• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.88-93
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• 1998

The fabrication process and emission characteristics of gated silicon field emitter arrays(FEAs) using chemical-mechanical-polishing (CMP) method are described. Novel fabrication techniques consisting of two-step dry etching with oxidation of silicon and CMP processes were developed for the formation of sharp tips and clear-cut edged gate electrodes, respectively. The gate height and aperture could be easily controlled by varying the polishing time and pressure in the CMP process. We obtained silicon FEAs having self-aligned and clear-cut edged gate electrode opening by eliminating the dishing problem during the CMP process with an oxide mask layer. The tip height of the finally fabricated FEAs was about 1.1 $\mu$m and the end radius of the tips was smaller than 100 $\AA$. The emission current meaured from the fabricated 2809 tips array was about 31 $\mu$A at a gate voltage of 80 V.

• Journal of the Optical Society of Korea
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• v.16 no.1
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• pp.22-28
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• 2012

We report a focal-length tunable liquid lens based on thermopneumatically driven fluidic pressure. The fluidic pressure is generated by deformation of an elastomeric diaphragm induced by thermopneumaticity from a laterally integrated microheater sealed within an air chamber. The pressure is transmitted by a confined liquid to a lens diaphragm through an internal fluid channel. The liquid filling under the lens diaphragm functions as a liquid lens for dynamic focusing with properties depending on the curvature of the deformed diaphragm. The diaphragm area of the air chamber is designed five times larger than that of the lens cavity to yield high focal-length tunability by amplified deflection of the lens diaphragm. With our method, we achieved excellent focal-length tunability from infinity (without an input current) to 4 mm (with an input current of 12 mA) with a lens aperture diameter of 2 mm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.678-681
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• 2003

In conventional optical data storage numerical aperture (NA) cannot be over 1 because of diffraction limit. To overcome this limitation. solid immersion lens(SIL) have produced a great interest in near-field optical data storage. In conventional optical recording method, the dual lens system using object lens and SIL had been studied generally. But the conventional SIL system has some critical problems that must be solved. The problems are heat, contamination. alignment of optical components and so on. To solve these problems. this work proposes enhanced SIL which has several advantages for mechanical and optical issues. This new SIL system named elliptic SIL(ESIL) can use evanescent energy in near-field more effectively. In addition. because of applying the inside recording unlike previous surface recording, ESIL can clear up the problems. The design and analysis of ESIL art executed by using CODE V. Also, in this paper we composed actual data recording system and achieved recording experiment by applying ESIL to magneto-optical recording. In conclusion. we analyze the improvement of aerial density and the reasonability of application to real data storage system.

• Journal of the Korean Solar Energy Society
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• v.24 no.4
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• pp.11-18
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• 2004

A solar concentrator, named KIERDISH II, was built at KIER in order to investigate the feasibility of high temperature solar energy application system. The constructed concentrator is a dish type solar concentrator with a focal length of 4.68m and a diameter of 7.9m. To successfully operate KIERDISH II, optimal design of the absorber is very important and flux density distribution has to be known. The focal flux density distribution on the receiver was measured. We have observed the shape and size of flux images and evaluated percent power within radius. Flux density distribution is usually measured by a CCD(charge coupled device) camera and a radiometer. In this paper we present a flux mapping method to estimate the characteristic features of the flux density distribution in the focal region of solar concentrator. The minimum radius of receiver is found to be 0.15m and approximately 90% of the incident radiation is intercepted by receiver aperture.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.12
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• pp.15-21
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• 2010

Recently, there is a demand for a thermal imaging microscope in the medical field as well as the semi-conductor industry Although the demand of the advanced thermal imaging microscope has been increased, it is very difficult to obtain the technology of developing a thermal camera, because it is used for defense industry. We developed the ${\times}5$ zoom microscope which has $3\;{\mu}m$ spatial resolution to research the design and fabrication of the IR (Infrared) optical system. The optical system of the IR microscope consists of four spherical lenses and four aspheric lenses. We verified individual sensitivity of each optical parameter as the first order approach to the analysis. And we also performed structure and vibration analysis. The optical elements are fabricated using Freeform 700A. The measurement results of surface roughness and form accuracy using NT 2000 and UA3P are Ra 2.36 nm and P-V $0.13\;{\mu}m$. Finally we ascertained resolution power of $3\;{\mu}m$ using USAF (United State Air Force) 1951 IR resolution test chart.

