• Title/Summary/Keyword: MEMS fluid flows

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Development of Wall Slip Models for Rarefied Gas and MEMS Thermal Fluid Flows (희박기체 및 MEMS 열유동장 해석을 위한 벽면 슬립모델 개발)

  • Myong, Rho-Shin;Cho, Soo-Yong
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.30 no.7
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    • pp.90-97
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    • 2002
  • Wall slip models are essential to the study of nonequilibrium gas transport in rarefied and microscale condition that can be found in gas flows associated with aerospace vehicle, propulsion system, and MEMS. The Maxwell slip model has been used for this type of problem, but it has difficulty in defining the so-called accommodation coefficient and has not been very effective in numerical implementation. In the present study, on the basis of Langmuir's theory of the adsorption of gases on metals, a physical slip model is developed. The concept of the accommodation coefficient and the difference of gas particles are clearly explained in the new model. It turned out that the Langmuir model recovers the Maxwell model in the first-order approximation. The new models are also applied to various situations including internal flow in a microchannel. Issues of validation of models are treated by comparing analytic results with experiment.

A Simulation Study on Fluid Flowing in Micro Pump (Simulation을 통한 미세 PUMP 내에서의 유체흐름 연구)

  • 김용천;김미진;김진명;김진현;류근걸
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.3 no.4
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    • pp.233-239
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    • 2002
  • The technology of joining BT (Biotechnology) with NT (Nanotechnology) must be rapidly arranged in 21c. Specially, the technical value is important more and more since the research about MEMS, which synthesizes BT and NT, is variously proceeding on the wide fields. This study by simulation shows the Fluid-Flow within micro Pump used in Bio-MEMS technology through Fluent Program. Namely, this experiment shows the most suitable external conditions and Pump Model within micro Pump by observing the flow of fluids as to the conditions of pressure, temperature and Model when the Fluid flows within micro Pump. We saw the variousness of pressure and temperature as to the existence of Chamber through examining by reference of Fluid-Flow. In the case of the existence of Chamber, the variousness of pressure and temperature is less than in the case of the non-existence of Chamber. By this simulation, we know that the Pump, which has a Chamber, affects the Fluid-Flow less than that. So we can say that it is necessary for us to design the Pump which has a Chamber.

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Numerical Analysis of Microchannel Flows Using Langmuir Slip Model (Langmuir 미끄럼 모형을 사용한 미소채널 유동의 수치해석)

  • Maeng, Ju-Seong;Choe, Hyeong-Il;Lee, Dong-Hyeong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.4
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    • pp.587-593
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    • 2002
  • The present research proposes a pressure based approach along with Langmuir slip condition for predicting microscale fluid flows. Using this method, gaseous slip flows in 2 -dimensional microchannels are numerically investigated. Compared to the DSMC simulation, statistical errors could be avoided and computing time is much less than that of the aforementioned molecular approach. Maxwell slip boundary condition is also studied in this research. These two slip conditions give similar results except for the pressure nonlinearity at high Knudsen number regime. However, Langmuir slip condition seems to be more promising because this does not need to calculate the streamwise velocity gradient accurately and to calibrate the empirical accommodation coefficient. The simulation results show that the proposed method using Langmuir slip condition is an effective tool for predicting compressibility and rarefaction in microscale slip flows.

Numerical Visualization of Supersonic Microjet Flows (초음속 마이크로제트 유동의 수치해석적 가시화)

  • Shin, Choon-Sik;Lee, Jong-Sung;Kim, Heuy-Dong
    • Journal of the Korean Society of Visualization
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    • v.7 no.2
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    • pp.35-41
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    • 2010
  • Supersonic microjets acquire considerable research interest from a fundamental fluid dynamics perspective, in part because the combination of highly compressible flow at low-to-moderate Reynolds number is not very common, and in part due to the complex nature of the flow itself. In addition, microjets have a great variety engineering applications such as micro-propulsion, MEMS(Micro-Electro Mechanical Systems) components, microjet actuators and fine particle deposition and removal. Numerical simulations have been carried out at moderate nozzle pressure ratios and for different nozzle exit diameters to investigate and to understand in-depth of aerodynamic characteristics of supersonic microjets.

Study of Micro-channel Filling Flow Including Surface Tension Effects (표면 장력 효과를 고려한 마이크로 채널 충전과정 연구)

  • Kim, Dong-Sung;Lee, Kwang-Cheol;Kwon, Tai-Hun;Lee, Seung-S.
    • Proceedings of the KSME Conference
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    • 2001.06c
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    • pp.47-52
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    • 2001
  • Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in. micro-system industries, in particular the bioapplication industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, both experimental and numerical studies have been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness were fabricated and a flow visualization system was also developed to observe the filling flow into the micro-channels. Experimental flow observations were extensively made to find the effects of channel width and thickness, and effects of surface tension and volume flow rate and so on. And a numerical analysis system has been developed to simulate the filling flow into micro-channels with the surface tension effect taken into account. Discussed are the flow visualization experimental observations along with the predictability of the numerical analysis system.

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Flow Phenomena in Micro-Channel Filling Process (I) - Flow Visualization Experiment - (마이크로 채널 충전 과정의 유동 현상(I) - 유동 가시화 실험 -)

  • Kim, Dong-Sung;Lee, Kwang-Cheol;Kwon, Tai-Hun;Lee, Seung-S.
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.10
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    • pp.1982-1988
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    • 2002
  • Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part 1, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um,30um and 2011m) were fabricated using SU-8 on silicon wafer substrate. And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships A dimensionless parameters are obtained.