• Journal of the Korean Society for Precision Engineering
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• v.30 no.9
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• pp.909-913
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• 2013

Various types of large substrate handling robots are used in the thin file solar cell manufacturing line as well as LCD or PDP production line. Because the robot handles the heavy substrate at high speed, there are some issues such as vibration control and the optimal design of arms and forks. As the substrate becomes larger and heavier, robot systems are also larger and the vibration issue of the robot end-effector becomes more important. In the paper, we established the robot modeling and the control architecture including the flexible part such as forks. Then, we performed dynamic simulation in the various condition and analyzed the characteristics of the fork vibration. We can reduce the vibration using the trajectory planning and input shaping algorithm and it was proved by experiment.

• Journal of the Semiconductor & Display Technology
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• v.12 no.4
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• pp.39-44
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• 2013

In the semiconductor heat-treatment process, the temperature uniformity determines the film quality of a wafer. This film quality effects on the overall yield rate. The heat transfer of the wafer surface in the heat-treatment process equipment is occurred by convection and radiation complexly. Because of this, there is the nonlinearity between the wafer temperature and reactor. Therefore, the accurate prediction of temperature on the wafer surface is difficult without the direct measurement. The thermal camera and the T/C wafer are general ways to confirm the temperature uniformity on the heat-treatment process. As above ways have limit to measure the temperature in the precise domain under the micro-scale. In this study, we developed the thin film type temperature sensor using the MEMS technology to establish the system which can measure the temperature under the micro-scale. We combined the experiment and numerical analysis to verify and calibrate the system. Finally, we measured the temperature on the wafer surface on the semiconductor process using the developed system, and confirmed the temperature variation by comparison with the commercial T/C wafer.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• v.1
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• pp.491-494
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• 2006

Kalman filtering (KF) is hard to be applied to the SINS (Strap-down Inertial Navigation System)/RDSS (Radio Determination Satellite Service) integrated navigation system directly because the time delay of RDSS positioning in active mode is random. BP (Back-Propagation) Neuron computing as a powerful technology of Artificial Neural Network (ANN), is appropriate to solve nonlinear problems such as the random time delay of RDSS without prior knowledge about the mathematical process involved. The new algorithm betakes a BP neural network (BPNN) and velocity feedback to aid KF in order to overcome the time delay of RDSS positioning. Once the BP neural network was trained and converged, the new approach will work well for SINS/RDSS integrated navigation. Dynamic vehicle experiments were performed to evaluate the performance of the system. The experiment results demonstrate that the horizontal positioning accuracy of the new approach is 40.62 m (1 ${\sigma}$), which is better than velocity-feedback-based KF. The experimental results also show that the horizontal positioning error of the navigation system is almost linear to the positioning interval of RDSS within 5 minutes. The approach and its anti-jamming analysis will be helpful to the applications of SINS/RDSS integrated systems.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.140-145
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• 2021

This paper deals with the development of a deep-learning-based runway cleaning robot using an optical camera. A suitable model to realize real-time object detection was investigated, and the differences between the selected YOLOv3 and other deep learning models were analyzed. In order to check whether the proposed system is applicable to the actual runway, an experiment was conducted by making a prototype of the robot and a runway model. As a result, it was confirmed that the robot was well developed because the detection rate of FOD (Foreign Object Debris) and cracks was high, and the collection of foreign substances was carried out smoothly.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.4
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• pp.83-93
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• 2007

This paper represents the development of 3-axises loadcell for measuring the side-force of suspension module of MPV(Multi Purposed Vehicle). The side force causes the failure of damper, such as leakage. The loadcell was developed using strain gauges, and the Wheastone bridge circuit to compensate for the cross-talk between the each axises and the measurement error by temperature. Structure analysis of loadcell was accomplished with FEM(Finite Element Method) to optimize the location of strain gages. The design optimization for important factors that have an effect on performance of loadcell was accomplished by using DOE(Design of Experiment). Loadcell was produced and successfully tested, showing good sensitivity and low cross-talk. The cross-talk of the developed loadcell is bellow 5%. The load history was measured at proving ground. The maximum side-force, the longitudinal force, and vertical force of MPV are 4.2 kN, 8.0 kN, and 17.0 kN, respectively, at Belgian road.

