• Title/Summary/Keyword: Mask angle

Search Result 98, Processing Time 0.028 seconds

Chemical Mechanical Polishing Characteristics of BTO Thin Film for Vertical Sidewall Patterning of High-Density Memory Capacitor (고집적 메모리 커패시터의 Vertical Sidewall Patterning을 위한 BTO 박막의 CMP 특성)

  • Ko, Pil-Ju;Park, Sung-Woo;Lee, Kang-Yeon;Lee, Woo-Sun;Seo, Yong-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.55 no.3
    • /
    • pp.116-121
    • /
    • 2006
  • Most high-k materials are well known not to be etched easily, Some problems such as low etch rate poor sidewall angle, plasma damage, and process complexity were emerged from the high-density DRAM fabrication. Chemical mechanical polishing (CMP) by a damascene process was proposed to pattern this high-k material was polished with some commercial silica slurry as a function of pH variation. Sufficient removal rate with adequate selectivity to realize the pattern mask of tera-ethyl ortho-silicate (TEOS) film for the vertical sidewall angle were obtained. The changes of X-ray diffraction pattern and dielectric constant by CMP process were negligible. The planarization was also achieved for the subsequent multi-level processes. Our new CMP approach will provide a guideline for effective patterning of high-k material by CMP technique.

Micro-Pattern Machining Characteristics Evaluation of $Si_3N_4$-hBN based Machinable Ceramics Using Powder Blasting Process (파우더 블라스팅에 의한 $Si_3N_4$-hBN계 머시너블 세라믹스의 미세패턴 가공성 평가)

  • 박동삼;조명우;김동우;조원승
    • Transactions of the Korean Society of Machine Tool Engineers
    • /
    • v.13 no.2
    • /
    • pp.33-39
    • /
    • 2004
  • Sandblasting has recently been developed into a powder blasting technique for brittle materials. In this study, the machinability of $Si_3N_4$-hBN based machinable ceramics are evaluated for micro - pattern making processes using powder blasting. Material properties of the developed machinable ceramics according to the variation of h-BN contents give a good machinability to the ceramics. The effect of scanning times, the size of patterns and variation of BN contents on the erosion depth of samples without mask and samples with different mask patterns in powder blasting of $Si_3N_4$-hBN ceramics are investigated. The Parameters are the impact angle of $90^{\circ}$, the scanning times of nozzle up to 40, and the stand-off distances of 100mm The widths of masked pattern are 0.1mm 0.5mm and 1mm. The powder used is Alumina particles, WA#600. and the blasting pressure of powder is 0.2MPa. Through required experiments, the results are investigated and analyzed. As the results, the machinability of the developed ceramics increases as the BN contents in the ceramics.

A Retrospective Study on Profile Having Favorable Response to Face Mask (상악 전방 견인 치료에 양호하게 반응하는 안모형태의 후향적 연구)

  • Hwang, Chung-Ju;Moon, Jeong-Lyon
    • The korean journal of orthodontics
    • /
    • v.29 no.2 s.73
    • /
    • pp.147-156
    • /
    • 1999
  • Skeletal Cl III malocclusion is an orthopedic appliance mainly used for growing children with maxillary undergrowth, which largely entails skeletal Cl III malocclusion. It improves anterior crossbite and maxillary position and thus, enables patients to attain favorable Profile but often involves unfavorable profile with protrusive upper and lower lips. Therefore, if orthodontists have knowledge of which condition helps obtain favorable occlusion and profile, they are able to predict the prognosis and limitation of the treatment. This study was done in order to help obtain favorable Profile after treating growing skeletal Cl III children. In the study, we classified childern into two groups, the one with favorable profile(Group 1, n=12) and the other with unfavorable profile(Group 2, n=14) and, with retrospective study using pre- and post-treatment lateral cephalogram, drew the following conclusions. 1. As patients had more serious labioversion of upper incisors, they were more unlikely to have favorable profiles after the treatment. Protrusion of prosthion, which was related with maxillary incisors, also affected profiles. 2. As the NL-ML angle before the treatment was small, it was more likely to get favorable profile. 3. As the degree of lower lip protrusion was high, it was likely to have bialveolar protrusion after the treatment. 4. As the degree of downward and backward rotation of mandible was high, it was likely to get unfavorable profile.

