• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.13-18
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• 2004

It is important to estimate the distribution of intensity of a magnetic field for application of magnetic method to industrial nondestructive evaluation. Magnetic camera provides the distribution of a quantitative magnetic field with homogeneous lift-off and same spatial resolution. Leakage magnetic flux near the crack on the specimen could be amplified by 3-dimensional magnetic fluid and zoom in and out of measurement area. This study introduces the experimental consideration of the effects of lens for concentrating of magnetic flux. The experimental results showed that the magnetic fluid has sufficient lens effect for magnetic camera and effect of improvement in probability of detection.

• 천문학회지
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• 제37권5호
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• pp.355-359
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• 2004

Differential Faraday Rotation measurements between the images of same background source, of multiply-imaged gravitational lens systems can be effectively used to provide a valuable probe to establish the existence of large-scale ordered magnetic fields in lensing galaxies as well as galaxy clusters. Estimates of the magnetic field in lens galaxies, based on the radio polarization measurements do not appear to show any clear evidence for evolution with redhsift of the coherent large scale magnetic field between redshift of 0.9 and the present epoch. However, our method clearly establishes the presence of coherent large scale magnetic field in giant ellitpical galaxies.

• 한국정밀공학회지
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• 제26권11호
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• pp.92-98
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• 2009

The scanning electron microscope (SEM) contains an electron optical system in which electrons are emitted and moved to form a focused beam, and generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present study covers the design and analysis of an objective lens for a thermionic SEM. A finite element (FE) analysis for the objective lens is performed to analyze its magnetic characteristics for various lens designs. Relevant beam trajectories are also investigated by tracing the ray path of the electron beams under the magnetic fields inside the objective lens.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• 한국정밀공학회지
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• 제24권9호
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• pp.95-102
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• 2007

The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.

• 한국정밀공학회지
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• 제15권7호
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• pp.98-103
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• 1998

Recently, DVD/CD compatible driver is needed for DVD and CD is widely used as a new optical data restoring device. The optical systems of DVD and CD driver are different because they have different optical feature. If only one objective lens is used, the change of an aperture or a dual focal length of the lens is required. This method, however, increases the number of parts and results in loss of the power of laser light. Hence, we propose a dual lens actuator design that can read DVD and CD respectively. Albeit magnetic spring is important mechanism in the dual lens actuator design, there has not been the systematic approach to design the mechanism in the preceding researches. In this article. the guideway to design magnetic spring is presented by using the qualitative theoretical approach and the finite element analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.149-153
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• 2005

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.96-100
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• 2007

Condenser lens and objective lens are used to demagnify the image of the crossover to the final spot size. In lens, electrons are focused by magnetic fields. This fields is fringing field. It is important in electron focusing. Electron focusing occurs the radial component field and axial component field. Radial component produces rotational force and axial component produces radial force. Radial force causes the electron's trajectory to curve toward the optic axis and corss it. Focal length decreases as the current of lens increases. In this paper, we use the focal length for desiging the hardware of lens current control and present the results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.769-770
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• 2013

• 한국정밀공학회지
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• 제25권3호
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• pp.15-22
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• 2008