• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.248-248
• /
• 1999

현재 반도체 공정에서 사용하는 건식식각 공정은 고밀도 프라즈마를 사용한 플라즈마 장비를 사용하는 경향이 증대되고 있으며 이와 같은 고밀도 플라즈마 장비의 사용은 반도체 소자의 최소 선폭(CD)이 deep sub-micron으로 감소하고 반면 실리콘 웨이퍼의 크기는 8인치 직경이상으로 증가하여 가고 있어서 그 필요성이 더욱 더 증가되고 있다. 특히 TFT-LCD를 비롯한 PDP, 그리고 FED 등과 같은 여러 가지 형태의 평판 디스플레이의 제조공정에 있어서도 실리콘 기판에 비하여 대면적의 기판을 이용하고 또한 사각형 형태의 시편공정이 요구되므로 평판 디스플레이에서도 고밀도의 균일한 플라즈마 유지가 중요하다. 따라서, 본 실험에서는 여러 가지 형태의 영구자석 및 전자석의 세기 및 배열이 유도결합형 플라즈마에 미치는 효과(plasma&etch uniformity, etch rate, etc.)를 살펴보기 위해서, 유도결합형 플라즈마 chamber(210mm$\times$210mm) 내부에 magnetic cusping을 위한 영구자석용 하우스를 제작하여 표면에서 3000Gauss의 자장세기를 갖는 소형영구자석을 부착하였으며,외벽에는 chamber와 같이 사각형태로 40회 감겨진 50cm$\times$50cm 의 크기로 chamber 상하에 1개씩 Helmholtz 코일 형태로 설치하였다. 식각가스로는 Cl2, HBr, 그리고 BCl3 gas를 이용하여 axial magnet과 multidipole magnet 유무에 따른 반응성 gas의 polysilicon 식각특성을 살펴보았으며, 또한 electrostatic probe(ESP, Hiden Analytic미)를 이용하여 이들 반응성 gas에 대한 magnetically enhanced inductively coupled plasma의 특성분석을 수행하였따. Cl2, HBr, BCl3의 반응성 식각가스 조합을 이용하여 polysilicon의 식각속도 및 식각선택도를 관찰한 결과, 어떠한 자장도 가하지 않은 경우에 비해 gas의 분해율이 가장 높은 영구자석과 전자석의 조합에서 가장 높은 식각도가 관찰되었다. 특히 pure Cl2 플라즈마의 경우, Axial 방향의 전자석만을 가한 경우 식각속도에 있어서는 큰 증가를 보였으나, 식각균일도(식각균일도:8.8%)는 다소 감소하였으며, Axial 방향의 전자석과 영구자석을 조합한 경우 가장 높은 식각속도를 얻었으며, 식각균일도는 Axial 방향의 전자석만을 사용하였을 경우와 비교하여 향상되었다.

• Journal of The Korean Astronomical Society
• /
• v.48 no.5
• /
• pp.285-298
• /
• 2015

Active Galactic Nuclei (AGN) with bright radio jets offer the opportunity to study the structure of and physical conditions in relativistic outflows. For such studies, multi-frequency polarimetric very long baseline interferometric (VLBI) observations are important as they directly probe particle densities, magnetic field geometries, and several other parameters. We present results from first-epoch data obtained by the Korean VLBI Network (KVN) within the frame of the Plasma Physics of Active Galactic Nuclei (PAGaN) project. We observed seven radio-bright nearby AGN at frequencies of 22, 43, 86, and 129 GHz in dual polarization mode. Our observations constrain apparent brightness temperatures of jet components and radio cores in our sample to > 10^8.01 K and > 10^9.86 K, respectively. Degrees of linear polarization m_L are relatively low overall: less than 10%. This indicates suppression of polarization by strong turbulence in the jets. We found an exceptionally high degree of polarization in a jet component of BL Lac at 43 GHz, with m_L ~ 40%. Assuming a transverse shock front propagating downstream along the jet, the shock front being almost parallel to the line of sight can explain the high degree of polarization.

• Journal of the Korean Society for Heat Treatment
• /
• v.6 no.1
• /
• pp.17-25
• /
• 1993

The Cu - $Nb_3Sn$ composites wire as a superconducting material was prepared by in situ method as follow: Cu - 15wt.% Nb alloys which were melted in a high -frequency induction furnace and casted in bar were cold-worked up to the final diameter of 0.24 mm, electroplated with Sn, pre-treated in two steps and then diffused at $550{\sim}650^{\circ}C$ for 24 ~ 96 hrs. The overall $J_c$ and $T_c$ of the specimens were measured by the four point-probe method at 10 K in the magnetic field of 0 Tesla. The overall $J_c$ of the composites wire which diffused at $550^{\circ}C$ after pre-treating in two steps were generally higher than those of the wire at either $600^{\circ}C$ or $650^{\circ}C$. For the specimens diffused at $550^{\circ}C$, the overall $J_c$ were increased until 72 hrs. of diffusion time and then decreased. However, in case of diffusion at $600^{\circ}C$ and $650^{\circ}C$, the overall $J_c$ were gradually decreased from the beginning. The maximum overall $J_c$ obtained in this experiment was $1.3{\times}10^4\;A/cm^2$, which was measured for the specimen diffused at $550^{\circ}C$ for 72 hrs. When the specimens were diffused at $550^{\circ}C$ for 72 hrs, after pre-treating, the measured critical temperature, $T_c$ was 16.19 K. Similar $T_c$ value were obtained in other specimens regardless of diffusion time and temperature.