• Smart Structures and Systems
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• v.20 no.1
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• pp.85-97
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• 2017

The aim of this research is to develop a new method to use magnetorheological (MR) damper for vibration control. It is a new way to achieve the MR damper response without the need to have detailed constant parameters estimations. The methodology adopted in designing the control structure in this work is based on the experimental results. In order to investigate and understand the behaviour of an MR damper, an experiment is first conducted. Force-displacement and force-velocity responses with varying current have been established to model the MR damper. The force for upward and downward motions of the damper piston is found to be increasing with current and velocity. In cyclic motion, which is the combination of upward and downward motions of the piston, the force with hysteresis behaviour is seen to be increasing with current. In addition, the energy dissipated is also found to be linear with current. A proportional-integral-derivative (PID) controller, based on the established characteristics for a quarter car suspension model, has been adapted in this study. A fuzzy rule based PID controller (F-PID) is opted to achieve better response for a varying frequency input. The outcome of this study can be used in the modelling of MR damper and applied to control engineering. Moreover, the identified behaviour can help in further development of the MR damper technology.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.12
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• pp.1541-1546
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• 2013

The stress concentration of lock-claws, which are one of the important parts for pneumatic fitting for a flexible tube connection, was investigated by finite element simulation. In this study, the generation of the local plastic deformation was predicted when the tube was hooked up to a pneumatic fitting in order to disperse the stress concentration, and design optimization was carried out using the Taguchi method. For the optimization, the outer width, bending angle, and inner radius of the lock-claws are used as main variables. As a result, their respective contribution ratios are revealed as 81.3%, 10.9%, and 1.5%. The ratio of the total stress distribution was improved by 4% compared with the initial design of the lock-claws.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1875-1877
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• 2001

Glaucoma is an eye disease which is caused by abnormal high lOP (Intra Ocular Pressure). High lOP is caused by the aqueous humor which is produced consistently but not drained due to malfunction of the trabecular system which has a role of draining the aqueous humor into the venous system. Currently, there are some methods to treat glaucoma, Among these, the use of implants is increasing in these days due to many problems In other methods. However, conventional implants are passive implants and have critical disadvantage. Therefore, it is needed to develop an active implant which is composed of a valve actuator, pressure sensor, controller, and power supply. In this paper, we make experiment with the fabricated valve actuator in In-vitro experiment, and estimate the in-vivo result using the experimental result and investigate the possibility of the fabricated valve.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.9
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• pp.1007-1013
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• 2011

Because of their high flexibility and durability, multilayer bellows are manufactured for use in commercial vehicles, while single-layer bellows are manufactured for use in passenger vehicles. A study based on the finite element method (FEM) and shape optimization for the single-layer bellows has been actively performed; however, until now, a study based on the FEM has rarely been performed for the multilayer bellows with gaps between the layers. This paper presents a finite-element modeling scheme for the multilayer bellows to improve simulation reliability during the evaluation of stress and flexibility. For performing shape optimization for the multilayer bellows, DOE (design of experiment) and the Kriging metamodel followed by the D-optimal method are used.

• Transactions of Materials Processing
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• v.3 no.1
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• pp.110-119
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• 1994

In this paper, a new forming process of large-size forgings of converged nozzle-shape is developed by the experimental study using the incremental forging method and combined forming method. The development of the forming process is focused on the manufacturing of large-size forgings by the press with medium load capacity. Various related processes are proposed and modelling experiments using plasticine are carried out. Thus, the incremental forging method for expanding is recommanded from the study of formability and forming load, etc. The selected process is then subjected to modelling experiments of lead and the design parameters such as preform for final process, die-width of the upper die and reduction amount of each stroke are determined. In order to verify the effectiveness of the selected process, 1/7 scale prototype experiment of the real material is carried out. Forgings of converged nozzle shape can be produced by the developed process within the limit loads and with the simple tools.