• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.4
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• pp.261-266
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• 1998

In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.11
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• pp.1733-1740
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• 2004

In the transverse flux linear induction motor(TFLIM) with the general secondary composed of conductor and back-yoke, there exists a magnetized force into the normal direction or the air-gap direction of the thrust motion as well as the thrust force. Therefore, the various methodologies have been tried to use the normal force by the two independent control variables of the multi-phase input. But, as the force depends inevitably and strongly on the thrust force, it is essential to decouple both forces for two control index. In this paper, we suggest a novel approach capable of compensating the couple between both forces and the control index by using the DC-biased multi-phase input, and then realizing the independent control of TFLIM.

• Journal of applied mathematics & informatics
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• v.41 no.5
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• pp.1085-1102
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• 2023

In this study the magneto hydrodynamic (MHD) micro polar fluid flow of a viscous incompressible fluid past a porous medium in the presence of chemical reaction is considered. This work is devoted to investigate the Soret effect and Electromagnetic radiation effect and analyze analytically. In the energy equation the applied magnetic field strength and in the concentration equation the Soret effect are incorporated. The basic PDE (partial differential equations) are reduced to ODE (ordinary differential equations) using non dimensional variables. Then the analytical solution of the dimensionless equations are found using perturbation technique. The features of the fluid flow parameters are analyzed, discussed and explained graphically. The graphical solutions are found using MATLAB R2019b. Skin friction coefficient at the wall, Couple stress coefficient at the plate and the local surface heat flux are also thoroughly examined. Overall, this study sheds light on the complex interplay between physical parameters in the behavior of MHD micro-polar fluid past a porous medium in the presence of chemical reaction.

• Advances in nano research
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• v.15 no.5
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• pp.485-493
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• 2023

Critical multi-field loads and free vibration responses of the sandwich piezoelectric/piezomagnetic microplate subjected to combination of magnetoelectromechanical loads based on a thickness-stretched higher order shear deformable model using Hamilton's principle. The lateral displacement is assumed summation of bending, shearing and stretching functions. The elasti core is sandwiched by a couple of piezoelectric/piezomagnetic face-sheets subjected to electromagnetocmechanical loads. The work of external force is calculated with considering the in-plane mechanical, electrical and magnetic loads based on piezomagnetoelasticity relations. The critical multi field loading and natural frequency analysis are performed to investigate influence of geometric and loading parameters on the responses. A verification is performed for justification of the numerical results.

• Journal of Korea Multimedia Society
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• v.19 no.2
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• pp.375-385
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• 2016

Recently, several implantable hearing aids such as cochlear implant, middle ear implant, etc., which have a module receiving power and signal from outside the body, are frequently used to treat the hearing impaired patients. Most of implantable hearing aids are adopted permanent magnet pairs to couple between internal and external devices for the enhancement of power transmission. Generally, the internal device which containing the magnet in the center of receiving coil is implanted under the skin of human temporal bone. In case of MRI scanning of a patient with the implantable hearing aid, however, homogeneous magnetic fields of the MRI might be interfered by the implanted magnet. For the above reasons, the MR image is degraded by large area of artifact, so that diagnostics are almost impossible in deteriorated region. In this paper, we proposed an external coil system that can reduce the artifact of MR image due to the internal coupling magnet. By finite element analysis estimating area of MR artifact according to varying current and shape of the external coil, optimal coil parameters were extracted. Finally, the effectiveness of the proposed external coil system was verified by confirming the artifact at real MRI scan.

• Steel and Composite Structures
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• v.21 no.1
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• pp.1-36
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• 2016

In the present study, the nonlinear magneto-electro-mechanical free vibration behavior of rectangular double-bonded sandwich microbeams based on the modified strain gradient theory (MSGT) is investigated. It is noted that the top and bottom sandwich microbeams are considered with boron nitride nanotube reinforced composite face sheets (BNNTRC-SB) with electrical properties and carbon nanotube reinforced composite face sheets (CNTRC-SB) with magnetic fields, respectively, and also the homogenous core is used for both sandwich beams. The connections of every sandwich beam with its surrounding medium and also between them have been carried out by considering Pasternak foundations. To take size effect into account, the MSGT is introduced into the classical Timoshenko beam theory (CT) to develop a size-dependent beam model containing three additional material length scale parameters. For the CNTRC and BNNTRC face sheets of sandwich microbeams, uniform distribution (UD) and functionally graded (FG) distribution patterns of CNTs or BNNTs in four cases FG-X, FG-O, FG-A, and FG-V are employed. It is assumed that the material properties of face sheets for both sandwich beams are varied in the thickness direction and estimated through the extended rule of mixture. On the basis of the Hamilton's principle, the size-dependent nonlinear governing differential equations of motion and associated boundary conditions are derived and then discretized by using generalized differential quadrature method (GDQM). A detailed parametric study is presented to indicate the influences of electric and magnetic fields, slenderness ratio, thickness ratio of both sandwich microbeams, thickness ratio of every sandwich microbeam, dimensionless three material length scale parameters, Winkler spring modulus and various distribution types of face sheets on the first two natural frequencies of double-bonded sandwich microbeams. Furthermore, a comparison between the various beam models on the basis of the CT, modified couple stress theory (MCST), and MSGT is performed. It is illustrated that the thickness ratio of sandwich microbeams plays an important role in the vibrational behavior of the double-bonded sandwich microstructures. Meanwhile, it is concluded that by increasing H/lm, the values of first two natural frequencies tend to decrease for all amounts of the Winkler spring modulus.

