• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.7
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.526-531
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• 2000

Application of electrodewatering (EDW) to mechanical dewatering system was studied to decrease water content in the sludge generated from waste water treatment process. Experiments realized the reduction of water content in the sewage sludge. EDW enhancing the conventional filtration by an electric field is an emerging technology with the potential to improve dewatering. In this study, a piston filter press was constructed, the digested sludges were dewatered by EDW under conditions of DC electric field and constant pressure in the piston filter press. Constant electric field from $0{\sim}120\;V/cm$ and constant pressure $98.1{\sim}392.4\;kPa$ were used. The results showed that as electric field was increased the dewatering rates increased and as pressure was increased the dewatering rates decreased. Also as polymer was added the dewatering rates increased. This experiments produced final sludge cake with water content of 60 wt% using EDW, compared with 80 wt% using pressure filtration alone.

• Particle and aerosol research
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• v.12 no.4
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• pp.151-159
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• 2016

Since airborne viruses have been known to aggravate indoor air quality, studies on development of anti-viral air filter increase recently. In this study, a mass aerosol particle generator for coating a commercial air filter (over $300{\times}300mm^2$) was built, and evaluated by comparing a commercial particle generator. Then, via this device, a commercial air filter was coated with anti-viral material ($SiO_2-Ag$ nanoparticles in this study), so fabrication of commercial anti-viral air filter was performed and the pressure drop, filtration efficiency, and anti-viral ability of the filter were evaluated against aerosolized bacteriophage MS2 in a continuous air flow condition. The result showed that the particle generation of the new generator was more than about 8.5 times over which of the commercial one. Consequently, $SiO_2-Ag$ particle coating on a filter does not have significant effects on the filtration efficiency and pressure drop with different areas, and the average anti-viral efficiency of the $SiO_2-Ag$ filter was about 92% when the coating areal density was $1.0{\times}10^{12}particles/m^2$.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.10
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• pp.903-909
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• 2015

In this study, we used GO (graphene oxide) in order to enhance the adhesion between Ag NWs (nanowires) and substrates. By using a mixture solution of GO and Ag NW, a vacuum filtration process was used to fabricate a 50nm diameter thin film. Next, by using a light annealing process, the mechanical and electrical stability of Ag NW network was improved without any other treatment. The physical properties of the Ag NW - GO hybrid transparent conductive thin film was characterized in terms of a bending test, resistance and transmittance test, and nanoscale imaging using field-emission scanning electron microscopy.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.8
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• pp.1069-1076
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• 2002

Contamination particles in a hard disk drive can cause serious problems including slider crash and thermal asperities. A recirculation filter is typically installed in the hard disk drive to remove the particles. Measurements and theoretical predictions of particle concentration decay with the filter are carried out for a commercially available HDD. Especially, the effect of disk rotational speed on the particle capture efficiency is investigated. Results show that filter efficiency is higher for higher disk rotational speed.

• Journal of the Korean Society of Industry Convergence
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• v.20 no.4
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• pp.339-343
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• 2017

Masks are a portable functional product for daily use. They can protect user health by filtering harmful fine particles in the air. In the past decade, there have been approximately 10 yellow dust incidences per year, amounting to a total duration of 20 days, and they continue to increase year after year. In addition, the frequency of yellow dust incidences in Korea has increased by more than four times compared to levels from the 1970s. Statistical reports indicate that annual damages caused by yellow dust amount to more than six trillion KRW. This study developed a zero-fog multi-layer mask with a collection efficiency and yellow dust and particulate matter filtration areas that are at least thrice as effective as existing masks. The new mask also reduces pressure drag by half.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.802-806
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• 2001

Diesel particulate trap is the most reliable system to reduce the particulate matters from diesel engine. Filter is the core component of DPF and ceramic monolith type is dominantly used, which is expensive and fragile relatively at thermal shock. Porous metal filter, which has superior thermal characteristics and low cost, was tested in order to analyze the regeneration performance by using with ferrocene additive. This filter showed the 72% filtration efficiency, additives itself diminished 48% of PM from engine out emission, and final PM reduction ratio of 89% was achieved by DPF system with D-13 test mode.

• Journal of the Korean Society of Industry Convergence
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• v.20 no.1
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• pp.74-80
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• 2017

This study aimed to evaluate the validity of an exhausted injector design for filtration system and the performance characteristics thereof. The evaluation was intended through computational fluid dynamics(CFD) analysis based on computer simulation rather than through prototype fabrication and testing. Furthermore, the design of experiment was used to create an experimental design table by which the reaction characteristics of response factors were analyzed for design parameters. All experiments were substituted with computer simulations. Lastly, an optimal design model for the injection tubes was determined based on response surface method algorithms.

• Transactions of the Korean Society of Automotive Engineers
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• v.18 no.3
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• pp.60-68
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• 2010

In order to understand the flow and filtration characteristics in a wall-flow type DPF(Diesel Particulate Filter), 0-D, 1-D, and 3-D simulations are preformed. In this paper, three model are explained and validated with each other. Based on the comparisons with 1-D and 3-D results for the steady state solution, 3-D CFD analysis is preferable to 1-D for the prediction of wall velocity at the inlet and exit plane. Because PM loading process is transient state phenomena, the combination of full 3-D and time dependent simulation is crucial for the configuration of wall channels. New coupling technique, which is the connection between calculated permeability from 0-D lumped parameter model and UDF(User Defined Functions) of main solver, is proposed for the realisti

• Journal of Powder Materials
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• v.21 no.5
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• pp.389-398
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• 2014

Macroporous ceramics with tailored pore size and shape could be used for well-established and emerging applications, such as molten metal filtration, biomaterial, catalysis, thermal insulation, hot gas filtration and diesel particulate filters. In these applications, unique properties of porous materials were required which could be achieved through the incorporation of macro-pores into ceramics. In this article, we reviewed the main processing techniques which can be used for the fabrication of macroporous ceramics with tailored microstructure. Partial sintering, replica templates, sacrificial fugutives, and direct foaming techniques was described here and compared in terms of microstructures and mechanical properties that could be achieved. The main focus was given to the direct foaming technique which was simple and versatile approach that allowed the fabrication of macro-porous ceramics with tailored features and properties.