• Title/Summary/Keyword: MEMS device

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Integrated cable vibration control system using Arduino

  • Jeong, Seunghoo;Lee, Junhwa;Cho, Soojin;Sim, Sung-Han
    • Smart Structures and Systems
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    • v.23 no.6
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    • pp.695-702
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    • 2019
  • The number of cable-stayed bridges has been increasing worldwide, causing issues in maintaining the structural safety and integrity of bridges. The stay cable, one of the most critical members in cable-stayed bridges, is vulnerable to wind-induced vibrations owing to its inherent low damping capacity. Thus, vibration mitigation of stay cables has been an important issue both in academia and practice. While a semi-active control scheme shows effective vibration reduction compared to a passive control scheme, real-world applications are quite limited because it requires complicated equipment, including for data acquisition, and power supply. This study aims to develop an Arduino-based integrated cable vibration control system implementing a semi-active control algorithm. The integrated control system is built on the low-cost, low-power Arduino platform, embedding a semi-active control algorithm. A MEMS accelerometer is installed in the platform to conduct a state feedback for the semi-active control. The Linear Quadratic Gaussian control is applied to estimate a cable state and obtain a control gain, and the clipped optimal algorithm is implemented to control the damping device. This study selects the magnetorheological damper as a semi-active damping device, controlled by the proposed control system. The developed integrated system is applied to a laboratory size cable with a series of experimental studies for identifying the effect of the system on cable vibration reduction. The semi-active control embedded in the integrated system is compared with free and passive mode cases and is shown to reduce the vibration of stay-cables effectively.

Design and Simulation Study on Three-terminal Graphene-based NEMS Switching Device (그래핀 기반 3단자 NEMS 스위칭 소자 설계 및 동작 시뮬레이션 연구)

  • Kwon, Oh-Kuen;Kang, Jeong Won;Lee, Gyoo-Yeong
    • Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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    • v.8 no.6
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    • pp.939-946
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    • 2018
  • In this work, we present simple schematics for a three-terminal graphene-based nanoelectromechanical switch with the vertical electrode, and we investigated their operational dynamics via classical molecular dynamics simulations. The main structure is both the vertical pin electrode grown in the center of the square hole and the graphene covering on the hole. The potential difference between the bottom gate of the hole and the graphene of the top cover is applied to deflect the graphene. By performing classical molecular dynamic simulations, we investigate the nanoelectromechanical properties of a three-terminal graphene-based nanoelectromechanical switch with vertical pin electrode, which can be switched by the externally applied force. The elastostatic energy of the deflected graphene is also very important factor to analyze the three-terminal graphene-based nanoelectromechanical switch. This simulation work explicitly demonstrated that such devices are applicable to nanoscale sensors and quantum computing, as well as ultra-fast-response switching devices.

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

  • Okuyama, Masanori;Yamashita, Kaoru;Noda, Minoru;Sohgawa, Masayuki;Kanashima, Takeshi;Noma, Haruo
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.5
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    • pp.215-220
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    • 2012
  • Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

Measurements of pedestrian's ioad using smartphones

  • Pan, Ziye;Chen, Jun
    • Structural Engineering and Mechanics
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    • v.63 no.6
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    • pp.771-777
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    • 2017
  • The applications of smartphones or other portable smart devices have dramatically changed people's lifestyle. Researchers have been investigating useage of smartphones for structural health monitoring, earthquake monitoring, vibration measurement and human posture recognition. Their results indicate a great potential of smartphones for measuring pedestrian-induced loads like walking, jumping and bouncing. Smartphone can catch the device's motion trail, which provides with a new method for pedestrain load measurement. Therefore, this study carried out a series of experiments to verify the application of the smartphone for measuring human-induced load. Shaking table tests were first conducted in order to compare the smartphones' measurements with the real input signals in both time and frequency domains. It is found that selected smartphones have a satisfied accuracy when measuring harmonic signals of low frequencies. Then, motion capture technology in conjunction with force plates were adopted in the second-stage experiment. The smartphone is used to record the acceleration of center-of-mass of a person. The human-induced loads are then reconstructed by a biomechanical model. Experimental results demonstrate that the loads measured by smartphone are good for bouncing and jumping, and reasonable for walking.

Micromachining of the Si Wafer Surface Using Femtoseocond Laser Pulses (펨토초 레이저를 이용한 실리콘 웨이퍼 표면 미세가공 특성)

  • Kim, Jae-Gu;Chang, Won-Seok;Cho, Sung-Hak;Whang, Kyung-Hyun;Na, Suck-Joo
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.12 s.177
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    • pp.184-189
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    • 2005
  • An experimental study of the femtosecond laser machining of Si materials was carried out. Direct laser machining of the materials for the feature size of a few micron scale has the advantage of low cost and simple process comparing to the semiconductor process, E-beam lithography, ECM and other machining process. Further, the femtosecond laser is the better tool to machine the micro parts due to its characteristics of minimizing the heat affected zone(HAZ). As a result of line cutting of Si, the optimal condition had the region of the effective energy of 2mJ/mm-2.5mJ/mm with the power of 0.5mW-1.5mW. The polarization effects of the incident beam existed in the machining qualities, therefore the sample motion should be perpendicular to the projection of the electric vector. We also observed the periodic ripple patterns which come out in condition of the pulse overlap with the threshold energy. Finally, we could machined the groove with the linewidth of below $2{\mu}m$ for the application of MEMS device repairing, scribing and arbitrary patterning.

