• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.178-183
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• 2001

Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.40 no.5
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• pp.20-26
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• 2008

Behavior of micro stickies was analyzed using model micro stickies prepared with PVAc emulsion adhesive. Flocculation of micro stickies increased with temperature. Acidic state also induced greater flocculation of micro stickies since they became more unstable under these conditions. Flocculation of micro stickies increased as calcium ion concentration increased. But the presence of calcium carbonates made micro stickies dispersed indicating that calcium carbonates cause two different effects on the behavior of micro stickies. Talc increased flocculation of micro stickies because of its hydrophobic nature. Cationic polymer increased flocculation of micro stickies. Especially cationic starch has far greater effect in flocculating sticky particles by forming bridging flocculations.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.158-163
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• 2001

Operators suffer much difficulty in manipulating micro/nano-sized objects without the assistance of human interfaces, due to the scaling effects in micro/nano world. This paper presents a micro manipulation system based on the teleoperation techniques which enables the operators to manipulate the objects with ease by transferring both human motion and manipulation skill to a micromanipulator. An experimental setup consisting of a micromanipulator operated under stereo-microscope with the help of intelligent user interface provides a tool that can be used to visualize and manipulate micro-sized 3D objects in a controlled manner. The key features of a micro manipulation system and control strategies using teleoperation techniques for handling micro objects are presented. Experimental results demonstrate the feasibility of this system in precisely controlling trapping and manipulation of micro objects based on teleoperation techniques.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1280-1285
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• 2004

Microsystem technology has been applied to space technology and became one of the enabling technology by which low cost and high efficiency are achievable. Micro propulsion system is a key technology in the miniature satellite because micro satellite requires very small and precise thrust force for maneuvering and attitude control. In this paper research on micro solid propellant thruster is reported. Micro solid propellant thruster has four basic components; micro combustion chamber, micro nozzle, solid propellant and micro igniter. In this research igniter, solid propellant and combustion chamber are focused. Micro igniter was fabricated through typical micromachining and evaluated. The characteristic of solid propellant was investigated to observe burning characteristic and to obtain burning velocity. Change of thrust force and the amount of energy loss following scale down at micro combustion chamber were estimated by numerical simulation based on empirical data and through the calculation normalized specific impulses were compared to figure out the efficiency of combustion chamber.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.370-375
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• 2002

Recently, the interest on micro optical parts has increased rapidly with the development of technology related to microsystems. Among the optical parts, micro lens is one of the most broadly used micro parts. To mass-produce the micro lenses, it is very effective to use the mold insert and injection molding process. There are many methods to fabricate the mold insert for micro lenses: electroforming, etching, mechanical micromachining and so on. In this study, we fabricated the mold insert for micro lenses using a micro ball endmill to apply mechanical micromaching method and analyzed the effect of main process parameters such as spindle speed, feed rate, dwell time on the processed surface. Then, using fabricated the mold insert we fabricated the micro lenses through injection molding process.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.182-187
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• 2004

As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need fur additional assembly or bonding processes. Using the developed process, several examples were fabricated.

• Journal of the Korean Society of Propulsion Engineers
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• v.16 no.5
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• pp.74-80
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• 2012

Past few years have seen the growing importance of micro shock tubes in various engineering applications like micro combution, micro propulsion, particle delivery systems. But in order to efficiently apply Micro Shock Tube to such areas require the detailed knowledge of shock characteristics and flow field inside a micro shock tube. Due to many factors such as boundary layer, low Reynolds number and high Knudsen number shock propagation inside micro shock tubes will be quite different from that of the well established macro shock tubes. In the present study, experimental studies were carried out on micro shock tubes of two diameters to investigate flow characteristics and shock propagation. Pressure values were measured at different locations inside the driven section. From the experimental values other parameters like shock velocity, shock strength were found and shock wave diagram was constructed.

• Journal of the Korean Society of Propulsion Engineers
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• v.17 no.3
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• pp.37-46
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• 2013

Recent years have witnessed the use of micro shock tube in various engineering applications like micro combustion, micro propulsion, particle delivery systems etc. The flow characteristics occurring in the micro shock tube shows a considerable deviation from that of well established conventional macro shock tube due to very low Reynolds number and high Knudsen number effects. Also the diaphragm rupture process, which is considered to be instantaneous process in many of the conventional shock tubes, will be crucial for micro shock tubes in determining the near diaphragm flow field and shock formation. In the present study, an axi-symmetric CFD method has been applied to simulate the micro shock tube, with Maxwell's slip velocity and temperature jump boundary conditions. The effects of finite diaphragm rupture process on the flow field and the shock formation was investigated, in detail. The results show that the shock strength attenuates rapidly as it propagates through micro shock tubes.

• Design & Manufacturing
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• v.13 no.1
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• pp.5-12
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• 2019

In this paper, we studied the micro tool deflection, micro cutting with low temperature, and deformation of micro ribs caused by cutting forces. First, we performed an integrated machining error compensation method based on captured images of tool deflection shapes in micro cutting process. In micro cutting process, micro tool deflection generates very serious problems in contrast to macro tool deflection. To get the real images of micro tool deflection, it is possible to estimate tool deflection in cutting conditions modeled and to compensate for machining errors using an iterative algorithm correcting tool path. Second, in macro cutting fields, the cryogenic cutting process has been applied to cut the refractory metal but, the serious problem may be generated in micro cutting fields by the cryogenic environment. However, if the proper low temperature is applied to micro cutting area, the cooling effect of cutting heat is expected. Such effect can make the reduction of tool wear and burr formation. For verifying this passibility, the micro cutting experiment at low temperature was performed and SEM images were analyzed. Third, the micro pattern was deformed by the cutting forces and the shape error occurred in the sidewall multi-step cutting process were minimized. As the results, the relationship between the cutting conditions and the deformation of micro-structure during micro cutting process was investigated.