• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.61 no.12
• /
• pp.1828-1835
• /
• 2012

In this paper, a conceptual design and a detailed design of novel cylindrical magnetic levitation stage is introduced. This is came from planar-typed magnetic levitation stage. The proposed stage is composed of cylinder-typed permanent magnet array and semi-cylinder-typed 3 phase winding module. When a proper current is induced at winding module, a magnetic levitation force between the permanent magnet array and winding module is generated. The proposed stage can precisely move the cylinder to rotations and translations as well as levitations with the magnetic levitation force. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography under vacuum. Two methods are used to calculate required magnetic levitation forces. The one is 2D FEM analysis, the other is mathematical modeling. This paper shown that results of two methods are similar. An assistant plate is introduced to reduce required currents of winding module for levitations in vacuum. The mathematical model of cylindrical magnetic levitation stage is used for dynamic simulation of magnetic levitations. A lead-lag compensator is used for control of the model. Simulation results shown that the detail designed model of the cylindrical magnetic levitation stage with the assistant plate can be controlled very well.

• Journal of Advanced Marine Engineering and Technology
• /
• v.27 no.7
• /
• pp.862-871
• /
• 2003

In this paper, we addressed a modeling for the magnetic levitation stage. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for propulsion. Therefore. this stage can generate six degrees of freedom motion by the combination of forces. We derived a mechanical dynamics equation using Lagrangian method and electromechanical dynamics equation by using Co-energy method. Based on the derived dynamics, we can analyze the stage motion that is subject to the input currents and forces.

• Journal of Electrical Engineering and Technology
• /
• v.13 no.5
• /
• pp.2116-2124
• /
• 2018

Magnetic levitation system with the advantages of non-contact, no friction and no wear can satisfy the requirement of high precision and high speed positioning. In this paper, magnetic levitation positioning stage which mainly consists of planar coil and HALBACH permanent magnet array and its control and driving system are designed. Magnetic levitation system is a highly nonlinear and strongly coupled complex system and its control performance can be influenced by the uncertainty and external disturbance. So exact feedback linearization method is used to realize exact linearization and decoupling, and a strategy of sliding mode control based on disturbance observer is proposed to compensate the uncertainty and external disturbance. Detailed proofs of observer's convergence property and system stability are derived. Both the simulation and experiment results verify the effectiveness of sliding mode control algorithm based on disturbance observer.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1082-1087
• /
• 2003

In this paper, we address the development of magnetic levitation positioning system. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for drive levitation object called a platen This stage can generate six degrees of freedom motion by the vertical and horizontal force. We derived the mechanical dynamics equation using lagrangian method and used coenergy to express an electromagnetic force. We proposed control algorithm for the position and posture control from its initial value to its desired value using sliding mode control. Some simulation result is provided to verify the effectiveness of the proposed control scheme.

• Journal of Advanced Marine Engineering and Technology
• /
• v.28 no.6
• /
• pp.906-915
• /
• 2004

In this paper, we address the development of magnetic levitation positioning system. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for driving levitation object called a platen. This stage can generate six degrees of freedom motion by the vertical and horizontal force. We derived the mechanical dynamics equation using Lagrangian method and used coenergy to express an electromagnetic force. We proposed a control algorithm for the position and posture control from its initial value to its desired value using sliding mode control. Some simulation results are provided to verify the effectiveness of the proposed control scheme.

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.3
• /
• pp.158-164
• /
• 2000

In recent year, desire and request fer micro automation are growing rapidly covering the whole range of the industry. This has been caused mainly by request of more accurate manufacturing process due to a higher density of integrated circuits in semiconductor industry. This paper presents a six d.o.f fine motion stage using magnetic levitation technique, which is one of actuating techniques that have the potential for achieving such a micro motion. There is no limit in motion resolution theoretically that the magnetically levitated part over a fixed stator can realize. In addition, it Is possible to manipulate the position and the force of the moving part at the same time. Then, the magnetic levitation technique is chosen into the actuating method. However, we discuss issues of design, kinematics, dynamics, and control of the proposed system. And a few experimental results fur step input are given.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.4
• /
• pp.76-83
• /
• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

• Journal of Electrical Engineering and Technology
• /
• v.7 no.4
• /
• pp.558-563
• /
• 2012

In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with $10{\times}10$ coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}3urad$, ${\pm}2urad$, ${\pm}1urad$]The errors of long stroke movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}1.5urad$, ${\pm}2urad$, ${\pm}0.5urad$].

• Proceedings of the KIEE Conference
• /
• 2001.10a
• /
• pp.9-11
• /
• 2001

This paper deals with design and characteristic analysis of a permanent magnet linear synchronous motor for magnetic levitation stage of semi-conductor manufacture machine. In order to improve the control performance by detent force minimization, skew and PM offset method are used.

• Proceedings of the KSME Conference
• /
• 2001.06b
• /
• pp.164-169
• /
• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.