Transmission Grating Formation in High Refractive-index Amorphous Thin Films Using Focused-Ion-Beam Lithography (접속이온빔 리소그라피를 이용한 고굴절 비정질 박막 투과 격자 형성)
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- The Transactions of the Korean Institute of Electrical Engineers C
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- v.50 no.1
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- pp.6-10
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- 2001