• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
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• pp.473-476
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• 2002

Micro turbine that is a component of micro power system refers to turbines on the scale of centimeters which can transmit power on the order of tens of Watts. Such devices can be used as propulsion or power generation devices for various potable and micro devices. An interdisciplinary team at Seoul National University has designed, fabricated and tested such a device, and this paper describes test results.

• 센서학회지
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• 제22권3호
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• pp.175-180
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• 2013

This paper describes the characteristics of cubic silicon carbide (3C-SiC) films grown on a carbonized Si(100) substrate, using hexamethyldisilane (HMDS, $Si_2(CH_3)_6$) as a safe organosilane single precursor in a nonflammable $H_2$/Ar ($H_2$ in Ar) mixture carrier gas by atmospheric pressure chemical vapor deposition (APCVD) at $1280^{\circ}C$. The growth process was performed under various conditions to determine the optimized growth and carbonization condition. Under the optimized condition, grown film has a single crystalline 3C-SiC with well crystallinity, small voids, low residual stress, low carrier concentration, and low RMS. Therefore, the 3C-SiC film on the carbonized Si (100) substrate is suitable to power device and MEMS fields.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.503-507
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• 2002

Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.355-358
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• 2003

Recently, micro forming process technology have been developed since the size of machine parts become the crucial factor for minimizing of products in general electronic products. Most small machine parts consist of gear and rotation axis and the wear by mechanical contact is known as the primary factor for life reduction of high precision machine part. Lots of studies for mechanical wear and friction have been reported and many researches of MEMS technology have been studied recently. But just few studies for wear of micro or milli sized machine part have teen implemented. In this research, the wear equation is suggested according to the contact shape of axial part in micro or milli sized machine part. And wear analysis model which can predict the magnitude of wear through this suggested equation with numerical analysis program.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2002년도 제19회 학술발표대회 논문초록집
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• pp.23-27
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• 2002

Micro turbine that is a component of micro thermal system refers to turbines on the scale of centimeters which can transmit power on the order of tens of Watts. Such devices can be used as propulsion or power generation devices for various potable and micro devices. An interdisciplinary team at Seoul National University has designed, fabricated and tested such a device, and this paper describes each phase. A commercial code has been used for design, and MEMS processes have been used for manufacturing. Finally, some preliminary test results are presented.

• International Journal of Control, Automation, and Systems
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• 제5권1호
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• pp.35-42
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• 2007

This paper presents an INS(Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer(DRXL) manufactured by an epitaxially grown thick poly silicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 Hz/g and its long term bias stability is about 2 mg($1{\sigma}$) with dynamic range of ${\sigma}70g$.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.253-258
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• 2002

This paper reports the design, modeling, fabrication and measurement of passive microvalves, which are applicable to glaucoma implants. The proposed microvalves were designed using fluidic theory. The microvalves consisted of microchannels and chambers. The microchannels had a constant fluidic resistance generating a pressure difference. Six kinds of microvalves were designed using fluidic equations for laminar flow and fabricated to examine the influences of chamber size, channel length and the shape of channel cross section. The pressure difference between the designed microvalve and the fabricated microvalve was measured to be less than 4%.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.313-317
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• 2003

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.844-847
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• 2001

The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문초록집
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• pp.360.1-360
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• 2002

Current information storage devices, such as HDD, CD/DVD-ROM/RW, probe-based memory and cabon nano tubes, are compared with biological information storage mechanisms in DNA and brain memory. Various biological components in living cells are analyzed based on "irreducible complexity" of intelligent design concept. Linear and arel density of information stored in the biological and mechanical storages are compared for the applications and developments of new storage devices.