• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.65-65
• /
• 2000

반도체 소자의 고집적화는 배선에서 많은 문제점을 야기 시킨다. 이러한 문제점들 중에서 대표적인 것이 과도한 전류밀도에 의한 electro-migration(EM)이다. 이는 앞으로 배선의 선폭이 0.25$mu extrm{m}$미만일 경우 더욱 심화될 전망이다. 이에 대안으로 Al-합금에서 Cu로 대체하여 이러한 문제를 해결하려 하고 있다. 그런데, Cu는 Si 및 SiO2와 높은 반응성과 빠른 확산속도를 가지기 때문에 확산방지막이 필요로 되어진다. 현재에는 TiN, TaN 등의 확산방지막이 사용되어지고 있으나, TiN 박막의 경우 표면에 Ti와 oxide와의 결합에 의해 Ti-O 성분이 존재하는데, 이럴 경우 Cu 증착을 하는데 있어 부정적인 요인이 된다. 또한, 이러한 화합물은 Cu와 TiN 계면사이에 밀착성을 나쁘게 하여 고전류 인가시 EM에 있어 높은 저항성을 가질 수가 없다. 따라서, 본 연구는 MOCVD방식으로 Cu 박막을 증착하기에 앞서 수소플라즈마를 이용하여 TiN 표면에 형성된 산소 화합물을 제거한 후 Cu를 증착하여 동일한 조건에서 EM 가속화 실험을 하였다. 그림 1은 Cu/TiN 구조에 있어 수소 전처리를 한 배선의 구조의 MTF(mean time to failure)가 65분이고 전처리를 하지 않은 배선구조는 40분으로 약 50% 긴 MTF를 가지는 것으로 나왔다. 결론적으로 Cu와 TiN 계면에 좋은 밀착성은 EM에 있어 우수한 저항성을 가지는 것으로 나왔다.

• Korean Journal of Optics and Photonics
• /
• v.3 no.3
• /
• pp.143-147
• /
• 1992

1)iscussed in this paper are the effects of phase modulation on the line spread functions (LSF) and MTFs of ;I binocular objective system. The binocular objective lens is made in Korea. It has rotationally symmetric aberrations. The LSFs and MTFs are measured experimentally. The phase modulation is carried out by applying phase retardation $\pi$ on the aperture. The area where the phase is not retarded presents a double annular type. The OTF curves of phase modulated aperture are compared with that of unmodulated aperture. The comparison shows that there is the aberration compensation effect in aberration loaded system. Therefore the performance of many optical system can be improved without any loss of light energy by properly modulating the phase on the aperture.

• Journal of Radiation Industry
• /
• v.17 no.4
• /
• pp.377-384
• /
• 2023

In this study, the image quality assessment, especially spatial resolution evaluation, for Sparse-view CT reconstructed images was performed. The main goal of the experiment is to evaluate Modulation Transfer Function by using American Standard Method for Measurement of Computed Tomography System Performance(ASTM E1695-95) which uses the edge test object. To compare with the ASTM method, a different method, the radial-type edge profile, to measure MTF using the edge method also performed. Both approaches were tested on the same image acquired by the stationary-gantry sparse-view CT security-screening system using cylindrical test phantom manufactured in accordance with ANSI 42.45. Both of the spatial resolutions at 10% modulation are 0.195, 0.203lp pixel^-1, respectively. The method implemented by ASTM E1695-95 showed higher reliability and had a relatively more accurate spatial resolution result than the radial-type edge profile method.

• Proceedings of the Optical Society of Korea Conference
• /
• 1995.06a
• /
• pp.59-67
• /
• 1995

부분간섭조명과 central obscuration의 Optical Transfer Function(OTF) 에의 영향을 조사해보고, 이의 programing 기법을 소개하며, 모든 3차 수차와 5차 구면수차가 제거된 5반사광학계에 적용하여 축소배율(M = +1/5)을 갖는 리소그래피용 광학계로서의 가능성을 알아보았다. 이렇게 하여 얻어진 광학계 central obscuration이 약 31%이고 과월을 ArF excimer 레이저( 파장 0.193$\mu$m) 로 하는 nearly inchorent illumination($\sigma$ = 1.0)인 경우 NA가 0.45이며 분해능이 50% MTF 기준치와 초점심도 0.8$\mu$m에 대해 약 600cycles/mm 정도인 성능을 갖는 시스템이 되었다.

