• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1082-1086
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• 2004

In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of wafer. The grinding of wafer is usually used by the infeed grinding machine. The infeed grinding machine has been depended on imports. Therefore, it is necessary to develop the infeed grinding machine because the demand of the infeed grinding machine is increasing more and more. This paper describes the technologies of infeed grinding machine and intend to introduce the studies in the development of the intelligent grinding system for grinding of wafer. The air bearing spindle for the infeed grinding machine was developed by domestic technologies and the grinding part design of the intelligent grinding system for wafer grinding was completed.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.12
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• pp.2962-2969
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• 1993

Recently, a study on the mirror-like surface grinding of brittle materials is active and as branch of these study, new dressing method for superabrasive wheel, electrolytic inprocess dressing(Elid) was developed. Using Elid, the mirror-like surface of brittle material can be generated without polishing or lapping process. In the future, Elid grinding will take important place in industry. But so far the analysis on Elid grinding was not quantitative but qualitative. In this study, The purpose is the quantitative analysis on Elid grinding by computer simulation, For computer simulation, the mean and the variance of the abrasive distribution were measured by tracing of the grinding wheel with stylus in transverse direction in the case of respective dressing current condition. This measurement result in a density distribution of abrasive by mathematical formulation using statistical method. The prediction of the surface roughness in Elid grinding was based on this density distribution.

• Transactions of the Korean Society of Mechanical Engineers
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• v.13 no.5
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• pp.837-846
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• 1989

Belt tension distribution for an abrasive blet grinding was investigated analytically and experimentally for (1) slack side and (2) tight side blet grinding. Classical Eytelwein equation was used to predict the belt tension distribution with dividing contact angles into (1) inactive and (2) active angles. General friction theory was modified based on the friction force between the belt and the support in the grinding contact area that was obtained by experiments. It was found that analytical results were in good agreement with the experimental results. Also, the tight side belt grinding was recommended since it could carry out more grinding load than that of slack side belt grinding.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.3-6
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• 2008

Electrolytic in-process dressing (ELID) grinding is a new technique for achieving a nanoscale surface finish on hard and brittle materials such as optical glass and ceramics. This process applies an electrochemical dressing on the metal-bonded diamond wheels to ensure constant protrusion of sharp cutting grits throughout the grinding cycle. In conventional ELID grinding, a constant source of pulsed DC power is supplied to the ELID cell, but a feedback mechanism is necessary to control the dressing power and obtain better performance. In this study, we propose a new closed-loop wheel dressing technique for grinding wheel truing that addresses the efficient correction of eccentric wheel rotation and the nonuniformity in the grinding wheel profile. The technique relies on an iterative control algorithm for the ELID power supply. An inductive sensor is used to measure the wheel profile based on the gap between the sensor head and wheel edge, and this is used as the feedback signal to control the pulse width of the power supply. We discuss the detailed mathematical design of the control algorithm and provide simulation results that were confirmed experimentally.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.10a
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• pp.349-354
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• 2000

A use of Titanium alloy as a structural material is increasing lately. Among those titanium alloys, Ti-6A1-4V alloy is the most popular one with taking 2/3 of it's market. Also, Ti-6A1-4V alloy can get the stability of organization and product measure, and the evaluation of the cutting ability and the mechanical characteristics. The point in titanium alloy work is on how treat the heat generated during grinding. Because the heat conductivity of titanium alloy is unnegligibly low, the grinding heat is accumulated in workpiece, and it cause the increasing of grinding grits' wear and the rough grinding surface. So, these characteristics in grinding of titanium alloy will change the mechanical characteristics of the titanium alloy. From this study, the mechanical characteristics of annealed Ti-6A1-4V alloy after grinding was concerned with checking out the bending strength values, and the factor of the change and the difference was analyzed after analyzing the surface roughness and the image from SEM.