• Journal of the Korean Magnetics Society
• /
• v.8 no.5
• /
• pp.282-287
• /
• 1998

Dependence of magnetoresistance on base pressure and deposition rates of each Fe, Co, Cu layers in the $Fe(50{\AA}/[Co(17{\AA})/Cu(24{\AA})]_20$ multilayer thin films, prepared by dc magnetron sputtering on Corning glass, were investigated. AFM analysis, X-ray diffraction analysis, vibrating sample magnetometer analysis, and magnetoresustance measurement (4-probe method) were performed. The multilayer films deposited under low base pressure increases magnetoresistance ratio by preventing oxidation. Annealing for the samples at a moderate temperature allowed larger textured grain with no loss in the periodicity. Magnetoresistance ratio of the annealed multilayers was increased due to the increase antiferromagnetically coupled fraction of the film after annealing. Optimization of deposition rate was greater than 1 $\AA$/s for Fe, and 2.8 $\AA$/s for Cu. Deposition rate of Co showed a tendency of increasing of magnetoresistance ratio due to the formation of flat magnetic layer in case of high deposition rate of Co.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.41 no.9
• /
• pp.1108-1119
• /
• 2016

This paper presents the spectral analysis and radiation pattern of low-frequency electromagnetic(EM) leakage signals according to the fundamental operations of smartphones. The EM leakage signals generated by the activation of four I/O sensor modules such as a touch-screen, a camera, a microphone and a speaker are captured by the commercial near-field magnetic probe with 1cm spatial resolution. The analysis results show that the leakage of the EM wave occurs strongly around the activated I/O sensor modules, AP(Application Processor) and memory modules. Also, the distinguishable frequency characteristic is shown in each spectrum of EM leakage signals.

• International Journal of Naval Architecture and Ocean Engineering
• /
• v.10 no.2
• /
• pp.153-169
• /
• 2018

A submarine has a pressure hull that can withstand high hydraulic pressure and therefore, requires the use of highly advanced shipbuilding technology. When producing a pressure hull, periodic inspection, repair, and maintenance are conducted to maintain its soundness. Of the maintenance methods, Non-Destructive Testing (NDT) is the most effective, because it does not damage the target but sustains its original form and function while inspecting internal and external defects. The NDT process to detect defects in the welded parts of the submarine is applied through Magnetic particle Testing (MT) to detect surface defects and Ultrasonic Testing (UT) and Radiography Testing (RT) to detect internal defects. In comparison with RT, UT encounters difficulties in distinguishing the types of defects, can yield different results depending on the skills of the inspector, and stores no inspection record. At the same time, the use of RT gives rise to issues related to worker safety due to radiation exposure. RT is also difficult to apply from the perspectives of the manufacturing of the submarine and economic feasibility. Therefore, in this study, the Phased Array Ultrasonic Testing (PAUT) method was applied to propose an inspection method that can address the above disadvantages by designing a probe to enhance the precision of detection of hull defects and the reliability of calculations of defect size.

• Clinical Pain
• /
• v.18 no.2
• /
• pp.65-69
• /
• 2019

Objective: This study aims to evaluate the efficacy of high-voltage microcurrent therapy in patients with herniated lumbar disc (HLD) presenting radicular or back pain. Method: This is a retrospective study with 33 patients who are complaining pain with HLD findings on magnetic resonance image. Microcurrent therapy was applied to leg or paralumbar area. Treatment was conducted for seven minutes with 250~1000 uA intensity as high as the patients could tolerate via stimulating probe with roller type and the frequency was 60 Hz with a sine wave pulse. The visual analogue scale (VAS) was measured just before and after the treatment. Results: The degree of pain reduction (△VAS) was 1.6 points after treatment on average. The △VAS according to the diagnosis, stenosis, dermatome area, medication, pain site and caudal epidural block was not statistically significant. However, the △VAS according to the number of treatments (< 3, ≥ 3 times) showed a statistically significant difference (p=0.04). Conclusion: High-voltage microcurrent therapy may help reduce lumbar or lumbosacral radiating pain after the procedure. The effect was better when microcurrent was applied three times or more. This result suggests that the microcurrent would have cumulative effect on reducing radicular or back pain in patients with HLD.