• Journal of Periodontal and Implant Science
• /
• v.36 no.2
• /
• pp.449-459
• /
• 2006

DFDBA(Decalcified freeze-dried bone allograft) is one of the allograft materials for periodontal bone regeneration. DFDBA provides an osteoconductive surface and osteoinductive factors. Therefore, DFDBA have been used successfully to regenerate the attachment apparatus during periodontal treatment. But recent studies was reported that wide variations in commercial bone bank preparations of DFDBA do exist, including the ability to induce new bone formation. DFDBA was experimental materials that was recovered, processed, tested, shipped and invoiced through Musculoskeletal Transplant Foundation. MTF(Musculoskeletal Transplant Foundation) is the world largest, non-profit, AATB(American Association of Tissue Banks) accredited tissue bank. The objective of this study was to determine the effects of serial dilutions of a DFDBA on human fetal osteoblastic cell proliferation and their potential to form and mineralize bone nodules. Human fetal osteoblastic cell line(hFOB 1.19) was cultured with DMEM and SSE($1{\mu}g/m{\ell}$,$10{\mu}g/m{\ell}$, $100{\mu}g/m{\ell}$, $1mg/m{\ell}$) at $34^{\circ}C$ with 5% CO2 in 100% humidity. Cell proliferation was significantly increased at $1mg/m{\ell}$, $100{\mu}g$, $10{\mu}g/m{\ell}$, $1{\mu}g/m{\ell}$, $100ng/m{\ell}$, $10ng/m{\ell}$, $1ng/m{\ell}$ of DFDBA after 5 days incubation (p<0.05). Alkaline Phosphatase(ALP) level was significantly increased in $100ng/m{\ell}$, $10ng/m{\ell}$, $1ng/m{\ell}$ of DFDABA(p<0.05). A quantified calcium accumulation was significantly increased at $1ng/m{\ell}$, $10ng/m{\ell}$ of MTF(p<0.05). These results indicated that DFDBA has an inductive effect on bone formation in vitro.

• Journal of radiological science and technology
• /
• v.42 no.5
• /
• pp.329-334
• /
• 2019

This study was purpose to quantitative evaluation of noise power spectrum(NPS) and studied the quantitative evaluation and characteristics of modulation transfer function(MTF) by obtain the optimal edge image by using Coil in magnetic resonance imaging(MRI) equipment through Fujita theory using edge method. The MRI equipment was used (Tim AVANTO 1.5T, Siemense healthcare system, Germany) and the head matrix coil were 12channels(elements) receive coil. The NPS results of showed the best value of 0.004 based on the T2 Nyquist frequency of $1.0mm^{-1}$, and the MTF results of showed that the T1 and T2 values were generally better than the T1 CE and T1 CE FC values. The characteristics of this study were to explain the characteristic method of image quality evaluation in general. To present the quantitative evaluation process and results in the evaluation of MRI image characteristics in radiology.

• Journal of Korean Ophthalmic Optics Society
• /
• v.17 no.4
• /
• pp.441-447
• /
• 2012

Purpose: This paper is about development and design of the 1x optical path relay adapter for the beam splitting prism by us the day & night scope. Methods: To product the day & night scope by using the beam splitting prism and the commercial zoom optical system with the C-mount lens barrel structure, the optical path relay adapter, which doesn't change the image size of the zoom optical system and can stretch the position of the image-forming surface, is needed. We could design the 1x optical path relay adapter by using the CodeV program in which the Lens Module mode is offered. Results: We could design the optical path relay adapter used in the day&night scope with the beam splitting prism, of which characteristics have the EFL of -56.0 mm, the magnification of +1.0x, the distance from the 1st lens surface to the last lens surface of about 20.4 mm. The resolution of this system is characterized by 30 lp/mm at 40% MTF. This is enough to accommodate the designed optical path relay adapter can overcome the resolution of the 3rd generation of image intesifier tubes. Conclusions: By designing and applying the optical path relay adapter of which optical characteristics have the EFL of -56.0 mm, the magnification of +1.0x, the distance from the 1st lens surface to the last lens surface of about 20.4 mm, and the resolution of 30 lp/mm at 40% MTF, we could develop the new type day&night scope consisting of the beam splitting, the commercial zoom optical system with the C-mount lens barrel structure, and the 3rd generation of image intesifier tubes.

