• Title/Summary/Keyword: MEMS Accelerometer

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Development of Acceleration-PZT Impedance Hybrid Sensor Nodes Embedding Damage Identification Algorithm for PSC Girders

  • Park, Jae-Hyung;Lee, So-Young;Kim, Jeong-Tae
    • Journal of Ocean Engineering and Technology
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    • v.24 no.3
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    • pp.1-10
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    • 2010
  • In this study, hybrid smart sensor nodes were developed for the autonomous structural health monitoring of prestressed concrete (PSC) girders. In order to achieve the objective, the following approaches were implemented. First, we show how two types of smart sensor nodes for the hybrid health monitoring were developed. One was an acceleration-based smart sensor node using an MEMS accelerometer to monitor the overall damage in concrete girders. The other was an impedance-based smart sensor node for monitoring the local damage in prestressing tendons. Second, a hybrid monitoring algorithm using these smart sensor nodes is proposed for the autonomous structural health monitoring of PSC girders. Finally, we show how the performance of the developed system was evaluated using a lab-scaled PSC girder model for which dynamic tests were performed on a series of prestress-loss cases and girder damage cases.

Recent Advances in Structural Health Monitoring

  • Feng, Maria Q.
    • Journal of the Korean Society for Nondestructive Testing
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    • v.27 no.6
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    • pp.483-500
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    • 2007
  • Emerging sensor-based structural health monitoring (SHM) technology can play an important role in inspecting and securing the safety of aging civil infrastructure, a worldwide problem. However, implementation of SHM in civil infrastructure faces a significant challenge due to the lack of suitable sensors and reliable methods for interpreting sensor data. This paper reviews recent efforts and advances made in addressing this challenge, with example sensor hardware and software developed in the author's research center. It is proposed to integrate real-time continuous monitoring using on structure sensors for global structural integrity evaluation with targeted NDE inspection for local damage assessment.

Enhanced Energy Harvester Based on Vibration Analysis of Bicycle Riding (자전거 주행의 진동 분석에 기반한 에너지 수확 증진 기술 개발)

  • Yeo, Jung-Jin;Ryu, Mun-Ho;Kim, Jung-Ja;Yang, Yoon-Seok
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.49 no.1
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    • pp.47-56
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    • 2012
  • Bicycle has a large amount of kinetic energy available for energy harvesting technology in its speedy and balanced riding movement. Systematic and realistic analysis of its dynamic property is essential to improve the efficiency of energy harvester. However, there has not been enough researches about precise measurement or analysis of bicycle dynamics on real roads. This study aims to investigate the characteristics of vibrational movement of bicycle using MEMS-based accelerometer and to develop a prototype of electromagnetic energy harvester with nonlinear behavior which is proper to the random vibrations accompanied in bicycle riding. The vibrational components have average magnitude of 1 g and turn out to be independent of riding speed. The developed prototype of energy harvester was installed on a front port of a bicycle to use this ambient vibration and generated an average electrical power of 1.5 mW which is enough to support power for most of portable sensors and short range radio-frequency communication. Further study about isolation of vibration from a rider and conversion efficiency is ongoing. The developed energy harvester is expected to be a platform technology for sustainable portable power supply for various smart IT devices and applications.

Stress characteristics of multilayer polysilicon for the fabrication of micro resonators (마이크로 공진 구조체 제작을 위한 다층 폴리실리콘의 스트레스 특성)

  • Choi, C.A.;Lee, C.S.;Jang, W.I.;Hong, Y.S.;Lee, J.H.;Sohn, B.K.
    • Journal of Sensor Science and Technology
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    • v.8 no.1
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    • pp.53-62
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    • 1999
  • Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

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Development of a Thin Glass Vibration Measuring System for Productivity Improvement of LCD Manufacturing Line (LCD 생산라인의 생산성 향상을 위한 초박형 유리진동 계측 시스템의 개발)

