• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.172-176
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• 2002

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structured solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20um width and 3um thickness is electroplated on Cr(300${\AA}$)/Au(1500${\AA}$) films for the pick-up(42turn) and the excitation(24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3 $\mu\textrm{m}$ is obtained under 2000Gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ∼1,100 and coercive field of -0.1Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150V/T at the excitation frequency of 2MHz and the excitation voltage of 4.4Vp-p. The power consumption is estimated to be 50mW.

• 한국전기전자재료학회논문지
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• 제16권2호
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• pp.120-124
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• 2003

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structure solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20${\mu}$m width and 3${\mu}$m thickness is electroplated on Cr (300${\AA}$) / Au (1500${\AA}$) films for the pick-up (42turn) and the excitation (24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3${\mu}$m is obtained under 2000 gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ~1,100 and coercive field of ~0.1 Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150 V/T at the excitation frequency of 2 MHz and the excitation voltage of 4.4 V$\_$p p/. The power consumption is estimated to be 50mW.

• 융합신호처리학회 학술대회논문집
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• 한국신호처리시스템학회 2003년도 하계학술대회 논문집
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• pp.251-255
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• 2003

In this paper, we have a fluxgate sensor with ferrite core. Thought sensor is consist of one excitation coil and two pick-up coil, and A lock-in amplifier circuity is designed for Signal processing of picking up 2nd harmonics from pick-up coils. Excitation coils is turned by 20 turns, and pick-up coil for picking up harmonics is turned by 40 turns eachother. It convert 2nd harmonics to DC output voltage. Measured output voltage and sensitivity, direction of sensor about out side magnetic field, and also sensor output properties about excitation frequency and current.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권9호
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• pp.418-423
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• 2003

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.151-155
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• 2002

This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon with extremely high DC permeability of ∼100,000 and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3${\times}$5.7m㎡. Excellent linear response over the range of -100${\mu}$T to +100${\mu}$T is obtained with 540V/T sensitivity at excitation square wave of 3V$\_$P-P/ and 360kHz. The very low power consumption of ∼8mW was measured. This magnetic sensing element which measures the lower fields than 50${\mu}$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.

• 한국전기전자재료학회논문지
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• 제15권8호
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• pp.702-707
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• 2002

This paper presents a micro fluxgate sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3$\times$5.7$\textrm{mm}^2$. Excellent linear response over the range of -100$\mu$T to +100$\mu$T is obtained with 540V/T sensitivity at excitation square wave of 3 $V_{p-p}$ and 360kHz. The very low power consumption of ~8mW was measured. This magnetic sensing element, which measures the lower fields than 50$\mu$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.h.

• Structural Engineering and Mechanics
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• 제17권3_4호
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• pp.291-302
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• 2004

In this paper, load monitoring technologies using U-shape Magnetoelastic (EM or ME) sensors have been exploited systemically for the first time. The steel rod to be tested is the Japan 7 mm piano steel rod. The load dependence of the magnetic properties of the piano steel rod was manifested. Two experimental designs of U-shape magnetoelastic sensors were introduced, one with double pick-up concentric coils wound on the rod to be tested, the other with pick-up coil on one yoke foot. The former design is used to derive the correlation of the relative permeability with elastic tension, while the latter is aimed to reflect the stress induced magnetic flux variation along the magnetic circuit. Magnetostatic simulations provide interpretations for the yoke foot sensing technology. Tests with double pick-up coils indicate that under proper working points (primary voltages), the relative permeability varies linearly with the axial load for the Japan 7 mm piano steel rod. Tests with pick-up coil on the yoke foot show that the integrated sensing voltage changes quadratically with the load, and error is more acceptable when the working point is high enough.