  • PDF

Microdroplet Impact Dynamics at Very High Velocity on Face Masks for COVID-19 Protection (코로나-19 보호용 페이스 마스크에서의 액적 고속 충돌 거동)

  • Choi, Jaewon;Lee, Dongho;Eo, Jisu;Lee, Dong-Geun;Kang, Jeon-Woong;Ji, Inseo;Kim, Taeyung;Hong, Jiwoo
    • Korean Chemical Engineering Research
    • /
    • v.60 no.2
    • /
    • pp.282-288
    • /
    • 2022
  • Facial masks have become indispensable in daily life to prevent infection and spread through respiratory droplets in the era of the corona pandemic. To understand how effective two different types of masks (i.e., KF-94 mask and dental mask) are in blocking respiratory droplets, i) we preferentially analyze wettability characteristics (e.g., contact angle and contact angle hysteresis) of filters consisting of each mask, and ii) subsequently observe the dynamic behaviors of microdroplets impacting at high velocities on the filter surfaces. Different wetting properties (i.e., hydrophobicity and hydrophilicity) are found to exhibit depending on the constituent materials and pore sizes of each filter. In addition, the pneumatic conditions for stably and uniformly dispensing microdroplets with a certain volume and impacting behaviors associated with the impacting velocity and filter type change are systematically explored. Three distinctive dynamics (i.e., no penetration, capture, and penetration) after droplet impacting are observed depending on the type of filter constituting the masks and droplet impact velocity. The present experimental results not only provide very useful information in designing of face masks for prevention of transmission of infectious respiratory diseases, but also are helpful for academic researches on droplet impacts on various porous surfaces.

A Study on Pulsed Nd:YAG Laser Welding of Electron Gun in Braun Tubes (I) - Characteristics of Beam Output Energy and Optical Parameters - (브라운관 전자총 부품의 펄스 Nd:YAG레이저 용접에 관한 연구 (I) - 빔의 출력특성과 광학변수 -)

  • 김종도;하승협;조상명
    • Journal of Welding and Joining
    • /
    • v.20 no.4
    • /
    • pp.525-534
    • /
    • 2002
  • During laser spot welding of the braun tube electron gun, phenomena such as serious spattering and oxidative reaction, etc. were occurred. The spatter occurred from weld pool affects the braun tube, namely it blocks up a very small hole on the shadow mask and causes short circuit between two roles of the electron gun. We guessed that high power density and oxidative reaction are main sources of these problems. So, we studied to prevent and to reduce spatter occurring in spot welding of the braun tube electron gun using pulsed Nd:YAG laser. The characteristics of laser output power was estimated, and the loss of laser energy by optical parameter and spatter was measured by powermeter. The effects of welding parameters, laser defocused distance and incident angle, were investigated on the shape and penetration depth of the laser welded bead in flare and flange joints. From these results, the laser peak power was a major factor to control penetration depth and to occur spatter. It was found that the losses of laser energy by optic parameter and sticked spatter affect seriously laser weldability of thin sheets. The deepest penetration depth is gotten on focal position, and a "bead transition" occurred with a slight displacement of focal position relative to the workpiece surface and the absorption rate of the laser energy is affected by the shape factor of the workpiece. When we changed the incident angle of laser beam, the penetration depth was decreased a little with increasing of the incident angle, and the bead width was increased. The spattering was prevented by considering laser beam energy and incident angle.ent angle.

Effect of Argon Ion Beam Incident Angle on Self-Organized Nanostructure on the Surface of Polyethylene Naphthalate Film (알곤 이온빔 입사각에 따른 Polyethylene Naphthalate 필름 표면의 자가나노구조화 분석)

  • Joe, Gyeonghwan;Yang, Junyeong;Byeon, Eun-Yeon;Park, Young-Bae;Jung, Sunghoon;Kim, Do-Geun;Lee, Seunghun
    • Journal of the Korean institute of surface engineering
    • /
    • v.53 no.3
    • /
    • pp.116-123
    • /
    • 2020
  • Ion beam irradiation induces self-organization of nanostructure on the surface of polymer film. We show that the incident angle of Ar ions on polyethylene naphthalate(PEN) film changes self-organized nanostructure. PEN film was irradiated by argon ion beams with the ion incident angle of 0°, 30°, 45°, 60°, and 80°. Nanostructure was altered from dimple to ripple structure as the angle increases. The ripple structure changed to pillar structure after 60°due to that the shallow incident angle increased the ion energy transfer per depth up to 50 eV/Å, which value could induce excessive surface heating and oligomer formation reacting as a physical mask for anisotropic etching. And quantitative analysis of the nanostructures was adapted by using ABC model and fractal dimension theory.

