• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.481-485
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• 1987

The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.

• Smart Structures and Systems
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• v.5 no.3
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• pp.279-290
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• 2009

Two degrees of freedom resonant systems are employed to improve the resonant property of resonant sensor, as compared to a single degree of freedom resonant system. This paper presents design, development and testing of two degrees of freedom resonant sensor. To measure absolute mass, cantilever shaped two different masses (smaller/absorber mass and bigger/drive mass) with identical resonant frequency are mechanically linked to form 2 - Degree-of-Freedom (DOF) resonator which exhibits higher amplitude of displacement at the smaller mass. The same concept is extended for measuring differential quantity, by having two bigger mass and one smaller mass. The main features of this work are the 3 - DOF resonator for differential detection and the microcontroller based closed loop electronics for resonant sensor with piezoelectric sensing and excitation. The advantage of using microcontroller is that the method can be easily extended for any range of measurand.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.3
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• pp.531-537
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• 2004

In this paper, the static and dynamic characteristics in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC. the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations among flow rate, heat generated by heating wire. and sensor location were investigated to find optimized condition. Finally, the relation between sensor voltage through analog digital conversion(ADC) and flow rate in the sensor tube can be represented. Based on this study, static and dynamic characteristics of sensor tube can be used for design of mass flow controller.

• 한국연소학회:학술대회논문집
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• 2014.11a
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• pp.337-338
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• 2014

In this study, a method of using a capacitance sensor was investigated as a means to measure the mass fraction of a type of harmful substance. Using MEMS process, we developed a capacitance sensor and studied the real time mass fraction with harmful substance mixture liquid.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.1
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• pp.85-92
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• 2006

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.

• Journal of Power System Engineering
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• v.7 no.3
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• pp.35-39
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• 2003

In this paper, the heat transfer phenomena in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC, the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations of flow rate, generated heat by heating wire, sensor location and tube thickness were investigated to find the optimized condition. Based on this study, static and dynamic characteristics of sensor can be used for mass flow controller.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.819-824
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• 2012

This paper presents the wideband vibration system of an electromagnetic vibration energy harvester that obtained electric power for wireless sensor applications from the ever-change vibrations of bridge. It is a system with two degree of freedom vibrations that are composed of two mass and two spring respectively. One system is housing mass and spring, the other is the magnetic mass and spring that is the vibration system construction's element of electromagnetic vibration energy harvester. In other words, it is called dynamic vibration absorber. This paper show that the ratio of housing mass to magnetic mass decides the bandwidth and the size of amplitude of magnetic mass in electromagnetic vibration energy harvester. Therefore, it is necessary to improve the efficiency of energy in electromagnetic vibration energy harvester for wireless sensor applications.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.154-161
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• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.308-313
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• 2003

Thermal mass flow meters (TMFMs) are most widely used for measuring mass flow rates in the semiconductor industry. A TMFM should have a short response time in order to measure the time-varying flow rate rapidly and accurately. Therefore it is important to study transient heat transfer phenomena in the sensor tube of a TMFM that is the most critical part in the TMFM. In the present work, a simple numerical model for transient heat transfer phenomena of the sensor tube of a TMFM is presented. Numerical solutions for the tube and fluid temperatures in a transient state are obtained using the proposed model and compared with experimental results to validate the proposed model. Based on numerical solutions, heat transfer mechanism in a transient state in the sensor tube is explained. Finally, a correlation for predicting the response time of a sensor tube is presented. The correlation is verified by experimental results.

• Journal of Power System Engineering
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• v.11 no.4
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• pp.103-108
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• 2007

In general, the swing motion of the crane is controlled and suppressed by activating the trolley motion. In many papers reported by us, we suggested a new type of anti-sway control system of the crane. In the proposed control system, a small auxiliary mass(moving-mass) is installed on the spreader and the swing motion is controlled by moving the auxiliary mass. The actuator reaction against the auxiliary mass applies inertial control forces to the container in order to reduce the swing motion in the desired manner. The measuring system is based on laser sensor or others. However it is not so useful in real world. Especially, in this paper, the image sensor is used to measures the motions of the spreader and the measured data are fed back to the controller in real time. The applied image processing technique is a kind of robust template matching method which is named Vector Code Correlation (VCC) and devised to consider the real environmental conditions. And the $H_{\infty}$ based control technique is applied to suppress swing motion of the crane. And the experimental result shows that the proposed measurement system based on image sensor and control system is useful and robust to disturbances.