• Proceedings of the KIEE Conference
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• 2002.07b
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• pp.1361-1363
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• 2002

Micro-SMES(Superconducting Magnetic Energy Storage) has been studied as an impulsive high power supply for industrial applications. Recently, electric power reliability of our country has been improved. However, there are still remaining problems which are short-duration variations like instantaneous and momentary interruption and voltage sag by nature calamity ; typhoon, lightning, snow, etc. Besides, power quality ; harmonics, goes down because of using power electronics equipments. Malfunction of controller and stop machinery, and losing important data are caused by poor power quality at a couple of second in accuracy controllers. Due to those, battery based UPS has been used, but there are several disadvantages ; long charge and discharge time, environmental problem by acid and heavy metal, and short life time. Micro-SMES is an alternative to settle problems mentioned above. However, there need huge system apparatuses in order to verify the effect of system efficiency and stability considering the size of micro-SMES, the sort of converter type, and various conditions. This paper presents a cost effective simulation method of micro-SMES and power converter, and design for micro-SMES based system using PSCAD/EMTDC.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.7
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• pp.626-632
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• 2013

When a conductive rod is put within rotating axial magnet wheels arranged parallel, three-axial magnetic forces generate on the rod. In some region, the forces has a property of negative stiffness, thus they can be applied to noncontact conveyance of the rod without a control load. Apart from the passive driving, the magnet wheel should be controlled for the rod to be stayed at the still state or be moved in a specified velocity. But, because a control input is just the rotating speed of the magnet wheel, the number of input is less than that of variables to be controlled. It means that levitation force and thrust force increase at the same time for increasing wheel speed, resulting from a strong couple between two forces. Thus, in this paper, a novel method, in which the longitudinal motion of the rod is controlled indirectly by the normal motion of the rod with respect to the wheel center, is introduced to manipulate the rod without mechanical contact on space.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.153-158
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• 2004

The coupling phenomenon between stress and magnetic induction, known as magnetostriction, has been successfully applied to generate and measure elastic waves. Most applications of this phenomenon thus far, however, are rather limited to cylindrical ferromagnetic waveguides. The main objective of this work is to develop a new patch-type, orientation-adjustable magnetostrictive transducer that is applicable for non-cylindrical, non-ferromagnetic waveguides. The existing patch-type transducer consisting of a ferromagnetic patch and a racetrack coil is useful to generate elastic waves only in one specific direction once the patch is bonded to a test specimen. However, the proposed transducer can transmit and receive elastic waves in any direction only with one patch at a given location. The proposed magnetostrictive transducer consists of a circular nickel patch, a figure-of-eight coil, and a couple of bias permanent magnets. Because of the unique configuration of the transducer, the propagating direction of the generated waves can be freely controlled since the set of bias magnets and the coil is not bonded to the magnetostrictive patch. In this work, the characteristics of the proposed transducer were investigated experimentally.

• Proceedings of the KIEE Conference
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• 2002.04a
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• pp.228-230
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• 2002

Recently, electric power reliability of our country has been improved. However, there are still remaining problems which are short-duration variations like instantaneous and momentary interruption and voltage sag by nature calamity ; typhoon, lightning, snow, etc. Besides, power quality ; harmonics, caused by using power electronics equipments, become a hot issue Malfunction of controller and stop machinery, and losing the important data are caused by poor power quality at a couple of second. Due to those, UPS, which is made up battery, has being used, but there are several disadvantages ; long charge and discharge time, environmental problem by acid and heavy metal, and short life time. As generally know, micro-SMES is a method to settle those mentioned. However, there need huge system apparatuses in order to verify the effect of system efficiency and stability considering the size of micro-SMES, the sort of converter type, and various conditions ; inner temperature, magnetic field, quench characteristic of micro-SMES, and etc. In this paper, in order to bring the mentioned above to a settlement, a micro-SMES is modeled with characteristics of micro-SMES is interfaced to EMTOC program using Fortran program interface method. We obtained hopeful answers and made the simulation model of micro SMES.