Microstructure, Electrical and Optical Properties of Al:ZnO Thin Films Prepared by RF Magnetron Sputter Techniques (고주파 마그네트론 스퍼터 기법으로 제조된 Al:ZnO 박막의 미세구조 및 전기적, 광학적 특성)

• 최정호;조남희
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1999.11a
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  • pp.159-159
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  • 1999
• PDF

Structural and optical features of SRSO films grown by RF magnetron sputter (고주파 마그네트론 스퍼터 기법을 이용하여 제조된 SRSO 박막의 구조적, 광학적 특성)

• 김승원;조남희
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2003.11a
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  • pp.191-191
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  • 2003
• PDF

rf-magnetron sputter 증착기술을 이용한 태양전지용 p형 비정질 실리콘 박막의 특성분석

• Lee, Seong-Hyeon;Yun, Seon-Jin;Kim, Je-Ha;Im, Jeong-Uk
• • Proceedings of the Korean Vacuum Society Conference
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  • 2009.08a
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  • pp.273-273
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  • 2009
• PDF

Manostructural and Optical Features of Nano-crystalline Si Fims preparted by PECVD and RF Magnetron Sputter Techniques (PECVD 및 RF마그네트론 스퍼터 기법을 이용하여 제조된 나도 결정 Si 박막의 나노구조 및 광학적 특성)

• 한규호;박명범;조남희
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.05a
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  • pp.102-102
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  • 2001
• PDF

Nano-structural and Optical Features of nc-Si Films Grwon by RF Magnetron Sputter (고주파 마그네트론 스퍼터 기법을 이용하여 제조된 nc-Si 박막의 구조적, 과학적 특성)

• Kim, Seung-Won;Jo, Nam-Hui
• • Proceedings of the Korean Ceranic Society Conference
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  • 2003.04a
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  • pp.146.1-146
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  • 2003
• PDF

A study on the adhesion and the wear properties of TiN film deposited by reactive magnetron sputter ion plating (반응성 마그네트론 스퍼터 이온 플레이팅법으로 증착된 TiN 박막의 접착력 및 마모 특성)

• 이민구;이원종;김흥회;김정수
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1996.11a
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  • pp.75-75
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  • 1996
• PDF

Kinetic Simulation of Magnetron Sputter

• Shon, C.H.;Lee, J.K.;Lee, H.J.
• • Proceedings of the Korean Vacuum Society Conference
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  • 1998.02a
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  • pp.165-165
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  • 1998
• PDF

Characteristic of LiPON thin film electrolyte depnding on growth condition grown by RF magnetron sputter (RF 마그네트론 스퍼터의 성장조건에 따른 LiPON 박막전해질의 특성)

• 송근만;안광순;안효진;문수진;김우성;성영은
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.11a
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  • pp.176-176
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  • 2001
• PDF

Electrical and structural properties of $HfO_2$ deposited by r.f magnetron sputter

• Hong, Young-Bin;Roh, Yong-Ha
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.113-113
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  • 2008
• PDF

Structural and electrical characterization of $CeO_2/HfO_2$ as a gate dielectric deposited by r.f magnetron sputter

• Kang, In-Gu;Roh, Yong-Ha
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.114-114
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  • 2008
• PDF

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