Machining of The Micro Nozzle Using Focused Ion Beam (집속이온빔을 이용한 마이크로 노즐의 제작)

  • Kim G.H.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1194-1197
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    • 2005
  • Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

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A Study on the Sliding Ball Joint of Parallel Kinematic Mechanism (병렬 운동 기구의 미끄럼 볼 조인트 개발에 관한 연구)

  • Yoo, Dae-Won;Lee, Jai-Hak
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.9
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    • pp.982-989
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    • 2009
  • Parallel Kinematic Mechanism (PKM) is a device to perform the various motion in three-dimensional space and it calls for six degree of freedom. For example, Parallel Kinematic Mechanism is applied to machine tools, medical equipments, MEMS, virtual reality devices and flight motion simulators. Recently, many companies have tried to develop new Parallel Kinematic Mechanism in order to improve the cycle time and the precisional tolerance. Parallel Kinematic Mechanism uses general universal joint and spherical joint, but such joints have accumulated tolerance problems. Therefore, it causes position control problem and dramatically life time reduction. This paper focused on the rolling element to improve sliding precision in new sliding ball joint development. Before the final design and production, it was confirmed that new sliding ball joint held a higher load and a good geometrical structure. FEM analysis showed a favorable agreement with tensile and compressive testing results by universal testing machine. In conclusions, a new sliding ball joint has been developed to solve a problem of accumulated tolerance and verified using tensile and compressive testing as well as FEM analysis.

RF MEMS 기법을 이용한 US PCS 대역 FBAR BPF 개발

  • 박희대
    • The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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    • v.14 no.3
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    • pp.15-19
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    • 2003
  • In This paper, we developed 1.96 GHz air gap type FBAR BPF using ZnO as piezoelectric sputtered by RF magnetron at room temperature. FBAR BPF was fabricated by sputtering bottom electrode (Al), ZnO as piezoelectric and top electrode (Mo) on Si wafer one by one with RF magnetron sputter, then Si was dry etched to make an air hole. XRD test result of fabricated FBAR BPF showed that ZnO crystal was well pre-oriented as (002) and sigma value of XRC was 1.018. IL(Insertion loss) showed excellent result as 1 dB.

In-Plane Thermoelectric Properties of InGaAlAs Thin Film with Embedded ErAs Nanoparticles (ErAs 나노입자가 첨가된 InGaAlAs 박막의 평면정렬방향으로의 열전특성)

  • Lee, Yong-Joong
    • Korean Journal of Materials Research
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    • v.21 no.8
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    • pp.456-460
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    • 2011
  • Microelectromechanical systems (MEMS)-fabricated suspended devices were used to measure the in-plane electrical conductivity, Seebeck coefficient, and thermal conductivity of 304 nm and 516 nm thick InGaAlAs films with 0.3% ErAs nanoparticle inclusions by volume. The suspended device allows comprehensive thermoelectric property measurements from a single thin film or nanowire sample. Both thin film samples have identical material compositions and the sole difference is in the sample thickness. The measured Seebeck coefficient, electrical conductivity, and thermal conductivity were all larger in magnitude for the thicker sample. While the relative change in values was dependent on the temperature, the thermal conductivity demonstrated the largest decrease for the thinner sample in the measurement temperature range of 325 K to 425 K. This could be a result of the increased phonon scattering due to the surface defects and included ErAs nanoparticles. Similar to the results from other material systems, the combination of the measured data resulted in higher values of the thermoelectric figure of merit (ZT) for the thinner sample; this result supports the theory that the reduced dimensionality, such as in twodimensional thin films or one-dimensional nanowires, can enhance the thermoelectric figure of merit compared with bulk threedimensional materials. The results strengthen and provide a possible direction in locating and optimizing thermoelectric materials for energy applications.

Easy Detection of Amyloid β-Protein Using Photo-Sensitive Field Effect

  • Kim, Kwan-Soo;Ju, Jong-Il;Song, Ki-Bong
    • Journal of Sensor Science and Technology
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    • v.21 no.5
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    • pp.339-344
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    • 2012
  • This article describes a novel method for the detection of amyloid-${\beta}$($A{\beta}$) peptide that utilizes a photo-sensitive field-effect transistor (p-FET). According to a recent study, $A{\beta}$ protein has been known to play a central role in the pathogenesis of Alzheimer's disease (AD). Accordingly, we investigated the variation of photo current generated from p-FET with and without intracellular magnetic beads conjugated with $A{\beta}$ peptides, which are placed on the p-FET sensing areas. The decrease of photo current was observed due to the presence of the magnetic beads on the channel region. Moreover, a similar characteristic was shown when the Raw 264 cells take in magnetic beads treated with $A{\beta}$ peptide. This means that it is possible to simply detect a certain protein using magnetic beads and a p-FET device. Therefore, in this paper, we suggest that our method could detect tiny amounts of $A{\beta}$ for early diagnosis of AD using the p-FET devices.