• 한국레이저가공학회지
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• 제18권1호
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• pp.7-11
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• 2015

In this paper, micro trench structure is fabricated by femtosecond laser for inserting optical reflecting wavelength filter in planar waveguide. The width and depth of the trench is controlled by femtosecond laser machining condition. Also, large scale of single channel with 500um and 1000um on silica plate is fabricated by femtosecond laser, and roughness of the channel surface is polished by $CO_2$ laser for the insertion of the filter. Then, the characteristic of the planar waveguide inserted the filter is verified.

• Structural Engineering and Mechanics
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• 제57권1호
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• pp.141-159
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• 2016

Bearing joint dynamic parameter identification is crucial in modeling the high speed spindles for machining centers used to predict the stability and natural frequencies of high speed spindles. In this paper, a hybrid method is proposed to identify the dynamic stiffness of bearing joint for the high speed spindles. The hybrid method refers to the analytical approach and experimental method. The support stiffness of spindle shaft can be obtained by adopting receptance coupling substructure analysis method, which consists of series connected bearing and joint stiffness. The bearing stiffness is calculated based on the Hertz contact theory. According to the proposed series stiffness equation, the stiffness of bearing joint can be separated from the composite stiffness. Then, one can obtain the bearing joint stiffness fitting formulas and its variation law under different preload. An experimental set-up with variable preload spindle is developed and the experiment is provided for the validation of presented bearing joint stiffness identification method. The results show that the bearing joint significantly cuts down the support stiffness of the spindles, which can seriously affects the dynamic characteristic of the high speed spindles.

• 한국정밀공학회지
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• 제12권5호
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• pp.98-107
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• 1995

The in-process detection of drill wear and breakage is one of the most importnat technical problems in unmaned machining system. In this paper, the monitoring system is developed to monitor abnormal drilling states such as drill breakage, drill wear and unstable cutting using motor current. Drill breakage is detected by level monitoring. Tool wear is classified by fuzzy pattern recognition. The key feature for classification of tool wear is the estimated flank wear which is calculated by the proposed flank wear model. The characteristic of the model is not sensitive to the variation of cutting conditions but is sensitive to drill wear state. Unstable cutting states due to the unsmooth chip disposal and the overload are monitored by the variance/mean ratio of spindle motor current. Variance/mean ratio also includes the information about the prediction of drill wear and drill breakage. The evaluation experiments have shown that the developed system works very well.

• 한국정밀공학회지
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• 제31권7호
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• pp.635-642
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• 2014

The large volume multi-tasking vertical lathe was developed for machining the bearing parts for a wind power generator. Although the machined part is large in size high precision tolerances are required recently. One of the most important components to achieve this mission is the rotating table which holds and supports the part to be machined. The oil hydrostatic bearing is adopted for the thrust bearing and the rolling bearing for the radial bearing. In this article experimental performance evaluation and its analysis results are presented. The rotational accuracy of the table is assessed and the frequency domain analysis for the structural loop is performed. And in order to evaluate the structural characteristic of table the moment load experiment is performed. The rotational error motion is measured as below 10 ${\mu}m$ for the radial and axial direction and 22,800 Nm/arcsec of moment stiffness is achieved for the rotary table.

• 열처리공학회지
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• 제28권4호
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• pp.181-189
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• 2015

Two types of advanced cold-work tool steels were characterized and compared. A higher-alloyed ledeburitic steel with primary carbides (denoted as 9Cr) and a lower-alloyed steel without primary carbides (5Cr) were fabricated by vacuum induction melting and subsequent hot forging. They were spheroidizing-annealed at $870^{\circ}C$, quenched at $1030^{\circ}C$ and tempered at 180 or $520^{\circ}C$. Their machinability after annealing and hardness, impact toughness, wear resistance after tempering were compared and interpreted in association with their characteristic microstructures. After annealing, 5Cr showed higher resistance to machining due to higher ductility and toughness in spite of lower strength and smaller carbide volume. Owing to smaller carbide volume fraction and the absence of coarse primary carbides, 5Cr showed even better impact toughness although the hardness was lower. The improved toughness of 5Cr resulted in excellent wear resistance, while smaller volume fraction of retained austenite also contributed to it.

