• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2003년도 ICCAS
• /
• pp.824-828
• /
• 2003

This paper explains problems of force-reflecting teleoperation grinding work and proposes some methods to solve those. For stable contact between robot tool(grindstone) and contact surface the mechanical impedance force control is used. The sliding phenomenon of grindstone has been appeared at the contact surface during the grinding work. The sliding problems caused by friction and rotation of grindstone are eliminated by using tangential direction sliding compensation control. The rotation force of grindstone makes the tool move to tangential direction along the surface suddenly even though an operator pushes the tool only in normal direction to the surface. Normal direction force control is applied for grinder not to roll and fracture on the grinding surface. Vibration problem of grindstone is decreased by second order low-pass filter. Therefore we can precise grinding work at the grinding surface and feel the reality

• ETRI Journal
• /
• 제32권5호
• /
• pp.722-728
• /
• 2010

This paper presents the design and fabrication model of a touchpad based on a contact-resistance-type force sensor. The touchpad works as a touch input device, which can sense contact location and contact force simultaneously. The touchpad is 40 mm wide and 40 mm long. The touchpad is fabricated by using a simple screen printing technique. The contact location is evaluated by the calibration setup, which has a load cell and three-axis stages. The location error is approximately 4 mm with respect to x-axis and y-axis directions. The force response of the fabricated touchpad is obtained at three points by loading and unloading of the probe. The touchpad can detect loads from 0 N to 2 N. The touchpad shows a hysteresis error rate of about 11% and uniformity error rate of about 3%.

• Journal of Mechanical Science and Technology
• /
• 제16권9호
• /
• pp.1072-1077
• /
• 2002

A degree of sharpness in wheel grains affects the surface roughness and dimensional accuracy in the grinding process. If a wheel with dull grains is used, the grinding force is increased and the surface roughness is deteriorated. In ovder to produce a precision component economically, the magnitude of the wear amount in the grinding wheel has to be limited. In this study, experimental evaluation of a wheel life varying with the grinding ratio and static grinding force was conducted. The grinding ratio and grinding force were measured to seek the grinding performance of the WA wheel. The relationship between the grinding ratio and static grinding force was presented.

• 반도체디스플레이기술학회지
• /
• 제18권1호
• /
• pp.25-31
• /
• 2019

In this study, a new adhesion evaluating equipment and data processing methods were developed to overcome some limitations of existing evaluating equipment. Nano-diamond coated tool is a specimen of experiment. When applying frictional force and shear force on the specimen by a rotating polishing pad, delamination occurs at a moment. During each experiment, the vibration, load, and torque is obtained by accelerometer, loadcell and torque s+ kpensor. Frictional force and coefficient of friction are obtained by calculating torque and load. Based on FFT transformation, acceleration is processed and analyzed. As a result, the moment of delamination and the load at that time can be detected by the new developed equipment and measurement system. Finally, we call this load as an Adhesion force.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
• /
• pp.653-654
• /
• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

• 대한기계학회논문집A
• /
• 제29권7호
• /
• pp.983-989
• /
• 2005

The effects of mechanical parameters on the characteristics of chemical mechanical polishing(CMP) can be directly evaluated by friction force. The piezoelectric quartz sensor for friction force measurement was installed, and friction force could be detected during CMP process. Furthermore, friction energy can be calculated by multiplying relative velocity by integration of the friction force throughout the polishing time. $SiO_2$ slurry for interlayer dielectric(ILD) CMP was used in this experiment to consider the relation of frictional characteristics and polishing results. From this experiment, it is proven that the friction energy is an essential factor of removal rate. Also, the friction force is related to removal amount per unit length(dH/ds) and friction energy has corelation to the removal rate(dH/dt) and process temporature. Moreover, within wafer non-unifornity(WIWNU) is related to coefficient of friction because of the mechanical moment equilibrium. Therefore, the prediction of polishing result would be possible by measuring friction force.

• Tribology and Lubricants
• /
• 제28권5호
• /
• pp.203-211
• /
• 2012

Atomic force microscopy (AFM) has been used as a tool, not only for imaging surfaces, but also for measuring surface forces and mechanical properties at the nano-scale. Force calibration is crucial for quantitatively measuring the forces that act between the AFM probe of a force sensing cantilever and a sample. In this work, the lateral force calibrations of a V-shaped cantilever were performed using the finite element method, multiple pivot loading, and thermal noise methods. As a result, it was shown that the multiple pivot loading method was appropriate for the lateral force calibration of a V-shaped cantilever. Further, through crosschecking of the abovementioned methods, it was concluded that the thermal noise method could be used for determining the lateral spring constants as long as the lateral deflection sensitivity was accurately determined. To obtain the lateral deflection sensitivity from the sticking portion of the friction loop, the contact stiffness should be taken into account.

• Journal of Magnetics
• /
• 제14권4호
• /
• pp.175-180
• /
• 2009

This paper describes the design and analysis of a tubular linear actuator for intelligent AAP (Active Accelerate Pedal) system. In a driving emergency, the electromagnetic actuator produces an additional pedal force such as the active pedal force and vibration force to release the driver's foot on accelerator pedal. A prior study found that the linear actuator with a ferromagnetic core had a problem in transferring the additional force naturally to a driver due to the cogging force. To reduce the cogging force and obtain higher performance of the AAP system, a coreless tubular linear actuator is suggested. Electromagnetic finite element analysis is executed to analyze and design the coreless tubular actuator, and dynamic analysis is performed to characterize the dynamic performance of the AAP system with the suggested tubular actuator for two types of thrust force.

• 한국초전도ㆍ저온공학회논문지
• /
• 제15권3호
• /
• pp.13-19
• /
• 2013

Superconducting field coils using a high-temperature superconducting (HTS) wires with high current density generate high magnetic field of 2 to 5 [T] and electromagnetic force (Lorentz force) acting on the superconducting field coils also become a very strong from the point of view of a mechanical characteristics. Because mechanical stress caused by these powerful electromagnetic force is one of the factors which worsens the critical current performance and structural characteristics of HTS wire, the mechanical stress analysis should be performed when designing the superconducting field coils. In this paper, as part of structural design of superconducting field coils for 17 MW class superconducting ship propulsion motor, mechanical stress acting on the superconducting field coils was analyzed and structural safety was also determined by the coupling analysis system that is consists of commercial electromagnetic field analysis program and structural analysis program.

• Journal of Mechanical Science and Technology
• /
• 제16권4호
• /
• pp.436-447
• /
• 2002

In this study, the dynamic response of a catenary system that supplies electrical power to high-speed trains is investigated. One of the important problems which is accompanied by increasing the speed of a high-speed rail, is the performance of stable current collection. Another problem which has been encountered, is maintaining continuous contact force between the catenary and the pantograph without loss of panhead. The dynamic analyses of the catenary based on the Finite Element Method (FEM) are performed to develop a pantograph suitable for high speed operation. The static deflection of the catenary, the stiffness variation in contact lines, the dynamic response of the catenary undergoing the force of a constantly moving load and the contact force were calculated. It was confirmed that a catenary model is necessary to study the dynamic characteristics of the pantograph system.