• Title/Summary/Keyword: Measuring tip

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Effects of stylus tip radius on the measuring error in surface topography measurement by contact stylus profilometer (접촉식 형상 측정기에 의한 표면 미세 형상 측정시 촉침 반경이 측정오차에 미치는 영향)

  • 권기환
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2000.04a
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    • pp.613-617
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    • 2000
  • This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

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A Study on the Effect of Tip Radius of Diamond Stylus Machined by Ion Sputter in Surface Roughness Measurement (이온스파터 가공한 다이아몬드 촉침의 선단반경이 표면거칠기 측정에 미치는 영향)

  • Han, Eung-Gyo;No, Byeong-Ok;Yu, Yeong-Deok
    • Journal of the Korean Society for Precision Engineering
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    • v.7 no.3
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    • pp.37-47
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    • 1990
  • In accordance with the high precision of mechanical elements, it has been required to high precision in surface roughness measurement and, therefore, stylus tip radius is manufa- ctured less than 2 .mu. m through ion sputter machining. In this experiment, by suing ion sputter machined stylus pf fine tip, radius and lapping machined stylus, surface roughness of standard specimens, silicon wafer were measured and then Rmax, Ra, RMS value were investi- gatedaccording to the variation of tip radius of stylus. As a result, measuring error due to the variation of stylus tip radius in surface roughness measurement was decreased by using ion sputter machined stylus and also the measuring accuracy was improved. And the measuring variation of Ra, RMS calculated from correlation coefficient lager than 0.9 on the wave of short period and amplitude using ion sputter machined stylus of fine tip radius.

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PR Coating for Electron Beam Lithography of Cylindrical Mold and Measuring Coating Thickness of It using Measuring Tip (원통금형의 전자빔 가공을 위한 PR 코팅 및 측정 팁을 이용한 두께측정)

  • Lee, Seung-Woo;Kim, Jeong-O;Suh, Jeong
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.10
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    • pp.1144-1148
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    • 2012
  • Process conditions for generating nano patterns handle different process according to the pattern characteristics, and different process data according to patterns in questions. To efficiently find optimal process conditions for generating nano patterns, process data by experiment is needed consideration of the pattern characteristics concerning the equipment. In particular, coating methods of a cylindrical mold differ from it of a flat plate because of viscosity of coating materials. Also the coating thickness affects nano process and pattern line width. So coating method of coating thickness for cylindrical mold is very important on nano pattern generating. In this study, a method is proposed for coating Photo Resist through the spray in order to coat cylindrical mold and measuring the thickness of coating using measuring tip considering the size of cylindrical mold because there is no method in the existing SEM. The proposed method is applied to a real printed electronics system to verify its accuracy and efficiency.

Analysis of Fatigue Crack Opening: Belhlavioll Using Direct Measuring Method (직접측정법에 의한 피로크랙 개구거동의 해석)

  • Song, Sam-Hong;Kim, Hyun
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.8
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    • pp.1493-1502
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    • 1992
  • The purpose of this study is to identify the effects of loading variables on fatigue crack opening behavior, using structural steel SS41. To use various stress ratios, three kinds of the methods varying stress ratio were used; .DELTA.P const., P$_{max}$ const., and P$_{min}$ const.. To measure the opening load, the direct measuring method which measures the distance between two micro indentations 20 .mu.m behind crack tip and the elastic compliance method were used. As the results of present study, the following conclusions are obtained. First, using the direct measuring method, it was possible to measure the COD at any location behind crack tip. Second, as measuring point becomes farther from crack tip, opening load becomes smaller. Third, the acceleration of da/dN near notch is due to crack opening behavior. Finally, opening ratio is a function of not only R, but .DELTA.K.K.K.

A Study on the out-diameter measuring machine by the LVDT sensors (LVDT 센서를 이용한 외경 측정 방안에 대한 연구)

  • Hwang J.H.;Roh J.H.;Park Ki-Hong
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.291-292
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    • 2006
  • Currently A demand of high precision workpiece is increasing in industry. At present, roundness measuring machine using Air bearing, coordinate measuring machine that are used from measurement station. but these machines will not be able to apply to In-line process. because of like these machine's price are very expensive and measurement time is long. also, the complexity of conventional roundness measurement method based on fourier transform, it makes difficult to development analysis program. This work present new architecture of a Out-diameter measuring system fur analysis of roundness of product. In this system, the influence of table motion errors is minimize by using two LVDT sensor and knife edge contact tip. We are produce a test machine and make an experimenter on Out-diameter of test bearing. The measurement result compared with roundness measuring machine.

