• 대한전자공학회논문지SD
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• 제43권2호
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• pp.1-7
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• 2006

본 연구는 MEMS 정전발전기(MEMS Electrostatic Power Generator)를 개발하기 위한 선행연구로 정전발전기를 통해 발생시킨 고전압의 정전기를 동전기로 바꾸는 변환소자를 제안하고 이를 시뮬레이션 툴을 이용하여 설계 및 시뮬레이션하였으며, 결과를 바탕으로 소자를 제작하여 기초적인 검증을 실시하였다. 시뮬레이션과 제작된 소자를 이용한 기초실험 결과 전압을 gate에 인가할 때 제작소자인 PM형 다이오드의 공핍층내 전계에 의해 효과적으로 anode 전류가 형성됨을 확인하였으며, 정전하를 gate에 인가할 때에도 유사한 결과가 나을 것으로 기대된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.219-219
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• 2008

Energy harvesting from the environment has been of great interest as a standalone power source of wireless sensor nodes for ubiquitous sensor networks (USN). There are several power generating methods such as thermal gradients, solar cell, energy produced by human action, mechanical vibration energy, and so on. Most of all, mechanical vibration is easily accessible and has no limitation of weather and environment of outdoor or indoor. In particular, the piezoelectric energy harvesting from ambient vibration sources has attracted attention because it has a relative high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system hassome drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure. In this case, the energy harvester has a lower natural frequency under 200 Hz than a normal cantilever structure. Moreover, it has higher an energy conversion efficient because shear mode ($d_{15}$) is much larger than 33 mode ($d_{33}$) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate as a standalone power generator for USN.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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• pp.7-7
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• 2010

Energy harvesting from the environment has been of great interest as a standalone power source of wireless sensor nodes for Ubiquitous Sensor Networks(USN). In particular, the piezoelectric energy harvesting from ambient vibration sources has intensively researched because it has a relatively high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system has some drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure as shown in the figure. The natural frequency of a cantilever could be decreased to the usable frequency region (under 300 Hz) because the natural frequency depends on the length of a cantilever. In this study, the natural frequency of the energy harvester was a lower than a normal cantilever structure and sufficiently controllable in 50 - 200 Hz frequency region as adjusting weight of a proof mass. Moreover, the MEMS energy harvester had a high energy conversion efficiency using a shear mode ($d_{15}$) is much larger than a 33 mode ($d_{33}$) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate for a standalone power generator for USN.

• 한국태양에너지학회 논문집
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• 제33권3호
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• pp.91-98
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• 2013

In this study, we have carried out development and performance evaluation of optimized MEMS(Multi-Effect-Multi-Stage) fresh water generator with $7m^2/day$ for solar thermal desalination system. The developed MEMS was composed of high temperature part and low temperature part. This arrangement has the advantage of increasing the availability of solar thermal energy. The MEMS consists of 2 steam generators, 5 evaporators, and 1 condenser. Tubes of heat exchanger used for steam generators, evaporators and condenser were manufactured by corrugated tubes. The performance of the MEMS was tested through in-door experiments, using an electric heater as heat source. The experimental conditions for each parameters were $20^{\circ}C$ for sea water inlet temperature to condenser, $8.16m^2$ /hour sea water inlet volume flow rate, $70^{\circ}C$ for hot water inlet temperature to generator of high temperature part, 3.6 4.8, 6.0 $m^2/hour$ for hot water inlet volume flow rate. As a result, The developed MEMS was required about 85 kW heating source to produce $7m^2/day$ of fresh water. It was analyzed that the performance ratio of MEMS was about 2.6.

• 한국유체기계학회 논문집
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• 제19권1호
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• pp.24-30
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• 2016

In this study, a 2W micro-gas turbine engine was designed using micro-electro-mechanical systems (MEMS) technology, and experimental investigations of its potential under actual combustion conditions were performed. A micro-gas turbine (MGT) contains a turbo-charger, combustor, and generator. Compressor and turbine blades, and generator coil were manufactured using MEMS technology. The shaft was supported by a precision computer numerical control (CNC) machined static air bearing, and a permanent magnet was attached to the end of the shaft for generation. A heat transfer analysis found that the cooling effect of the air bearing and compressor was sufficient to cover the combustor's high temperature, which was verified in an actual experiment. The generator performance test showed that it can generate 2W at design rotational speed. Prototype micro-gas turbine generated maximum 1 mW electric power and lasted up to 15 minutes.

