• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권7호
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• pp.308-314
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• 2005

The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.158-162
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• 1997

In this paper, the electrical and dielectrical properties were investigated in Pb(Zr,Ti)O$_3$-Pb(Mn,Nb)O$_3$ ceramics which are manufactured with the substitution of Ba in site Pb. In older to increase the del and Kp , Ba was substitued to site Pb from 0 to 0.1 by 0.02 mol%. As the Ba substitution is increased, dielectric constant is increased and electricmachanical coupling factor showed the maximum value at Ba 0.06mol% and the mechanical qualify factor is decreased and the tetragonality and the grain size are decreased as the Ba substitution.

• 한국전기전자재료학회논문지
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• 제18권2호
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• pp.136-141
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• 2005

In this study, in order to develop the low temperature sintering ceramics for multilayer piezoelectric transformer, PCW-PMN-PZT ceramics using Li$_2$CO$_3$, Bi$_2$O$_3$, and CuO as sintering aids were manufactured according to the amount of MnO$_2$ addition. Their microstructural, dielectric and piezoelectric properties were investigated. When the sintering aids were added, specimens could be sintered below 95$0^{\circ}C$, but mechanical qualify factor decreased. Therefore, MnO$_2$ was added excessively to the PCW-PMN-PZT ceramics to increase mechanical quality factor. At the sintering temperature of 95$0^{\circ}C$, the density, dielectric constant($\varepsilon$$_{r}$), electromechanical coupling factor(k$_{p}$), mechanical quality factor(Q$_{m}$) and Curie temperature(T$_{c}$) of 0.1 wt% MnO$_2$ added specimen showed the optimal values of 7.75 g/㎤, 1503, 0.57, 1502, and 337, respectively, for multilayer piezoelectric transformer application.ation.n.

• 한국전기전자재료학회논문지
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• 제16권3호
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• pp.202-206
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• 2003

In this study, modified PbTi $O_3$ ceramics was manufactured to apply for 30MHz SMD type ceramic resonator with the variations of electrode weight. To investigate the effects of electrode weight on resonant characteristics of ceramic resonator using 3$^{rd}$ overtone thickness vibration mode, ceramic wafers for resonator were fabricated by evaporating electrode weights of 0.66, 1.765, 2.32, 3.87$\times$ 10$^{-4}$ g/c $m^2$ with silver, respectively. And then, SMD type ceramic resonators were fabricated with the size of 3.7$\times$3.1mm and electrode radius size of 0.77mm. With increasing electrode weight, resonant resistance was gradually decreased. At the electrode weight of 2.32$\times$10$_{-4}$ g/c $m^2$, mechanical quality factor( $Q_{mt3}$) and dynamic range(D.R) showed the maximum value of 2,152 and 49dB, respectively.

• 한국전기전자재료학회논문지
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• 제20권2호
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• pp.124-129
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• 2007

Dielectric and piezoelectric properties of $0.57Pb(Sc_{1/2}Nb_{1/2})O_{3}-0.43PbTiO_{3}$, which is the morphotropic phase boundary composition for the PSN-PT system, were investigated as a function of $Fe_{2}O_{3},\;Nb_{2}O_{5}\;and\;MnO_{2}$ addition 0 wt% to 0.9 wt%. The maximum dielectric constant of ${\varepsilon}_{33}/{\varepsilon}_{o}=2054$ and the minimum dielectric loss of $tan{\delta}=0.37\;%$ at room temperature were obtained at 0.1 wt% of $Fe_{2}O_{3}$ and 0.5 wt% of $MnO_{2}$ addition, respectively. With addition of 0.5 wt% $Nb_{2}O_{5}$ and $0.5\;wt%\;MnO_{2}$, the electromechanical coupling factor $k_{p}$ and mecanical quality factor $Q_{m}$ were significantly increased, respectively. The maximum electromechanical coupling factor $k_{p}=61.5\;%$ was obtained by addition of $Nb_{2}O_{5}$ and high mechanical quality factor $Q_{m}=919$ was obtained by addition of $MnO_{2}$. The $Q_{m}(=919)$ value is 3.3 times larger than that of non-doped 0.57PSN-0.43PT ceramics.

