집공정을 적용시 급속교반 후 용존성 유기물질(자연유기물질)이 미세 플럭의 형성으로 인하여 입자상 유기물질로 전환이 발생하였으며 급속교반초기 10초 사이에 용존성 유기물이 입자상 물질로 전환되었다. 또한 응집제 주입량이 0.025 mM as Al (7.5 mg/L Alum) 이었을 경우 입자 전환율 K값이 크게 나타나고 있었으나 0.05 mM (15 mg/L Alum)이상으로 응집제 주입량이 증가할 경우 K값은 감소하였으며 0.15 mM까지 유사한 값을 보이고 있었다. 낙동강 원수를 이용하여 전처리 공정으로 응집 공정을 적용시 UF 단독공정에 비하여 투과 flux 감소는 상당히 낮게 나타났으며 투과 flux 변화는 응집공정에 의하여 형성되는 입자크기 분포에 의존하였으며 응집조건에 따른 투과 flux 실험결과 급속교반-UF공정과 급속교반-완속교반-UF공정의 투과 flux는 유사하게 나타났다. 막의 재질에 따른 투과 flux 실험결과 소수성 재질의 막에 비하여 친수성 재질의 막이 투과 flux가 높게 유지되었으며 응집제 자체의 금속성분에 의한 막오염 영향은 나타나지 않았다.

유기 가스 검지를 위한 다공질 실리콘층의 전기 저항 의존성 (Dependence of Electrical Resistance in Porous Silicon Layer for Detecting Organic Vapors)

  • 박광열;김성진;이상훈;최복길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.792-796
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    • 2002
  • In this work, porous silicon(PS) layer is used as a sensing material to detect organic gases. To do this, PS sensors with membrane structure are fabricated. The sensors were made by applying the technologies of membrane formation by anisotropic etching of silicon, and PS layer formation by anodization in HF solution. From fabricated sensors, current-voltage (I-V) curves were measured against ethanol (called alcohol), methanol and acetone gases evaporated from 0.1 to 0.5% solution concentrations at $36^{\circ}C$. As the result, all curves showed rectifying behavior due to a diode structure between Si and PS, and the conductance of sensor devices increased largely with the organic solution concentration at high voltage of 5V.

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Growth of Sheet-like ZnO Nanostructures on ZnO nano rods using Chemical Bath Deposition

  • Kim, Hyuntae;Choi, Soobong
    • Applied Science and Convergence Technology
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    • 제27권2호
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    • pp.38-41
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    • 2018
  • We demonstrate the growth of a sheet-like ZnO membrane on ZnO nano rod layers. The growth process is composed of 3 steps of ZnO seed formation, ZnO nano rod growth and sheet-like ZnO membrane formation on those nano rods. To confirm the fundamental growth mechanism, the lattice structures of each step were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM) measurement. Analysis of the relation between the texture coefficient and the surface shape of the ZnO membrane on the ZnO nano rods shows that the surface morphology of ZnO nano structures can be controlled using the temperature of the growing solution and the concentration of the chemical solution.

회전막 정밀여과기에서 케이크 저항과 여과성능에 대한 연구 (Study on Cake Resistance and Microfiltraion Performance of Rotating Membrane Filters)

  • 박원철;최창균;김재진;박진용
    • 한국막학회:학술대회논문집
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    • 한국막학회 1998년도 춘계 총회 및 학술발표회
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    • pp.105-109
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    • 1998
  • 1. Introduction : In microfiltration the transport, deposition and removal of particles control cake formation on a filter. In this connection a new model on cake formation, based on the wall shear stress, was tested here in comparison with experiments of fine particle slurry under Taylor-vortex flow. The model expresses the deposition process for particles as two first-order steps in series of mass transfer and adhesion, and their removal process as a linear relation to the wall shear stress. This embraces characteristics of both dead-end and crossflow filtration. The correlation resulting from fitting to experimental data represented the experimental data reasonably well. This study will be helpful in analyzing fouling in heat exchangers.

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Puromycin Aminonucleoside 투여로 인한 사구체 족세포의 초미형태학적 변화 (Morphological Changes in Glomerular Podocytes in Puromycin Aminonucleoside Induced Nephropathy)

  • 김영호;박관규;김영만;조수열
    • Applied Microscopy
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    • 제28권4호
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    • pp.577-590
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    • 1998
  • Puromycin aminonucleoside (PAN) nephropathy was induced in a group of Sprague-Dawley rat by a single dose of intraperitoneal Injection to study an ultrastructural change of glomerulus. The experimental rats developed proteinuria three days after PAN injection. Electron microscopic studies of glomeruli showed the loss of epithelial foot processes, formation of cytoplasmic vacuoles, microvillous formation and increased numbers of lysosomes in the cytoplasm of podocytes. It is strongly suggested that proteinuria in PAN nephrosis may be primarily due to a glomerular epithelial lesion, leading to focal disarray of anionic sites or focal defects in the epithelial covering of the basement membrane. The loss of anionic sites in the basement membrane nay be caused by the foot process fusion and the epithelial detachment from the basement membrane.

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고분자전해질 연료전지에서 전기화학반응 열생성에 의한 열전달특성 (Heat transport characteristics by heat generation of electrochemical reactions in proton exchange membrane fuel cell)

  • 조선아;이필형;한상석;황상순
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.3377-3382
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    • 2007
  • In proton exchange membrane fuel cell, the heat is generated at the catalyst layer as result of exothermic electrochemical reaction. This heat increases temperature of gas diffusion layer and membrane whose conductivity is very sensitive to humidity, function of temperature. So it is very important to analysis heat transfer through fuel cell to maintain temperature at specified range. In this paper numerical simulation was done including reversible, irreversible, ionic resistance, water formation loss to source term of energy equation. Results show that irreversible and water formation loss contributes mainly to energy source term and as current density increases, all of energy source terms become increased and Nusselt number is increased as results of more heat generation. Particularly irreversible loss is found to be predominant among the all energy source and water formation at cathode channel influences the temperature distribution of fuel cell greatly.

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인삼(Panax ginseng C.A. Meyer) 잎의 생장과정에 따른 엽록체 미세구조 및 틸라코이드막 단백질의 변화 (Changes of Chloroplast Ultrastructure and Thylakoid Membrane Proteins during Growth of Ginseng (Panax ginseng C.A. Meyer) Leaf)

  • 안정숙;박훈;김우갑
    • Journal of Ginseng Research
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    • 제19권3호
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    • pp.275-280
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    • 1995
  • The formation of thylakoid membrane proteins and changes in the chloroplast ultrastructure of ginseng leaf were investigated as a function of time following the leaf emergence. The leaf chloroplast obtained just after the leaf emergence showed short rod-like thylakoids which were connected and arranged in 3~4 layers along the longitudinal axis of the chloroplast. The 10 DAE (days after emergence) chloroplast started to form grana structure. The typical grana structure was observed 17 DAE, and the grana was fully developed 28 DAE. The membrane proteins obtained from just after emerging leaf were separated into many minor bands indicating no CP-complex formation yet. LHC II was detected after 10 days. CP 47 and CP 43 were detected after 17 days. After 28 days, the PS I and PS II proteins were distinctly separated into CP 1, LHC II, CP 47, CP 43, CP 29, CP 27+24. Thus, the appearance of the light harvesting protein, LHC II, which was concentrated in grana stacks, was consis tent in time with the formation of grana stacks 17 DAE. Key words Chloroplast ultrastructure, grana, CP-complex, LHC II.

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