• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.217-218
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• 2011

• 한국정밀공학회지
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• 제7권3호
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• pp.37-47
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• 1990

In accordance with the high precision of mechanical elements, it has been required to high precision in surface roughness measurement and, therefore, stylus tip radius is manufa- ctured less than 2 .mu. m through ion sputter machining. In this experiment, by suing ion sputter machined stylus pf fine tip, radius and lapping machined stylus, surface roughness of standard specimens, silicon wafer were measured and then Rmax, Ra, RMS value were investi- gatedaccording to the variation of tip radius of stylus. As a result, measuring error due to the variation of stylus tip radius in surface roughness measurement was decreased by using ion sputter machined stylus and also the measuring accuracy was improved. And the measuring variation of Ra, RMS calculated from correlation coefficient lager than 0.9 on the wave of short period and amplitude using ion sputter machined stylus of fine tip radius.

• 한국정밀공학회지
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• 제29권10호
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• pp.1144-1148
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• 2012

Process conditions for generating nano patterns handle different process according to the pattern characteristics, and different process data according to patterns in questions. To efficiently find optimal process conditions for generating nano patterns, process data by experiment is needed consideration of the pattern characteristics concerning the equipment. In particular, coating methods of a cylindrical mold differ from it of a flat plate because of viscosity of coating materials. Also the coating thickness affects nano process and pattern line width. So coating method of coating thickness for cylindrical mold is very important on nano pattern generating. In this study, a method is proposed for coating Photo Resist through the spray in order to coat cylindrical mold and measuring the thickness of coating using measuring tip considering the size of cylindrical mold because there is no method in the existing SEM. The proposed method is applied to a real printed electronics system to verify its accuracy and efficiency.

• 대한기계학회논문집
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• 제16권8호
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• pp.1493-1502
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• 1992

본 연구에서는 크랙선단의 소성변형에 의해 발생하는 소성유기 크랙개구거동 을 검토하기 위하여, 크랙선단 최인접 영역에서 COD를 측정할 수 있는 직접 측정법을 개발 사용하고 (1) 직접측정법의 적용범위와 크랙선단의 개구거동 (2) 측정위치에 따 른 개구하중의 변화 (3) 개구비에 영향을 주는 하중변수등에 대하여 고찰하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.291-292
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• 2006

Currently A demand of high precision workpiece is increasing in industry. At present, roundness measuring machine using Air bearing, coordinate measuring machine that are used from measurement station. but these machines will not be able to apply to In-line process. because of like these machine's price are very expensive and measurement time is long. also, the complexity of conventional roundness measurement method based on fourier transform, it makes difficult to development analysis program. This work present new architecture of a Out-diameter measuring system fur analysis of roundness of product. In this system, the influence of table motion errors is minimize by using two LVDT sensor and knife edge contact tip. We are produce a test machine and make an experimenter on Out-diameter of test bearing. The measurement result compared with roundness measuring machine.

• Journal of Advanced Marine Engineering and Technology
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• 제33권4호
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• pp.533-538
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• 2009

The magnitude of constraint effect $A_2$ values on the non-linear elastic plastic fracture toughness was experimentally estimated by using displacement at various measuring positions near crack tip. Constraint effect $A_2$ value was dependent on specimen configuration and on the measured displacement near crack front. The crack tip opening displacement in the vicinity of the crack tip front should be estimated within plastic region when appropriately constraint effect was calculated. It was found that the magnitude of constrain effect |$A_2$| is below 8.0 at the crack tip. But an appropriate location to measure the effective constraint effects $A_2$ at the critical value of J that crack initiation is characterizable by is r = 2mm and ${\theta}=90^{\circ}$ away from original crack tip, and the constraint effect |$A_2$| estimated is 5.3.

• 대한기계학회논문집
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• 제14권6호
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• pp.1495-1508
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• 1990

본 연구에서는 전류밀도와 가공시간을 변화시켰을 때의 가공량, 가공상태를 검토해 보았으며, 촉침홀더의 가공각도를 달리하거나 재부착문제를 해결하기 위한 마 스크의 사용여부에 따른 촉침의 가공상태를 알아보기 위해 초기선단반경 2$\mu\textrm{m}$, 선단각 90˚의 다이아몬드 촉침을 이온스파터 가공기를 사용하고, 가공조건을 변화시켜서 초 정밀 가공품의 표면거칠기 측정에 적합한 0.5$\mu\textrm{m}$ 이하의 미세한 선단반경을 갖는 촉침 을 가공하기 위한 가공조건에 대한 실험을 하였다.

• 대한기계학회논문집
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• 제19권7호
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• pp.1630-1641
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• 1995

The dynamic stress intensity factors (DSIF ; $K_{I}$$^{dyn}$) were studied in some polymeric materials using caustics method with a high speed camera system. Also crack tip propagation speed was measured by dynamic crack propagation velocity measuring device. To calculate DSIF a finite element analysis program-INha Stress Analysis Moving CRack(INSAMCR) was utilized. Dynamic fracture characteristics were investigated to verify a relationship between DSIF and crack tip propagation speed and acceleration in PMMA, Homalite-100 and Polycarbonate. The relationship between dynamic stress intensity factor and crack tip velocity revealed typical shapes. Measured crack tip acceleration data envelope converges to the zero level with increasing DSIF. Equivalently crack tip velocities show a wide spread range at low values of DSIF, but become a constant with a higher DSIF. $1.2MPa{\sqrt{m}}$, $1.4MPa{\sqrt{m}}$ and $1.3 MPa{\sqrt{m}}$ were obtained as $K_{I}$$^{dyn}$ values to arrest the dynamic crack for PMMA, Homalite-100 and Polycarbonate, respectively. INSAMCR was run to verify experimental results in PMMA and shows good agreementment.

• 한국정밀공학회지
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• 제3권1호
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• pp.69-76
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• 1986

The measuring Method by stylus, which measures surface roughness, has been widely used since G. Schmaltz developed the first equipment of that type. Withe the resent development of the measuring method by stylus, surface foughness testing instruments of the very high magnification ratio, hundreds of thousands, are manu- factured. However, as the techniques of the high precision roughness measurement are being required, the response problems due to the tip shapes and the plastic deformations of measured surface of mild material are to be serious factors. In this study, diamond stylus of tip radius $0.5\mu\textrm{m}$, $2\mu\textrm{m}$, $5\mu\textrm{m}$ and $10\mu\textrm{m}$ were used under the measuring force of 0.01gf, 0.02gf, 0.07gf, 0.4gf and 1.6gf, and from the experimental data, maximum measured value devrements between $2\mu\textrm{mR}$ stylus and $5\mu\textrm{mR}$ stylus, $2\mu\textrm{mR}$ stylus and $10\mu\textrm{mR}$ stylus are 22% and 31%, respectively when the measured value of $2\mu\textrm{mR}$ stylus goes to $0.01\mu\textrm{m Ra}$, $\lambda$ c2.5mm. And it is shown that plastic deformations on the plastic deformations on the measured surface are proportional to W/R(W;measured force, R;stylus tip radius).