• 한국전기전자재료학회논문지
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• 제19권7호
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• pp.655-661
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• 2006

Dielectric and piezoelectric properties of PMN-PZT ceramics with a high mechanical quality factor$(Q_m)$ and a low temperature sintering temperature were investigated as a function of PZN substitution in order to develop multilayer piezoelectric transformer for AC-DC converter. Multilayer piezoelectric transformers were subsequently manufactured using the PMN-PZN-PZT ceramic offering the optimal behavior and then the electrical performance were invetigated. At the sintering temperature of $940^{\circ}C$, density, electromechanical coupling factor$(k_p)$, mechanical qualify factor$(Q_m)$ and dielectric constant$(\varepsilon_r)$ of 8 mol% PZN substituted specimen were $7.73g/cm^3$, 0.524, 1573 and 1455, respectively. The PZN substitution caused a increase in the dielectric constant and the electromechnical coupling factor. The voltage step-up ratio of multilayer piezoelectric transformer showed the maximum value at near the resonant frequency of 76.55 kHz and increased according to the increase of load resistance. The multilayer piezoelectric transformer with the output impedance coincided with the load resistance showed the temperature increase of less than $20^{\circ}C$ at the output power of 10 W. Based on the results, the manufactured multilayer transformer using the low temperature sintered PMN-PZN-PZT ceramics can be stably driven for both step-up and down transformers.

• 품질경영학회지
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• 제30권3호
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• pp.111-119
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• 2002

Gears are essential elements for mechanical power transmission. Geometric precision is the main factor for characterizing gear grade and qualify. Gear pitch is one of the crucial measurements, which is defined as a distance between two adjacent gear teeth. It is well-known that variability in gear pitches may causes wear-out and vibration noise. Therefore maintaining pitch errors at a low level plays a key role in assuring the gear quality to customers. This paper is concerned with a case study, which presents a computerized system for Inspecting pitch errors in a gear machining process. This system consists of a PC and window-based programs. Although the start and stop is manually accomplished, the process of measuring and analyzing pitch data is automatically conducted in this system. Our purpose lies in reducing inspection cost and time as well as Increasing test reliability. Its operation is briefly illustrated by example. Sometimes a strong autocorrelation is observed from pitch data. We also discuss a process monitoring scheme taking account of autocorrelations.

• 한국전기전자재료학회논문지
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• 제16권12S호
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• pp.1195-1199
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• 2003

In this study, in order to develop the low temperature sintering ceramics for multilayer piezoelectric transformer, dielectric and piezoelectric properties of PSN-PZT[0.91Pb(Sb$\sub$1/2/Nb$\sub$1/2/)$\sub$0.03/(Zr$\sub$0.495/Ti$\sub$0.505/)$\sub$0.97/O$_3$-0.04Pb(Ni$\sub$1/2/W$\sub$1/2/)O$_3$+0.05BiFeO$_3$+0.3wt％MnO$_2$+0.6wt％CuO〕 ceramics were investigated according to Zr/Ti ratio. As Zr/Ti ratio is increased, electromechanical coupling factor(k$\sub$p/) and dielectric constant increased and then decreased after the ratio of Zr/Ti=50/50. Also, mechanical qualify factor(Q$\sub$m/) decreased and then increased after the ratio of Zr/Ti=50/50.

• 한국전기전자재료학회논문지
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• 제19권1호
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• pp.35-39
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• 2006

In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by sintering with $Li_2CO_3-Na_2CO_3$ as sintering aids at $950^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of PNN substitution. With increasing PNN substitution, dielectric constant(${\epsilon}_r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased to $12 mol\%$ PNN substitution and then showed a tendency to decrease rapidly With increasing PNN substitution, crystal structure changed from tetragonal to rhombohedral at $12 mol\%$ PNN substitution and then secondary phase was appeared and its intensity was increased. At the $12 mol\%$ PNN substituted PMN-PZT composition ceramic sintered at $950^{\circ}C$, density, kp, $d_{33}$ and Qm showed the optimum value of $7.79 g/cm^3$, 0.599, 419 pC/N, and 894, respectively for multilayer piezoelectric actuator application.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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• pp.413-415
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• 2000

Piezoelectric ceramics of PZT have been developed to apply for transformers in notebook. Use of piezoelectric ceramics in applications like piezoelectric transformers was made possible by the development of new materials with high electromechanical coupling coefficients and high mechanical quality factor. "Hard" ferroelectiric ceramics of complex composition based on lead zirconate titanate with Mn additive have been prepared. The perovskitic phase reaction of the oxides. The crucial role played by the intermediate mixing and grinding procedures in the assessment of the final properties of the material was investigated. Densification up to approximately the theoretical density value was achieved. The polarization was obtained by subjecting the samples at $30kVcm^{-1}$ poling electric field, in a silicon oil bath heated at $110^{\circ}C$. Their microstructural and morphological properties were checked by X-ray diffraction analysis and scanning electron microscopy. The optimized samples presented very high qualify and electromechanical coupling factors, together with small dielectric loss.