• 한국태양에너지학회:학술대회논문집
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• 2011.04a
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• pp.199-203
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• 2011

With the improvement of standard of manufacturing process, oil cooling unit for manufacturing machine has been developed. A control system must be designed in order to keep oil temperature of the machine within a very restricted range and also to reduce energy consumption. In order to get the low deviation of the controlled temperature and the low efficiency, the on/off control scheme is gradually being replaced by a variable speed refrigeration system (VSRS) with an inverter driven compressor over recent decades. This paper gives the flowchart to control the compressor speed and also the electronic expansion valve (EEV) aperture in oil cooling unit refrigeration system using R22 as the refrigerant. This control scheme has already tested in experiment apparatus with room temperature condition constant at $25^{\circ}C$ and variable load condition at 4kW, 6kW, 7kW, 8kW and 10kW.

• Journal of the Korean Solar Energy Society
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• v.26 no.1
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• pp.7-12
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• 2006

The dish type solar thermal concentrating system can collect the solar energy above $800^{\circ}C$. It has a concentration ratio of 800 and total reflector area of $49m^2$. To operate solar receivers at high temperature, the optimum aperture size is obtained from a comparison between maximizing absorbed energy and minimizing thermal losses. The system efficiency is defined as the absorbed energy by working fluid in receiver divided by the energy coming from the concentrator. We find that system efficiency is stable in case of flow rate of above 6lpm. The system efficiency are 64.9% and 65.7% in flow rate of 6lpm and 8lpm, respectively. The thermal performance showed that the maximum efficiency and the factor of thermal loss in flow rate of 8lpm are 68% and 0.0508.

• Korean Journal of Optics and Photonics
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• v.18 no.2
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• pp.130-134
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• 2007

I present a novel curvature profilometer devised fur the profile measurement of aspheric and free-form surfaces on the nanometer scale. A profile is reconstructed from measuring the curvature of a test part of the surface at several locations along a line. For profile measurement of free-farm surfaces, methods based on local part curvature sensing have strong appeal. Unlike full-aperture interferometry they do not require customized null optics. The measurement accuracy of the curvature profilometer was assessed by comparison with a well-calibrated interferometer in NIST. Experimental results prove that the maximum discrepancy turns out to be 37 nm on the 28 mm measurement range for the spherical mirror.

• Journal of the Korean Solar Energy Society
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• v.22 no.4
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• pp.77-84
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• 2002

In order to investigate forced convection heat transfer due to the wind from the inner surface of a cavity receiver for a parabolic dish type solar energy collecting system, a two-dimensional rectangular cavity receiver is prepared and installed in a wind tunnel. The convection heat transfer coefficient of the inner surface of the receiver is dependent on the direction and the velocity of the wind. The attack angle of the cavity and the air velocity in the tunnel are controlled in a wide range so that the effects of the attack angle and the wind velocity on the heat transfer coefficient can be studied. The skirt is installed at the aperture of the cavity in order to reduce convective heat loss. The effects of the length and the installation angle of the skirt on convection heat transfer of the cavity are tested. It is found that convection heat loss can be significantly reduced by installing the skirt. Also, it is known that heat transfer from the cavity can be minimized if the angle of the skirt is $90^{\circ}$ to the outer surface of the cavity.

• Journal of the Optical Society of Korea
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• v.8 no.4
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• pp.174-181
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• 2004

Various kinds of systems, that can do target recognition and position detection simultaneously by using infrared sensing detectors, have been developed. In this paper, the detection system TRSS (Thermal target Recognition by Spiral Scanning) adopts linear array shaped uncooled IR detector and uses spiral type fast scanning method for relative position detection of target objects, which radiate an IR region wavelength spectrum. It can detect thermal energy radiating from a 9 m-size target object as far as 200 m distance. And the maximum field of a detector is fully filled with the same size of target object at the minimum approaching distance 50 m. We investigate two types of lens systems. One is a singlet lens and the other is a doublet lens system. Every system includes one aspheric surface and free positioned aperture stop. Many designs of F/1.5 system with ${\pm}5.2^{\circ}$ field at the Efl=20, 30 mm conditions for single element and double elements lens system respectively are compared in their resolution performance [MTF] according to the aspheric surface and stop position changing on their optimization process. Optimum design is established including mechanical boundary conditions and manufacturing considerations.