• 마이크로전자및패키징학회지
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• 제13권3호
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• pp.9-12
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• 2006

전기도금 방법으로 유리기판 위에 제작한 코일과 영구자석을 이용하여 초소형발전기를 제작하였다. 여러 크기의 코일 구조를 설계한 마스크를 제작하고, 이를 이용하여 MEMS 코일을 제작하였다. 그 중 두께가 $7{\mu}m$ 선폭이 $20{\mu}m$ 길이가 1.6 m인 코일을 선택하여 실험하였다. 광학현미경과 SEM을 사용하여 제작된 코일의 구조를 분석하였다. 또한 모터의 회전운동을 진동운동과 유사한 선형운동으로 변환하는 진동발생시스템을 제작하였고, 자석과 코일을 진동발생장치에 설치하고 진동을 발생시키면 교류 전압이 발생한다. 0.5Hz에서 8Hz까지 진동주파수를 변화시켜 특성을 측정하였다. 발생된 전압은 3Hz에서 106mV가 발생하였고, 6Hz에서 198mV가 발생하였다. 본 연구의 목적은 쓸모없이 버려지는 진동에너지를 유용한 전기에너지로 변환하는 초소형발전기 소자를 제작하는 것이다.

• 대한기계학회논문집B
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• 제39권2호
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• pp.153-159
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• 2015

본 연구에서는 MEMS기술을 적용한 2W급 초소형 가스터빈엔진의 개발과 실제 연소 환경에서의 발전 가능성을 해석적, 실험적으로 입증하였다. 초소형 가스터빈엔진은 터보차저, 연소기, 발전기로 이루어져 있다. 터보차저는 각각 직경 10mm와 9mm의 MEMS 공정 압축기와 터빈으로 구성되어 있으며 발전코일 또한 MEMS공정으로 설계되었다. 제작된 압축기와 터빈은 정밀 기계 가공된 축과 공기 베어링으로 지지되고 회전하며, 회전축 끝단에 영구자석을 설치하여 발전을 하게 된다. 공기 베어링과 압축기를 통한 냉각 효과를 해석하여 연소기에서 발생한 열을 충분히 차단할 수 있는 것으로 분석되었고, 이를 실험을 통해 검증하였다.

• 전기전자학회논문지
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• 제19권1호
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• pp.80-86
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• 2015

There are many studies and products using a test paper impregnated with chemical solution can react with ozone. The color of a test paper can indicate the concentration of ozone. The purpose of this research is to design and manufacture a system using ultraviolet light source to measure the ozone density. This new technique is based on the characteristic of decomposition from ozone into oxygen under ultraviolet light. We used two sources of ultraviolet light including UV lamp and UVLED to determine the decomposition of ozone. This system is built with the electronic components, sensors and sealed pump tube to measure the ozone density in units of $g/cm^3$,ppm,ppb. In this paper,, we present some initial results of measuring the ozone density from ozone generator after completing inspection for safety.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.439-439
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• 2009

Nowadays, source of MEMS, USN, Hybrid parts pay attention to energy harvesting. On this paper, energy harvesting was studied using piezoelectric effect. And, piezoelectric generator was designed and fabricated. Generators were designed by FEM simulation program and generators were made by attaching cymbal type metal plates on upper and bottom sides of a disc type piezoelectric ceramic. Output AC power was rectified to DC power by full bridge circuit and converted to regular voltage power by DC-DC converter. The final output power was charged to Ni-Cd battery. Using fabricated generators, output voltages dependant on thickness of ceramic, displacement of vibration, frequency of vibration were measured.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1456-1457
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• 2008

본 논문에서는 박막 PZT(Pb(Zr,Ti)O3)를 이용한 d33모드의 자가 발전 소자를 설계 및 제작 하였다. 자가 발전 소자는 진동 에너지를 압전 현상을 통해 전기 에너지로 변환하는 소자로서, 제안한 구조는 단일 외팔보가 아닌 20개 이상의 외팔보를 원형으로 집적한 구조를 갖기 때문에, 기존의 단일 외팔보 위주의 자가발전 소자보다 출력 전력이 우수하다. 자가 발전 소자의 성능 최적화를 위해 유한요소기법(FEM)을 통해 기계적 특성을 분석하였으며, 마이크로 머시닝 기법을 이용하여 초박형의 자가 발전 소자를 제작할 수 있었다. 제작된 자가발전 소자는 $1.2mm\times1.2mm\times0.5mm$ (높이)의 크기를 갖는다.