• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2606-2611
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• 2003

Comprehensive study on the control system design for a RTP process has been conducted. The purpose of the control system is to maintain maximum temperature uniformity across the silicon wafer achieving precise tracking for various reference trajectories. The study has been carried out in two stages: thermal balance modeling on the basis of a semi-empirical radiation model, and optimal iterative learning controller design on the basis of a linear state space model. First, we found through steady state radiation modeling that the fourth power of wafer temperatures, lamp powers, and the fourth power of chamber wall temperature are related by an emissivity-independent linear equation. Next, for control of the MIMO system, a state space modeland LQG-based two-stage batch control technique was derived and employed to reduce the heavy computational demand in the original two-stage batch control technique. By accommodating the first result, a linear state space model for the controller design was identified between the lamp powers and the fourth power of wafer temperatures as inputs and outputs, respectively. The control system was applied to an experimental RTP equipment. As a consequence, great uniformity improvement could be attained over the entire time horizon compared to the original multi-loop PID control. In addition, controller implementation was standardized and facilitated by completely eliminating the tedious and lengthy control tuning trial.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.10a
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• pp.83-86
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• 2007

In the blind Maximum-likelihood (ML) detection for Orthogonal Space-Time Block Codes (OSTBC), the problem of ambiguity in determining the symbols has been a great concern. A solution to this problem is to apply semi-blind ML detection, i.e., the blind ML decoding with pilot symbols or training sequence. In order to increase the performance, the number of pilot symbols or length of training sequence should be increased. Unfortunately, this leads to a significant decrease in system spectral efficiency. This work presents an approach to resolve the aforementioned issue by introducing a new method for constructing transmitted information symbol. Thus, by transmitting information symbols drawn from different modulation constellation, the ambiguity can be easily eliminated in blind detection. Also, computer simulations are implemented to verify the performance of the proposed approach.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.287-292
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• 2005

This paper presents a rational polynomial approximation method to estimate modal parameters of wind excited structures using incomplete noisy measurements of structural responses and partial measurements of wind velocities only. A stochastic model of the excitation wind force acting on the structure is estimated from partial measurements of wind velocities. Then the transfer functions of the structure are approximated as rational polynomial functions. From the poles and zeros of the estimated rational polynomial functions, the modal parameters, such as natural frequencies, damping ratios, and mode shapes are extracted. Since the frequency characteristics of wind forces acting on structures can be assumed as a smooth Gaussian process especially around the natural frequencies of the structures according to the central limit theorem (Brillinger, 1969; Yaglom, 1987), the estimated modal parameters are robust and reliable with respect to the assumed stochastic input models. To verify the proposed method, the modal parameters of a TV transmission tower excited by gust wind are estimated. Comparison study with the results of other researchers shows the efficacy of the suggested method.