• 반도체디스플레이기술학회지
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• 제2권4호
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• pp.37-40
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• 2003

반도체 장비의 기능성과 신뢰성을 높이기 위하여 부품의 제조기술은 점차 마이크로 머신 기술을 요구하고 있다. 마이크로머신 기술 중 hot junction이 위치하는 멤브레인 구조는 각종 센서와 히터의 미세부품에서 가장 이용도가 큰 구조이다. 실험에서는 마이크로머신의 기본 구조인 멤브레인 형태를 만들기 위해 KOH 용액과 TMAH 용액으로 단결정 실리콘을 이방성 습식식각 하였다. 실험결과, 식각액의 온도와 농도, 마스크 패턴과 웨이퍼의 결정성의 일치 등을 고려해야 하며, 식각 속도는 KOH 농도 및 온도에 따라 크게 변함을 알 수 있었다. KOH 용액은 30 wt% 80~$90^{\circ}C$ 온도 범위에서 가장 좋은 특성을 나타냈다. 한편, TMAH용액이 실리콘을 식각하는 용액으로 관심을 끄는 것은 단결정에서 상대적으로 $SiO_2$ 박막을 마스크로 사용할 수 있을 뿐 아니라 $SiO_2$ 박막을 마스크로 사용할 수 있을 뿐 아니라 다른 식각액보다 찌꺼기가 적다는 장점 때문이다. 그러나, 다른 용액에 비해 가격이 고가이며 식각 속도가 낮다는 것이 실용적인 측면에서 큰 단점이다. 실험결과를 종합적으로 고려할 때 KOH 용액 농도 30wt%와 온도 $90^{\circ}C$가 마이크로머신 기술에 의한 멤브레인 구조 제작에서 적합한 공정조건이라고 할 수 있다.

• Design & Manufacturing
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• 제17권3호
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• pp.48-54
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• 2023

In this study, an injection mold with ultra-small surface properties was manufactured using nanosecond laser processing. A superhydrophobic characteristic analysis was performed on the PET specimen manufactured through this. To this end, a hydrophobic pattern was defined using the Cassie-Baxter model. The defined features were selected with a spot diameter of 25um and pitch spacing of 30um and 35um. As a result of the basic experiment, it was confirmed that the fine pattern shape had an aspect ratio of 1:1 when the pitch interval was 35um and 20 iterations. Through the determined processing conditions, a hydrophobic pattern was implemented on the core surface of KP4. A specimen with a hydrophobic pattern was produced through injection molding. The height of the molded hydrophobic pattern is 20 ㎛ less than the depth of the core and the contact angle measurement results are 92.1°. This is a contact angle smaller than the superhydrophobic criterion. Molding analysis was performed to analyze the cause of this, and it was analyzed that the molding was not molded due to the lack of pressure in the injection machine.

• 대한의용생체공학회:의공학회지
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• 제44권6호
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• pp.404-413
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• 2023

In this research, we studied the development of a SUS304 microneedle array based on microfabrication technology and the applicability of Parylene-C thin film, a medical polymer material. First of all, four materials commonly used in the field of medical engineering (SUS304, Ti, PMMA, and PEEK) were selected and a 5 ㎛ Parylene-C thin film was deposited. The applicability of Parylene-C coating to each material was confirmed through SEM analysis, contact angle measurement, surface roughness(Ra) measurement, and adhesion test according to ASTM standards for each specimen. Parylene-C thin film was deposited based on chemical vapor deposition (CVD), and a 5 ㎛ Parylene-C deposition process was established through trial and error. Through characteristic experiments to confirm the applicability of Parylene-C, SUS304 material, which is the easiest to apply Parylene-C coating without pretreatment was selected to develop a microneedle array based on CNC micromachining technology. The CNC micromachining process was divided into a total of 5 steps, and a microneedle array consisting of 19 needles with an inner diameter of 200 ㎛, an outer diameter of 400 ㎛, and a height of 1.4 mm was designed and manufactured. Finally, a 5 ㎛ Parylene-C coated microneedle array was developed, which presented future research directions in the field of microneedle-based drug delivery systems.