• Investigative Magnetic Resonance Imaging
• /
• v.8 no.2
• /
• pp.79-85
• /
• 2004

Purpose : To evaluate the usefulness and reproducibility of $^1H$ MRS in different 1.5 T MR machines with different coils to compare the SNR, scan time and the spectral patterns in different brain regions in normal volunteers. Materials and Methods : Localized $^1H$ MR spectroscopy ($^1H$ MRS) was performed in a total of 10 normal volunteers (age; 20-45 years) with spectral parameters adjusted by the autoprescan routine (PROBE package). In all volunteers, MRS was performed in a three times using conventional MRS (Signa Horizon) with 1 channel coil and upgraded MRS (Echospeed plus with EXCITE) with both 1 channel and 8 channel coil. Using these three different machines and coils, SNRs of the spectra in both phantom and volunteers and (pre)scan time of MRS were compared. Two regions of the human brain (basal ganglia and deep white matter) were examined and relative metabolite ratios (NAA/Cr, Cho/Cr, and mI/Cr ratios) were measured in all volunteers. For all spectra, a STEAM localization sequence with three-pulse CHESS $H_2O$ suppression was used, with the following acquisition parameters: TR=3.0/2.0 sec, TE=30 msec, TM=13.7 msec, SW=2500 Hz, SI=2048 pts, AVG : 64/128, and NEX=2/8 (Signa/Echospeed). Results : The SNR was about over $30\%$ higher in Echospeed machine and time for prescan and scan was almost same in different machines and coils. Reliable spectra were obtained on both MRS systems and there were no significant differences in spectral patterns and relative metabolite ratios in two brain regions (p>0.05). Conclusion : Both conventional and new MRI systems are highly reliable and reproducible for $^1H$ MR spectroscopic examinations in human brains and there are no significant differences in applications for $^1H$ MRS between two different MRI systems.

• The Bulletin of The Korean Astronomical Society
• /
• v.40 no.1
• /
• pp.73.2-74
• /
• 2015

The gas cloud G2 falling toward Sagittarius A* (Sgr A*), the supermassive black hole at the center of the Milky Way, is supposed to provide valuable information on the physics of accretion flows and the environment of the black hole. We observed Sgr A* with four European stations of the Global Millimeter Very Long Baseline Interferometry Array (GMVA) at 86 GHz on 1 October 2013 when parts of G2 had already passed the pericenter. We searched for possible transient asymmetric structure - such as jets or winds from hot accretion flows - around Sgr A* caused by accretion of material from G2. The interferometric closure phases (which are zero if the spatial brightness distribution of the target is symmetric, and deviate from zero otherwise) remained zero within errors during the observation time. We thus conclude that Sgr A* did not show significant asymmetric (in the observer frame) outflows in late 2013. Using simulations, we constrain the size of the outflows that we could have missed to ${\approx}2.5$ mas along the major axis, ${\approx}0.4$ mas along the minor axis of the beam, corresponding to approximately 232 and 35 Schwarzschild radii, respectively; we thus probe spatial scales on which the jets of radio galaxies are suspected to convert magnetic into kinetic energy. As probably less than 0.2 Jy of the flux from Sgr A* can be attributed to accretion from G2, one finds an effective accretion rate ${\eta}M{\leq}1.5{\times}10^9kg/s{\approx}7.7{\times}10^{-9}M_{earth}/yr$ for material from G2. Exploiting the kinetic jet power-accretion power relation of radio galaxies, one finds that the rate of accretion of matter that ends up in jets is limited to $M{\leq}10^{17}kg/s{\approx}0.5M_{Earth}/yr$ less than about 20% of the mass of G2. Accordingly, G2 appears to be largely stable against loss of angular momentum and subsequent (partial) accretion at least on time scales ${\leq}1$ year.

• The Journal of the Institute of Internet, Broadcasting and Communication
• /
• v.19 no.6
• /
• pp.57-63
• /
• 2019

S-parameters were used to analyze the effect of the circuit according to the height of the EMI shield layers. Among the S-parameters, S11, S21, S22, and S31 were used as factors for determining the effect on the circuit function. Simulations were performed using shields made of Graphite and Ferrite, and the frequencies were run from 100 MHz to 1 GHz. As the height of the shield was increased, the value of S21 was getting closer to 0 dB. In addition, the SE value was confirmed to improve the shielding performance according to the thickness of the insulating layer only in a specific frequency band. Based on 800um with thickest silicon dioxide thickness, the FG structure averaged -1 dB in narrow frequency bands between 100 MHz and 300 MHz, showing better efficiency than GF with an average of -2 dB. Although GF structures do not show high efficiency, they exhibit average performance of -3 dB in frequency bands between 100 MHz and 1 GHz rather than FG structures that sway over a wide range. In other words, FG and GF structures have trade-off structures. Therefore, it should be noted that the appropriate structure is selected for use.