• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.10 s.253
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• pp.1314-1319
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• 2006

This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

• Journal of electromagnetic engineering and science
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• v.14 no.3
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• pp.293-298
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• 2014

Large spaceborne antennas should be lightweight, a factor related to the development costs of launch vehicles. In order to overcome this drawback, a feasibility study of a new carbon fiber reinforced polymer (CFRP) named M55J/RS3 is carried out for a synthetic aperture radar (SAR) reflector antenna. In particular, the high resolution of detected images is taken into consideration. To validate the electrical performance, a test of the CFRP specimen is fabricated, and the transmission/reflection coefficients are measured using a standard X-band waveguide. Finally, the effective complex permittivity and effective electrical conductivity are derived from the obtained measured data. By applying the derived conductivity to the simulation of the radiation pattern, antenna gain, and beamwidth-instead of relying on the assumption of a perfect electric conductor-variations in electrical performance are also investigated and discussed.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.601-603
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• 2005

Refocusing methods are used to compensate optical performance degradation of high resolution satellite camera during on-orbit operation. Due to mechanical vibration during launch and thermal vacuum environment of space where camera is exposed, the alignment of optical system may have error. The focusing error is dominant of misalignment and caused by the de-space error of secondary mirror of catoptric camera, which is most sensitive to vibration and space environment. The high resolution camera of SPOT, Pleiades and KOMPSAT2 have refocusing device to adjust focusing during orbital operation while QuickBird of US does not use on orbit refocusing method. For the Korsch type optical configuration which is preferred for large aperture space remote sensing camera, secondary mirror and folding mirror are available as refocusing element.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.2
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• pp.245-250
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• 2011

A high-resolution shadow mask, a nanostencil, is widely used for high resolution lithography. This high-resolution shadowmask is often fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. In this study, FIB milling on 500-nm-thin SiN membrane was tested and characterized. 500 nm thick and $2{\times}2$ mm large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 60 nm could be made into the membrane. The nanostencil could be used for nanoscale patterning by local deposition through the apertures.

• Korean Journal of Optics and Photonics
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• v.8 no.3
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• pp.175-182
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• 1997

To design a high resolution three-mirror telescope for visible spectral region, initial design technique based on the generation of flat field anastigmatic solutions limited by mechanical structure was proposed. An initial design of the three-mirror telescope that features relatively high focal ratio(F/14.5), large aperture diameter(600 mm), and squared field of view(0.27$^{\circ}$$\times$1.3$^{\circ}$) was done using an initial design program. Code V was used to optimized the initially designed optical system. As a result, MTF value of the telescope was about 0.5 at Nyquist frequency in each field except for the edge of the CCD.

• IE interfaces
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• v.11 no.2
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• pp.107-117
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• 1998

This paper presents a useful method of registration in manufacturing of shadow color mask for cathode ray tubes of the FTM (Flat Tension Mask) type, wherein the shadow mask and front panel are interchangeable when mask-panels are assembled, which is called ICM system. Theoretical analysis and alignment process are presented. The pattern of mask aperture is registered with a screen pattern of corresponding geometry of the panel in flat tension mask tube. Registration accuracy of panel and mask affects the purity of color cathode ray tube concerned with mislanding. It tries to minimize the misregistration caused by variances, which are mechanical error, mask stretching position error, restrictive number of fiducial point, etc.

• Current Optics and Photonics
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• v.1 no.6
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• pp.604-612
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• 2017