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Experimental Behaviors of the Constraint Effects A2 Depending on Displacement at Various Measuring Positions near Crack Front for STS 316L CT Specimen (균열선단 변위측정위치에 따른 STS 316L의 구속효과 A2 거동)

  • Han, Min-Su;Jang, Seok-Ki
    • Journal of Advanced Marine Engineering and Technology
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    • v.33 no.4
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    • pp.533-538
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    • 2009
  • The magnitude of constraint effect $A_2$ values on the non-linear elastic plastic fracture toughness was experimentally estimated by using displacement at various measuring positions near crack tip. Constraint effect $A_2$ value was dependent on specimen configuration and on the measured displacement near crack front. The crack tip opening displacement in the vicinity of the crack tip front should be estimated within plastic region when appropriately constraint effect was calculated. It was found that the magnitude of constrain effect |$A_2$| is below 8.0 at the crack tip. But an appropriate location to measure the effective constraint effects $A_2$ at the critical value of J that crack initiation is characterizable by is r = 2mm and ${\theta}=90^{\circ}$ away from original crack tip, and the constraint effect |$A_2$| estimated is 5.3.

A study on the machining condition of diamond stylus using ion sputter machining (다이아몬드 촉침의 이온 스파터 가공조건에 관한 연구)

  • 한응교;노병옥;김병우
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.6
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    • pp.1495-1508
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    • 1990
  • There are requirement of surface roughness in mechanical elements that has minute surface of several nm degree. When high precision surface roughness measurement is made with stylus type surface roughness measuring apparatus, measuring accuracy depend on the tip radius of diamond stylus. Therefore, ultra precision machining was accomplished using ion sputter machining in order to machining the stylus tip radius less than 0.5.mu.m, which is impossible through lapping machining. In this study, optimal machining condition for the ion sputter machining was obtained through the experiment under the various varing machinbing quantity and condition of diamond stylus. And as the result of applying this optimal condition, the good result was obtained that machining probability of stylus tip radius less than o.5.mu.m is 93%.

Dynamic Fracture Behavior of Some Polymeric Materials (고분자재료의 동적 파괴거동에 관한 연구)

  • 이억섭;한정우;한문식
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.7
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    • pp.1630-1641
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    • 1995
  • The dynamic stress intensity factors (DSIF ; $K_{I}$$^{dyn}$) were studied in some polymeric materials using caustics method with a high speed camera system. Also crack tip propagation speed was measured by dynamic crack propagation velocity measuring device. To calculate DSIF a finite element analysis program-INha Stress Analysis Moving CRack(INSAMCR) was utilized. Dynamic fracture characteristics were investigated to verify a relationship between DSIF and crack tip propagation speed and acceleration in PMMA, Homalite-100 and Polycarbonate. The relationship between dynamic stress intensity factor and crack tip velocity revealed typical shapes. Measured crack tip acceleration data envelope converges to the zero level with increasing DSIF. Equivalently crack tip velocities show a wide spread range at low values of DSIF, but become a constant with a higher DSIF. $1.2MPa{\sqrt{m}}$, $1.4MPa{\sqrt{m}}$ and $1.3 MPa{\sqrt{m}}$ were obtained as $K_{I}$$^{dyn}$ values to arrest the dynamic crack for PMMA, Homalite-100 and Polycarbonate, respectively. INSAMCR was run to verify experimental results in PMMA and shows good agreementment.

The Influence by Stylus Tip Radius and Measuring force on the Stylus Type Surface Roughness Tester (촉침식표면거칠기 측정기에 있어서 촉침의 선단곡률반경과 측정압이 측정에 미치는 영향)

  • Kang, Myung-Soon;Han, Eung-Kyo;Kwon, Dong-Ho;Cho, Nahm-Gyoo
    • Journal of the Korean Society for Precision Engineering
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    • v.3 no.1
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    • pp.69-76
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    • 1986
  • The measuring Method by stylus, which measures surface roughness, has been widely used since G. Schmaltz developed the first equipment of that type. Withe the resent development of the measuring method by stylus, surface foughness testing instruments of the very high magnification ratio, hundreds of thousands, are manu- factured. However, as the techniques of the high precision roughness measurement are being required, the response problems due to the tip shapes and the plastic deformations of measured surface of mild material are to be serious factors. In this study, diamond stylus of tip radius $0.5\mu\textrm{m}$, $2\mu\textrm{m}$, $5\mu\textrm{m}$ and $10\mu\textrm{m}$ were used under the measuring force of 0.01gf, 0.02gf, 0.07gf, 0.4gf and 1.6gf, and from the experimental data, maximum measured value devrements between $2\mu\textrm{mR}$ stylus and $5\mu\textrm{mR}$ stylus, $2\mu\textrm{mR}$ stylus and $10\mu\textrm{mR}$ stylus are 22% and 31%, respectively when the measured value of $2\mu\textrm{mR}$ stylus goes to $0.01\mu\textrm{m Ra}$, $\lambda$ c2.5mm. And it is shown that plastic deformations on the plastic deformations on the measured surface are proportional to W/R(W;measured force, R;stylus tip radius).

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