• 제어로봇시스템학회논문지
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• 제17권1호
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• pp.1-5
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• 2011

The basic signals for electronic engine control are velocity and degree of the engine cam shaft. The CPS sensor used for this signal and magnetic pick-up type CPS sensor is more popular. It is very important thing analyze this signal correctly. If there are some mistakes at the analysis, like a noise, The engine do not working at the best status, it will generate some noise, emit exhaust fumes and waste more gases. In general way to analysis this signal, you use zero-level detector circuit and in order to reduce the error you must use another sensor like a TDC sensor. In this paper, We proposed the analysis method using electronics circuits for magnetic pick-up type CPS sensor. We designed Comparison level detector circuit, Differential circuit and Full-rectifier circuit for detected the Long tooth and Short tooth level correctly without another sensor. We expected it is useful for more reliable engine control.

• 센서학회지
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• 제11권2호
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• pp.67-76
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• 2002

본 연구에서는 페라이트 링 코어를 이용한 2차원 fluxgate 센서를 제안하였으며, 본 fluxgate 센서 시스템은 2차원 자장을 측정할 수 있는 센서와 그 센서를 구동하기 위한 구동회로, 그리고 신호처리회로 등으로 구성하였다. 신호 검출 방법으로는 우수고조파 성분 검출을 위해 PSD(phase sensitivity detector) 회로를 사용하였으며, 기존의 제 2고조파 검출법과 비교하기 위해서 pick-up 코일 출력전압의 제 2고조파 성분을 FFT 스펙트럼 분석기를 사용하여 측정하였고, 이렇게 측정된 제 2고조파 성분의 전압과 PSD 단의 출력전압을 비교하였다. 그 결과 여자전류의 증가에 따라 센서의 출력전압도 증가하였으며, 구동주파수에 따른 PSD 단의 출력전압은 주파수가 1.5[kHz]일 때까지는 증가하였지만, 그 이상의 주파수에서는 감소함을 보였다. 그리고 pick-up 코일의 제 2고조파 성분의 전압은 계속 증가함을 보였다. 센서의 최대감도는 구동주파수 1.5 [kHz], 구동전류 2 [App]에서 최대값을 보였으며 감도는 약 1580 [V/T]였다. 센서의 비선형계수는 3 [G] 이내에서 제 2고조파 성분의 전압인 경우 약 1 [%]이내였으며, PSD 단 이후는 약 2.3 [%]이내였다. 그리고 각도오차는 약 ${\pm}2$ [%/FS]이내였다.

• 마이크로전자및패키징학회지
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• 제9권3호
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• pp.19-23
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• 2002

본 논문은 인쇄회로 기판 (PCB)에 내장된 마이크로 플럭스게이트 자기센서 (micro fluxgate magnetic sensor)에 대한 것으로써, 센서의 제작과 폐자로 형성에 따른 자계 검출 특성 변화에 관한 것이다. 이를 위해 연자성 코아를 사각링 형태와 두개의 바 (bar)형태로 각각 구현하였다. 제작을 위해 모두 5층의 기판을 적층하였으며, 가운데 (3번째) 기판을 자성체 코아로, 자성체 코아 외부 (2번째와 4번째) 기판을 여자코일로, 최외부 (1번째와 5번째) 기판을 검출코일로 제작하였다. 연자성 코아로는 약 100,000의 큰 DC 투자율 (permeability)을 갖는 코발트 (Co)가 주성분인 아몰퍼스 재료를 사용하였으며, 여자코일과 검출코일은 구리를 사용하였다. 제작된 자기센서는 여자조건이 360 KHz, $3V_{p-p}$의 구형파일 경우에 사각링 형태의 연자성 코아를 갖는 자기센서에서는 540V/T로 매우 우수한 감도를 보이고 있으며, -100 $\mu$T~＋100 $\mu$T 영역에서 매우 우수한 선형특성을 보이고 있다. 자기 센서의 크기는 $7.3 \times 5.7\textrm{mm}^2$ 이며, 소비전력은 약 8 mW이다. 이런 초소형 자기센서는 휴대용 navigation 시스템, telematics, VR 게임기 등 다양한 응용분야에 적용할 수 있다.