• Title/Summary/Keyword: MEMS CCR

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The Parameter Identification for Localization Scheme of the Optics-Based Micro Sensor Node (광신호 기반의 마이크로 센서 노드 위치 인식 시스템을 위한 파라미터 식별)

  • Jeon, Ji-Hun;Lee, Min-Su;Park, Chan-Gook
    • Journal of Institute of Control, Robotics and Systems
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    • v.19 no.2
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    • pp.81-86
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    • 2013
  • In this paper, the parameter identification for localization scheme for the optics-based micro sensor node is conducted. We analyzed short measurement range problem which can be occurred in optical based micro sensor node localization method using a time of flight. And we set up the theory for distance and maximum reflected laser power to overcome the problem by identifying hardware parameters like laser power, effective area of MEMS CCR, sensitivity of photodetector, and so on. Experimental results of measurement of maximum reflected laser power were compared with results of the theory. By using the theory, we can identify hardware parameters of localization scheme to measure particular position of the optics-based micro sensor node.

Piezo-electrically Actuated Micro Corner Cube Retroreflector (CCR) for Free-space Optical Communication Applications

  • Lee, Duk-Hyun;Park, Jae-Y.
    • Journal of Electrical Engineering and Technology
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    • v.5 no.2
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    • pp.337-341
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    • 2010
  • In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

Performance Analysis of Scanning Scheme Using ToF for the Localization of Optics-Based Sensor Node (광신호 기반 무선 센서 노드 위치 인식을 위한 ToF 기법의 성능 분석)

  • Jang, Woo Hyeop;Park, Chan Gook
    • Journal of Institute of Control, Robotics and Systems
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    • v.19 no.3
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    • pp.268-274
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    • 2013
  • In this paper, the performance analysis of optics-based sensor node localization using ToF (Time of Flight) scheme is conducted. Generally, the position of the sensor node is calculated on the base station. And the base station scans neighboring sensor nodes with a laser. The laser which is reflected from one sensor node, however, can be reached to the base station at different angles according to the scanning resolution. This means that the error of the reached angle can increase and one node may be recognized as different nodes. Also the power of laser can decrease because the laser signal spread. Thus the sensor node which is located at a long distance from the base station cannot be detected. In order to overcome these problems which can be occurred in localization using ToF, the beam spot, the scanning resolution, the size of reflector and the power of laser at the sensor node were analyzed. It can be expected that the consequence of analysis can be provided in acquisition of accurate position of sensor node and construction of optics-based sensor node localization system.