• Current Applied Physics
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• v.18 no.11
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• pp.1196-1200
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• 2018

We have experimentally demonstrated circular polarization generation from linear polarized soft X-ray at synchrotron by adopting a thin magnetic film polarizer. Polarizer is composed of Co/Pt multilayer with a perpendicular magnetic anisotropy, which allows us to easily accommodate without needing any tilting angle into the measurement setup since the circular polarization is generated for the X-ray with normal incidence and transmission. Generated circular polarization is examined by observing magnetic domain features based on the X-ray magnetic circular dichroism, where~11% of circular component is estimated compared to the case of full circular polarization.

• Journal of the Microelectronics and Packaging Society
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• v.21 no.2
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• pp.85-89
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• 2014

We propose the new fabrication method of a 70 nm half-pitch wire grid polarizer with high performance using magnetic soft mold. The device is a form of aluminium gratings on a PET(Polyethylene phthalate) substrate whose size of $3cm{\times}3cm$ is compatible with a TFT_LCD(Tin Flat Transistor Liquid Crystal Display) panel. A magnetic soft mold with a pitch of 70 nm is fabricated using two-step replication method. As a result, we get a NWGP pattern which has 70.39 nm line width, 64.76 nm depth, 140.78 nm pitch, on substrate. The maximum and minimum transmittances of the NWGP at 800 nm are 75% and 10%, respectively. This work demonstrates a unique cost-effective solution for nanopatterning requirements in consumer electronics components.