Skin Damage Sustained During Head-and-Neck and Shoulder Radiotherapy Due to the Curvature of Skin and the Use of Immobilization Mask (머리-목 그리고 어깨의 방사선 치료 시 피부곡면과 고정장치로 인한 피부손상연구)

  • Kim, Soo-Kil;Jeung, Tae-Sig;Lim, Sang-Wook;Park, Yeong-Mouk;Park, Dahl
    • Progress in Medical Physics
    • /
    • v.21 no.1
    • /
    • pp.86-92
    • /
    • 2010
  • The purpose of this study was to measure curvature contour skin dose using radiochromic film and TLD for a conventional open field. We also attempted to quantify the degradation of skin sparing associated with use of immobilization devices for high energy photon beams and to calculate the skin dose with a help of Monte Carlo (MC) simulation. To simulate head-and-neck and shoulder treatment, a cylindrical solid water phantom 11 cm in diameter was irradiated with 6 MV x-rays using $40{\times}40\;cm^2$ field at 100 cm source axis distance (SAD) to the center of the phantom. Aquaplastic mesh mask was placed on the surface of the cylindrical phantom that mimicked relevant clinical situations. The skin dose profile was obtained by taking measurements from $0^{\circ}$ to $360^{\circ}$ around the circumference of the cylindrical phantom. The skin doses obtained from radiochromic film were found to be 47% of the maximum dose of $D_{max}$ at the $0^{\circ}$ beam entry position and 61% at the $90^{\circ}$ oblique beam position without the mask. Using the mask (1.5 mm), the skin dose received was 59% at $0^{\circ}$ incidence and 78% at $80^{\circ}$ incidence. Skin dose results were also gathered using thin thermoluminescent dosimeters (TLD). With the mask, the skin dose was 66% at $0^{\circ}$ incidence and 80% at $80^{\circ}$ incidence. This method with the mask revealed the similar pattern as film measurement. For the treatments of the head-and-neck and shoulder regions in which immobilization mask was used, skin doses at around tangential angle were nearly the same as the prescription dose. When a sloping skin contour is encountered, skin doses may be abated using thinner and more perforated immoblization devices which should still maintain immoblization.

Research of Optimum Reflow Process Condition for 0402 Electric Parts (0402칩의 무연솔더링 최적공정 연구)

  • Bang, Jung-Hwan;Lee, Se-Hyung;Shin, Yue-Seon;Kim, Jeong-Han;Lee, Chang-Woo
    • Journal of Welding and Joining
    • /
    • v.27 no.1
    • /
    • pp.85-89
    • /
    • 2009
  • Reflow process conditions were investigated for 0402 electric parts with Sn-3.0Ag-0.5Cu solders. Circle hole shape metal mask with 100 m thickness showed excellent printability. Self alignment abilities were 71% for 1005 chips, 52% for 0603 chips, and 3% for 0402 chips. Average joining strengos were 1990 gf for 1005 chips, 867 gf for 0603 chips, and 525 gf for 0402 chips. As mis-mounting angle increased, joining strength decreased. Considering self-alignment ability, mounting angle had to be under $5^{\circ}$ and contact area of the chips had to be over 40% for Pb-free soldering process for 0402 chips.

Three-dimensional finite element analysis on the effects of maxillary protraction with an individual titanium plate at multiple directions and locations

  • Fan Wang;Qiao Chang;Shuran Liang;Yuxing Bai
    • The korean journal of orthodontics
    • /
    • v.54 no.2
    • /
    • pp.108-116
    • /
    • 2024
  • Objective: A three-dimensional-printed individual titanium plate was applied for maxillary protraction to eliminate side effects and obtain the maximum skeletal effect. This study aimed to explore the stress distribution characteristics of sutures during maxillary protraction using individual titanium plates in various directions and locations. Methods: A protraction force of 500 g per side was applied at forward and downward angles between 0° and 60° with respect to the Frankfort horizontal plane, after which the titanium plate was moved 2 and 4 mm upward and downward, respectively. Changes in sutures with multiple protraction directions and various miniplate heights were quantified to analyze their impact on the maxillofacial bone. Results: Protraction angle of 0-30° with respect to the Frankfort horizontal plane exhibited a tendency for counterclockwise rotation in the maxilla. At a 40° protraction angle, translational motion was observed in the maxilla, whereas protraction angles of 50-60° tended to induce clockwise rotation in the maxilla. Enhanced protraction efficiency at the lower edge of the pyriform aperture was associated with increased height of individual titanium plates. Conclusions: Various protraction directions are suitable for patients with different types of vertical bone surfaces. Furthermore, when the titanium plate was positioned lower, the protraction force exhibited an increase.

Feature Extraction Techniques from Micro Drill Bits Images (마이크로 드릴 비트 영상에서의 특징 추출 기법)

  • Oh, Se-Jun;Kim, Nak-Hyun
    • Proceedings of the IEEK Conference
    • /
    • 2008.06a
    • /
    • pp.919-920
    • /
    • 2008
  • In this paper, we present early processing techniques for visual inspection of metallic parts. Since metallic surfaces give rise to specular reflections, it is difficult to extract object boundaries using elementary segmentation techniques such as edge detection or binary thresholding. In this paper, we present two techniques for finding object boundaries on micro bit images. First, we explain a technique for detecting blade boundaries using a directional correlation mask. Second, a line and angle extraction technique based on Harris corner detector and Hough transform is described. These techniques have been effective for detecting blade boundaries, and a number of experimental results are presented using real images.

  • PDF