• Title/Summary/Keyword: Material removal

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A Statistical Study of CMP Process in Various Scales (CMP 프로세스의 통계적인 다규모 모델링 연구)

  • 석종원
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.12
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    • pp.2110-2117
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    • 2003
  • A physics-based material removal model in various scales is described and a feature scale simulation for a chemical mechanical polishing (CMP) process is performed in this work. Three different scales are considered in this model, i.e., abrasive particle scale, asperity scale and wafer scale. The abrasive particle and the asperity scales are combined together and then homogenized to result in force balance conditions to be satisfied in the wafer scale using an extended Greenwood-Williamson and Whitehouse-Archard statistical model that takes into consideration the joint distribution of asperity heights and asperity tip radii. The final computation is made to evaluate the material removal rate in wafer scale and a computer simulation is performed for detailed surface profile variations on a representative feature. The results show the dependence of the material removal rate on the joint distribution, applied external pressure, relative velocity, and other operating conditions and design parameters.

The Principle of Magnetorheological finishing for a micro part (자성 유체를 이용한 미세연마가공의 원리)

  • 김동우;신영재;이응숙;조명우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1840-1843
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    • 2003
  • The Magnetorheological fluid has the properties that its viscosity has drastic changed under some magnetic fields therefore, Magnetorheological fluids has been used for micro polishing of the micro part( for example, a aspherical surface in a micro lens). The polishing process may appears as follows. A part rotating on the spindle is brought into contact with an Magnetorheological finishing(MRF) fluids which is set in motion by the moving wall. In the region where the part and the MRF fluid ate brought into contact, the applied magnetic field creates the conditions necessary for the material removal from the part surface. The material removal takes place in a certain region contacting the surface of the part which can be called the polishing spot or zone. The polishing mechanism of the material removal in the contact zone is considered as a process governed by the particularities of the Bingham flow in the contact zone. Resonable calculated and experimental magnitudes of the material removal rate for glass polishing lends support the validity of the approach.

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The Development of Polishing System a Magnetorheological Fluids (자기유변유체를 이용한 연마가공 시스템의 개발)

  • 신영재;김동우;이응숙;김경웅
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.7
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    • pp.46-52
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    • 2004
  • The Magnetorheological fluid has the properties that its viscosity has drastic changed under some magnetic fields therefore, Magnetorheological fluids has been used fur micro polishing of the micro part(for example, a spherical surface in a micro lens). The polishing process may appears as follows. A part rotating on the spindle is brought into contact with an Magnetorheological finishing(MRF) fluids which is set in motion by the moving wall. In the region where the part and the MRF fluid are brought into contact, the applied magnetic field creates the conditions necessary for the material removal from the part surface. The material removal takes place in a certain region contacting the surface of the part which can be called the polishing spot or zone. The polishing mechanism of the material removal in the contact zone is considered as a process governed by the particularities of the Bingham flow in the contact zone. Resonable calculated and experimental magnitudes of the material removal rate for glass polishing lends support the validity of the approach.

Removal Phenomenon of Black Core in Clay Brick Containing High Carbon Content (고탄소질함유 점토벽돌의 내부흑심제거 속도에 대한 연구)

  • Jung, Jin-Ho;Kim, Hyun-Tae
    • Journal of the Korean Ceramic Society
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    • v.43 no.5 s.288
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    • pp.315-319
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    • 2006
  • There have been some studies on the use of coal waste as a raw material for clay bricks due to the lack of naturally producing minerals. It can help resolving the problems of pollution, forest conservation and flood control by utilizing coal waste. However, high content of carbon materials usually leads to the black core in clay bricks after firing process, and diminishes the mechanical and aesthetical properties of clay brick. In this study, the effect of firing process is investigated for the removal of black core in clay bricks with carbon content. The removal kinetics of black core are also compared and investigated with the firing schedule and black core removal.

Elution characteristics of lime-based granular alkaline material and applicability of phosphorus crystallization processes (석회계 입상알칼리재의 용출특성과 이를 이용한 인 결정화공정의 적용성)

  • Chang, Hyang-Youn;Park, Na-Ri;Jang, Yeo-Ju;Ahn, Kwang-Ho;Lim, Hyun-Man;Kim, Weon-Jae
    • Journal of Korean Society of Water and Wastewater
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    • v.31 no.6
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    • pp.577-586
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    • 2017
  • One of the major sources causing eutrophication and algal blooms of lakes or streams is phosphorus which comes from point and nonpoint pollution sources. HAP (hydroxyapatite) crystallization using granular alkaline materials can achieve the decrease of phosphorus load from wastewater treatment plants and nonpoint pollution control facilities. In order to induce HAP crystal formation, continuous supply of calcium and hydroxyl ions is required. In this research, considering HAP crystallization, several types of lime-based granular alkaline materials were prepared, and the elution characteristics of calcium and hydroxyl ions of each were analyzed. Also, column tests were performed to verify phosphorus removal efficiencies of granular alkaline materials. Material_1 (gypsum+cement mixed material) achieved the highest pH values in the column tests consistently, also, Material_2 (gypsum+slag mixed material) and Material_3 (calcined limestone material) achieved over pH 9.0 for 240 hours (10 days) and proved the efficiencies of long-term ion supplier for HAP crystallization. In the column tests using Material_3, considerable pH increase and phosphorus removal were carried out according to each linear velocity and filtration depth. T-P removal efficiencies were 87.0, 84.0, 68.0% and those of PO4-P 100.0, 97.0, 80.0% for linear velocity of 1.0, 2.5, 5.0 m/hr respectively. Based on the column test results, the applicability of phosphorus removal processes for small-scale wastewater treatment plants and nonpoint pollution control facilities was found out.