An effective and precise method using a scanning white-light interferometer (SWLI) for three-dimensional surface measurements, in particular for roughness measurements, has been proposed. The measurement of a microscopically sloped area using an interferometer has limitations, due to the numerical aperture of the lens. In particular, for roughness measurements, it is challenging to obtain accurate height data for a sloped area using the interferometer, due to diffraction of the light. Owing to these optical limitations of the interferometer for roughness measurements, the Ra measurements performed using an interferometer contain errors. To overcome the limitations, we propose a method consisting of the following two steps. First, we evaluate the height data and set the invalid height area to be blank, using the characteristics of the modulus peak, which has a low peak value for signals that have low reliability in the interferogram. Next, we interpolate the blank area using the adjacent reliable area. Rubert roughness standards are used to verify the proposed method. The results obtained by the proposed method are compared to those obtained with a stylus profilometer. For the considered sinusoidal samples, Ra ranges from $0.053{\mu}m$ to $6.303{\mu}m$, and we show that the interpolation method is effective. In addition, the method can be applied to a random surface where Ra ranges from $0.011{\mu}m$ to $0.164{\mu}m$. We show that the roughness results obtained using the proposed method agree well with profilometer results. The $R^2$ values for both sinusoidal and random samples are greater than 0.995.

• Korean Journal of Optics and Photonics
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• v.33 no.5
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• pp.218-229
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• 2022

We have investigated reliable inspection methods for finding the defects generated during the manufacturing process of lightweight, large-aperture satellite telescope mirrors using silicon carbide, and we have measured the basic physical properties of the mirrors. We applied the advanced ceramic material (ACM) method, a combined method using liquid-silicon penetration sintering and chemical vapor deposition for the carbon molded body, to manufacture four SiC mirrors of different sizes and shapes. We have provided the defect standards for the reflectors systematically by classifying the defects according to the size and shape of the mirrors, and have suggested effective nondestructive methods for mirror surface inspection and internal defect detection. In addition, we have analyzed the measurements of 14 physical parameters (including density, modulus of elasticity, specific heat, and heat-transfer coefficient) that are required to design the mirrors and to predict the mechanical and thermal stability of the final products. In particular, we have studied the detailed measurement methods and results for the elastic modulus, thermal expansion coefficient, and flexural strength to improve the reliability of mechanical property tests.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.1
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• pp.54-62
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• 2017

For the Earth observation satellite for ISR mission, a satellite constellation can be utilized to observe a specific area periodically and ultimately increase the effectiveness of the mission. The Walker-Delta method was applied to design constellation orbits with four satellites, which could detect abnormal activities in AoI(Area of Interest). To evaluate the effectiveness of the mission, a revisiting time was selected as a key requirement. This paper presents the mission analysis process for four SAR satellites constellation as well as the result of constellation configuration design to meet the requirements. Figure of Merits analysis was performed based on algorithm developed. Finally, it was confirmed that the constellation orbit with four different orbital planes is likely to be appropriate for ISR mission.

• Advances in Energy Research
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• v.5 no.3
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• pp.227-237
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• 2017

The continuous increase of emission rates of green house gases and the effects on global warming added a new dimension to the problem of substituting the petroleum and its derivatives by environment friendly and sustainable energy sources for the world. Solar and wind energy appear at the top of the list of renewable of high potential, widely available, of dominated technology and well accepted. Brazil is one of the few countries in the world that receives number hours of sunshine exceeding 3,000 hours per year with a daily average of 4.5 to 6 kWh. However, this potential is largely unexplored and poorly tapped. The number of renewable systems implanted in Brazil has grown in recent years, but still insignificant when compared, for example, with Germany and Spain among others. This paper presents the results of an optical study on small concentration solar collector with evacuated tube enveloping the absorber and internal reflective surface fixed on the bottom part of the evacuated tube. The designed collector has a 2D geometrical concentration ratio between 2.455 and 4.91. The orientation of the solar collector, the ratio of the radius of the receiver to the radius of the absorber, the incidence angle for each period of the year, the collector inclination angle, the aperture angle of the reflective surface, concentration and optical efficiency were determined. The ray traces and flux distribution on the absorber of the evacuated tube solar collector were determined by using the program Ray Optics Simulation. The optical efficiency varies during the year according to the solar declination. For the periods were the solar declination is close to zero the efficiencies are maximum, and the variation during the day is around 25.88% and 99.9%. For the periods were the solar declination is maximum the efficiencies are minimum, and the variation during the day is around 23.78% and 91.79%.