• Proceedings of the Optical Society of Korea Conference
• /
• 2006.07a
• /
• pp.197-198
• /
• 2006

본 연구에서 개발하는 성형렌즈는 그림1과 같이 한쪽 면이 비구면인 평볼록 형상이다. Glass렌즈의 고온압축성형을 위해서는 초정밀 가공기술로 제작된 성형Mold가 필요하며, Mold재질에 따른 성형기술의 확립이 필수적이다. 또한, 성형Mold의 표면과 융착반응이 없는 Glass소재가 요구된다. 본 실험을 위한 성형Mold는 코발트(Co) 함량 0.5 %의 초경합금(WC; 일본, Everloy社, 002K)을 초정밀 연삭가공하여 제작하였다. Glass소재는 전이점(Transformation Point; Tg) $572\;^{\circ}C$,항복점(Yielding Point; At) $630\;^{\circ}C$의 열적 특성을 갖는 K-BK7(일본, Sumita社)을 사용하였으며, d선에서 굴절률 및 아베수는 각각 1.51633, 64.1이다. 비구면 Glass렌즈 성형은 GMP(Glass Molding Press; 일본, Sumitomo社, Nano Press-S)장비를 사용하여 성형온도 $625\;^{\circ}C$, 서냉온도 $550\;^{\circ}C$로 고정하고 성형압력를 200-800 N 범위에서 변화시켰다. 표 1에 성형변수로 사용한 서냉속도와 서냉전환온도 조건을 나타낸다. 표1과 같이 각 서냉조건별로5장의 렌즈를 성형 후 특성값이 평균치에 가까운 3장을 선별하여 그 특성을 비교하였다. 각 조건에 따른 성형렌즈의 형상정도(일본, Panasonic社, UA3P, 자유곡면형상측정기), 두께(일본, Mitutoyo社, MDC-25M, 마이크로메터), 굴절률(일본, Shimatus社, KPR-200, 정밀굴절률측정기) 및 MTF[해상도](독일, Trioptics社, Image Master HR, MTF-Field)를 측정하여 각각의 광학적 특성을 비교 평가하였다. 비구면 Glass렌즈 성형장비와 형상측정기를 그림 2, 3에 각각 나타낸다.

• Journal of the Korean Society of Radiology
• /
• v.9 no.3
• /
• pp.175-181
• /
• 2015

In this paper, we studied additional filter and Ion chamber combinations to reduce patient dose without decreasing image quality in digital chest x-ray projection. The experiment set 125 kVp, 320 mA, AEC mode. Ion chamber sensors was divided by 4 cases of combinations, then, we measured patient dose and calculated organ dose using PCXMC. Also, physical image assessment using MTF was performed. As a results, The surface entrance dose and organ dose were the lowest when selecting both left and right Ion chamber sensors under the same conditions of additional filter. In image quality assessment, The spatial frequency scored 2.494 lp/mm which was highest when selecting both right and left Ion-chambers and 0.1 mmCu filter. And to conclude, to select both right and left Ion chamber sensors and 0.1 mmCu filter will help for acquiring good quality image as well as reducing patient dose.

• Korean Journal of Optics and Photonics
• /
• v.6 no.1
• /
• pp.8-15
• /
• 1995

복사기. 팩스 렌즈 등 대향생산되는 광학계를 실시간에 성능평가하기 위하여 5개의 십자형 슬릿 물체와 3개의 2차원 CCD를 상분석장치로 사용한 자동평가장치를 개발하였다. 시험렌즈의 사양에 따라 물체와 렌즈, 그리고 상분석장치를 이동시키는 자동정렬장치를 제작하였으며 슬릿의 수직 및 수평방향 선분포 함수를 CCD에 의햐여 동시에 측정하였다. 그리고 렌즈의 축상 및 비축상 MTF와 배율, 편심, 그리고 회전위치에 따른 최적방향 등을 자동으로 실시간에 측정할 수 있었다.