Finite element study on the effect of abutment length and material on implant bone interface against dynamic loading

  • Mishra, Manish;Ozawa, Shogo;Masuda, Tatsuhiko;Yoshioka, Fumi;Tanaka, Yoshinobu
    • The Journal of Advanced Prosthodontics
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    • v.3 no.3
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    • pp.140-144
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    • 2011
  • PURPOSE. Finite element study on the effect of abutment length and material on implant bone interface against dynamic loading. MATERIALS AND METHODS. Two dimensional finite element models of cylinderical implant, abutments and bone made by titanium or polyoxymethylene were simulated with the aid of Marc/Mentat software. Each model represented bone, implant and titanium or polyoxymethylene abutment. Model 1: Implant with 3 mm titanium abutment, Model 2: Implant with 2 mm polyoxymethylene resilient material abutment, Model 3: Implant with 3 mm polyoxymethylene resilient material abutment and Model 4: Implant with 4 mm polyoxymethylene resilient material abutment. A vertical load of 11 N was applied with a frequency of 2 cycles/sec. The stress distribution pattern and displacement at the junction of cortical bone and implant was recorded. RESULTS. When Model 2, 3 and 4 are compared with Model 1, they showed narrowing of stress distribution pattern in the cortical bone as the height of the polyoxymethylene resilient material abutment increases. Model 2, 3 and 4 showed slightly less but similar displacement when compared to Model 1. CONCLUSION. Within the limitation of this study, we conclude that introduction of different height resilient material abutment with different heights i.e. 2 mm, 3 mm and 4 mm polyoxymethylene, does not bring about significant change in stress distribution pattern and displacement as compared to 3 mm Ti abutment. Clinically, with the application of resilient material abutment there is no significant change in stress distribution around implant-bone interface.

Removal of a High Load of Ammonia by a Marine Bacterium, Vibrio alginolyticus in Biofilter

  • Kim, Nam-Jin;Shoda, Makoto
    • Biotechnology and Bioprocess Engineering:BBE
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    • v.7 no.5
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    • pp.316-322
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    • 2002
  • A newly isolated heterotrophic marine bacterium, Vibrio alginolyticus, was used to remove a high load of ammonia gas under non-sterile condition. The cells were inoculated onto an inorganic packing material in a fixed-bed reactor (biofilter), and a high load of ammonia, in the range of ammonia gas concentration of 170 ppm to 880 ppm, was introduced continuously. Sucrose solution and 3% NaCl was supplied intermittently to supplement the carbon source and water to the biofilter. The average percentage of gas removed exceeded 85% for 107-day operation. The maximum removal capacity and the complete removal capacity were$19\;g-N\;kg^{-1}$ dry packing material $day^{-1}$ and $16\;g-N\;kg^{-1}$ dry packing material $day^{-1}$, respectively, which were about three times greater than those obtained in nitrifying sludge inoculated onto the same packing material. On day 82, the enhanced pressure drop was restored to the normal one by NaOH treatment, and efficient removal characteristics were later observed. During this operation, the non-sterile condition had no significantly adverse effect on the removability of ammonia by V. alginolyticus.

Effect of Sliding Distance and Temperature on Material Non-uniformity in Oxide CMP (Oxide CMP에서 Sliding Distance와 온도가 재료제거와 연마 불균일도에 주는 영향)

  • Kim, Young-Jin;Park, Boum-Young;Cho, Han-Chul;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.555-556
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    • 2007
  • Through the single head kinematics, sliding distance is a movement of a pad within wafer. The sliding distance is very important to frictional heat, material removal, and so on. A Temperature distribution is similar to sliding distance. But is not same. Because of complex process factor in CMP. A platen velocity is a dominant factor in a temperature and material removal. WIWNU is low in head faster condition.

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On the Relationship between Material Removal and Interfacial Properties at Particulate Abrasive Machining Process (연마가공에서의 접촉계면 특성과 재료제거율간의 관계에 대한 연구)

  • Sung, In-Ha
    • Tribology and Lubricants
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    • v.25 no.6
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    • pp.404-408
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    • 2009
  • In this paper, the relationship between the material removal rate and the interfacial mechanical properties at particle-surface contact situation, which can be seen in an abrasive machining process using micro/nano-sized particles, was discussed. Friction and stiffnesses were measured experimentally on an atomic force microscope (AFM) by using colloidal probes which have a silica colloid particle in place of tip to simulate a particle-flat surface contact in an abrasive machining process. From the experimental investigation and theoretical contact analysis, the interfacial contact properties such as lateral stiffness of contact, friction, the material removal rate were presented with respect to some of material surfaces and the relationship between the properties as well.