• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.172-176
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• 2002

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structured solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20um width and 3um thickness is electroplated on Cr(300${\AA}$)/Au(1500${\AA}$) films for the pick-up(42turn) and the excitation(24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3 $\mu\textrm{m}$ is obtained under 2000Gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ∼1,100 and coercive field of -0.1Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150V/T at the excitation frequency of 2MHz and the excitation voltage of 4.4Vp-p. The power consumption is estimated to be 50mW.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.2
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• pp.120-124
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• 2003

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structure solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20${\mu}$m width and 3${\mu}$m thickness is electroplated on Cr (300${\AA}$) / Au (1500${\AA}$) films for the pick-up (42turn) and the excitation (24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3${\mu}$m is obtained under 2000 gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ~1,100 and coercive field of ~0.1 Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150 V/T at the excitation frequency of 2 MHz and the excitation voltage of 4.4 V$\_$p p/. The power consumption is estimated to be 50mW.

• Proceedings of the Korea Institute of Convergence Signal Processing
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• 2003.06a
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• pp.251-255
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• 2003

In this paper, we have a fluxgate sensor with ferrite core. Thought sensor is consist of one excitation coil and two pick-up coil, and A lock-in amplifier circuity is designed for Signal processing of picking up 2nd harmonics from pick-up coils. Excitation coils is turned by 20 turns, and pick-up coil for picking up harmonics is turned by 40 turns eachother. It convert 2nd harmonics to DC output voltage. Measured output voltage and sensitivity, direction of sensor about out side magnetic field, and also sensor output properties about excitation frequency and current.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.9
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• pp.418-423
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• 2003

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.151-155
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• 2002

This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon with extremely high DC permeability of ∼100,000 and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3${\times}$5.7m㎡. Excellent linear response over the range of -100${\mu}$T to +100${\mu}$T is obtained with 540V/T sensitivity at excitation square wave of 3V$\_$P-P/ and 360kHz. The very low power consumption of ∼8mW was measured. This magnetic sensing element which measures the lower fields than 50${\mu}$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.8
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• pp.702-707
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• 2002

This paper presents a micro fluxgate sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3$\times$5.7$\textrm{mm}^2$. Excellent linear response over the range of -100$\mu$T to +100$\mu$T is obtained with 540V/T sensitivity at excitation square wave of 3 $V_{p-p}$ and 360kHz. The very low power consumption of ~8mW was measured. This magnetic sensing element, which measures the lower fields than 50$\mu$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.h.

• Structural Engineering and Mechanics
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• v.17 no.3_4
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• pp.291-302
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• 2004

In this paper, load monitoring technologies using U-shape Magnetoelastic (EM or ME) sensors have been exploited systemically for the first time. The steel rod to be tested is the Japan 7 mm piano steel rod. The load dependence of the magnetic properties of the piano steel rod was manifested. Two experimental designs of U-shape magnetoelastic sensors were introduced, one with double pick-up concentric coils wound on the rod to be tested, the other with pick-up coil on one yoke foot. The former design is used to derive the correlation of the relative permeability with elastic tension, while the latter is aimed to reflect the stress induced magnetic flux variation along the magnetic circuit. Magnetostatic simulations provide interpretations for the yoke foot sensing technology. Tests with double pick-up coils indicate that under proper working points (primary voltages), the relative permeability varies linearly with the axial load for the Japan 7 mm piano steel rod. Tests with pick-up coil on the yoke foot show that the integrated sensing voltage changes quadratically with the load, and error is more acceptable when the working point is high enough.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.1
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• pp.1-5
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• 2011

The basic signals for electronic engine control are velocity and degree of the engine cam shaft. The CPS sensor used for this signal and magnetic pick-up type CPS sensor is more popular. It is very important thing analyze this signal correctly. If there are some mistakes at the analysis, like a noise, The engine do not working at the best status, it will generate some noise, emit exhaust fumes and waste more gases. In general way to analysis this signal, you use zero-level detector circuit and in order to reduce the error you must use another sensor like a TDC sensor. In this paper, We proposed the analysis method using electronics circuits for magnetic pick-up type CPS sensor. We designed Comparison level detector circuit, Differential circuit and Full-rectifier circuit for detected the Long tooth and Short tooth level correctly without another sensor. We expected it is useful for more reliable engine control.

• Journal of Sensor Science and Technology
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• v.11 no.2
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• pp.67-76
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• 2002

We have presented a 2-dimensional fluxgate sensor with ferrite core, excitation, and pick-up coil. This fluxgate sensor system consists of a sensing element, driving circuits for excitation coil and signal processing for detecting second harmonic frequency component which is proportional to the DC magnetic to be measured. The sensor core is excited by a square waveform of voltage through the excitation coil of 80 turns. The second harmonic output of pick-up coil(x and y axis: 100 turns) is measured by FFT spectrum analyzer. This result is compared with output of PSD(phase sensitive detector) unit for detecting the second harmonic component. The measured maximum sensitivity is about 1580 V/T at driving frequency of 1.5 kHz and excitation current of 2 App. The nonlinearity of this system is measured about 2.3%(PSD) and about 1%(second harmonics of the pick-up). The angle error of the system is ${\pm}2$ %/FS.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.3
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• pp.19-23
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• 2002

This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). In order to observe the effect of the closed magnetic path, the magnetic cores of rectangular-ring and two bars were each fabricated. Each fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ~100,000. Four outer layers as an excitation and pick-up coils have a planar solenoid and are made of copper foil. In case of the fluxgate sensor having the rectangular-ring shaped core, excellent linear response over the range of -100 $\mu$T to ＋ 100 $\mu$T is obtained with 540 V/Tsensitivity at excitation square wave of 3 $V_{p-p}$ and 360 KHz. The chip size of the fabricated sensing element is $7.3 \times 5.7\textrm{mm}^2$. The very low power consumption of ~8 mW was measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.n.