• Transactions of the Korean Society of Automotive Engineers
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• v.1 no.2
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• pp.103-116
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• 1993

Recently, engineering ceramics called as the 3 material have been concerned significantly with some excellent mechanical properties and many functions as new materials for high precision mechanical components and engineering parts for at large. Then, for designing engineering parts using engineering ceramics, bending strength value data with high reliability is more essential than any other mechanical properties. But, because of brittleness and structural characteristic, it is very hard to grind with conventional tools, and the generation of cracks and various defects of engineering ceramics parts during grinding machining process are serious problems. Thus, in present study, surface grinding experiments with various machining conditions using resin bond diamond wheels are carried out to obtain the most excellent guality of testpiece surface and optimum step of grinding process for the high efficient stock removal rate to save running time. As the results from grinding experiments and 3-points bending strength test of ground Al2O3 ceramics parts on Korean Standard, manufactured in our country and Japan, basic technology and know-how to develop the optimum grinding machining conditions and also high bending strength values with high reliability are obtained.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.7
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• pp.595-600
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• 2016

An orbital grinding system uses a special motion to machine crankshafts in ships. When a crankshaft is operated, eccentric pins rotate and a grinding wheel moves in order to grind the pins. Thermal error caused by heat generated in the grinding process decreases the quality of the final product. In this study, the thermal error of an orbital grinding system caused by heat generation was investigated in order to predict the extent of thermal error that can occur during the grinding process. Since the machine position changes during orbital grinding, the pin part is divided into 30 degree intervals and heat is generated. Total thermal error was measured by summing the thermal errors associated with the pin and the grinding wheel. Total thermal error was found to reach a maximum at 60 degrees and a minimum at 210 degrees because of the shape of the crankshaft.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.5
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• pp.95-102
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• 2002

The grinding operation is an important machining process for machining of final surface. However, grinding process has inevitable troubles such as loading and glazing for grinding wheel. It is, therefore, an essential research theme to determine the wheel life and the dressing time for efficient grinding. In this study, AE signals (AEavg) generated in the grinding operation were measured and the dressing time was determined from the analysis of the AEavg value. To verify the propriety of the obtained result, the AE signals measured on the grinding and the dressing operation were compared with the grinding force signals and the dressing force which were measured at same time. From the obtained result, it was confirmed that the determination of the wheel life and the dressing tilde by the AE measurement technique proposed in this study can be practically used.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.1
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• pp.187-194
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• 2001

The objective of this study is to develop a model for the grinding process for predicting the temperature, thermal stress and thermal deformation. The thermal load during grinding is modeled as uniformly distributed, 2D heat source moving across the surface of elastic half space, which is insulated or subjected to convective cooling. That non-dimensional temperature distribution, non-dimensional longitudinal stress distribution and non-dimensional thermal deformation distribution are calculated with non-dimensional heat source half width and non-dimensional heat transfer coefficient. Finite element models are developed to simulate moving heat source, which is modeled as uniformly or triangularly distributed, the FEM simulation is compared with numerical solution.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.10a
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• pp.136-144
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• 1992

Recently, Silicon Nitrde ceramic is regarded as the representative engineering ceramic with the excellent mechanical properties and many functions for mechanical components and parts among various kinds of ceramics in the mechanical industry. But, during the manufacturing of engineering ceramics, there is many volumetric shrinkage coupled with a distortion of the parts which is produced. Due to the requirement for high accuracy of size, form, and surface finish of the components, machining is needed surely. Nowdays, grinding with a resin bond type diamond wheels has been generally applied to machining of the engineering ceramics in the whole world because that it can be conveniently proceeded for workers to dress of tool and made with high reliability in producing factories among many bond type super-abrasive wheels yet. It is important task for attaining prescribed mechanical components with high reliability to observe the grinding mechanism of ceramics as like generation of cracks and chipping of material during process. Because they considerably effects on the strength characteristic of machined mechanical components. In this study, various surface grinding experiments using resin bond type diamond wheels are carried out for Silicon Nitride ceramic. Grinding mechanism of ceramics is observed experimentally and the relationship with various conditions is also attained. Form this experimental study, some useful machining data and information to determine proper machining condition for grinding of Silicon Nitride ceramic is obtained.