  • Oh, Young-Kyo;Lee, Jung-Uk;Sun, Ju-Young;Kwack, Jeong-Seok;Won, Moon-Cheol;Lee, Hyun-Yup
    • Journal of Sensor Science and Technology
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    • v.20 no.5
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    • pp.336-342
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    • 2011
  • Recently, the LCD manufacturing industries try to maximize the productivity of LCD panels due to sharp increase in the market need of LCD display. Usually, the increase in manufacturing speed induces additional vibration of glasses and manufacturing machineries. This kind of vibration can induce bad effects on the manufacturing accuracy, and even can damage the glasses. The vibration signal of glass itself is very useful to predict the allowable maximum level of manufacturing speed. Therefore, it is necessary to measure the vibration of the glass itself and a very thin vibration measurement system attachable on the glass is needed. Since in some processes the glasses need to go through very thin gaps such as 2.5mm, We develop a glass vibration measurement system with the thickness of 1.3mm. The system measures the glass vibration using MEMS type accelerometers and store vibration data in a Nand-Flash memory. The performance of the develop system has been verified on a real LCD manufacturing line and the accuracy of vibration measurement is comparable with that of an accurate commercial vibration measurement system.

Human Motion Tracking With Wireless Wearable Sensor Network: Experience and Lessons

  • Chen, Jianxin;Zhou, Liang;Zhang, Yun;Ferreiro, David Fondo
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.7 no.5
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    • pp.998-1013
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    • 2013
  • Wireless wearable sensor networks have emerged as a promising technique for human motion tracking due to the flexibility and scalability. In such system several wireless sensor nodes being attached to human limb construct a wearable sensor network, where each sensor node including MEMS sensors (such as 3-axis accelerometer, 3-axis magnetometer and 3-axis gyroscope) monitors the limb orientation and transmits these information to the base station for reconstruction via low-power wireless communication technique. Due to the energy constraint, the high fidelity requirement for real time rendering of human motion and tiny operating system embedded in each sensor node adds more challenges for the system implementation. In this paper, we discuss such challenges and experiences in detail during the implementation of such system with wireless wearable sensor network which includes COTS wireless sensor nodes (Imote 2) and uses TinyOS 1.x in each sensor node. Since our system uses the COTS sensor nodes and popular tiny operating system, it might be helpful for further exploration in such field.

Detection Circuit Design and Performance Test of Gimbal-Stuctured Micro-Accelerometer (마이크로 가속도계의 신호 검출 회로 설계 및 성능시험)

  • Sung, W.T.;Lee, J.G.;Kang, T.;Song, J.W.;Sung, S.K.
    • Proceedings of the KIEE Conference
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    • 2001.07d
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    • pp.2111-2113
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    • 2001
  • 본 논문에서는 MEMS 기술에 의해 제작된 마이크로 가속도계를 위한 신호 검출 및 처리회로를 설계 제작하였으며, 레이트 테이블을 이용한 실험을 통해 제작된 센서 및 신호처리회로의 성능을 시험하였다. 본 논문에서 제시한 가속도계는 입력 가속도에 따라 용량이 변하는 방식으로, 두개의 김블 구조를 가지므로 타축 입력 가속도의 영향을 적게 받는 장점이 있다. 또한 감지전극의 효과적 배치를 통해 감도가 커지도록 설계되었다. 신호검출 및 처리는 여기 신호를 이용한 차분검출방식을 이용하였다. 이 방식은 구성이 복잡한 단점이 있으나, 잡음 신호와 검출 신호를 주파수 영역에서 분리시킬 수 있으며, 기생용량의 영향을 감소시키고 전기적 감도를 증가시키는 장점이 있다. 실험을 통해 제시한 신호검출 및 처리방식을 이용할 경우 가속도계의 성능이 향상되는 것을 확인하였다.

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Design of Indoor Space Guidance System Using LiDAR and Camera on iPhone (iPhone의 LiDAR와 Camera를 이용한 실내 공간 안내를 위한 시스템 설계)

  • Junseok Jang;Kwangjae Sung
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.1
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    • pp.71-78
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    • 2024
  • In indoor environments, since global positioning system (GPS) signals can be blocked by obstacles, such as building structure. the performance of GPS-based positioning methods can be degraded because of the loss of GPS signals. To solve this problem, various localization schemes using inertial measurement unit (IMU) sensors, such as gyroscope, accelerometer, and magnetometer, have been proposed to enhance the positioning accuracy in indoor environments. IMU-based positioning methods can estimate the location of the user by calculating the velocity and heading angle of the user without the help of GPS. However, low-cost MEMS IMUs may lead to drift error and large bias. In addition, positioning errors in IMU-based positioning approaches can be caused by the irrelevant motion of the pedestrian. In this study, we propose an enhanced indoor positioning method that provides more reliable localization results by using the camera, light detection and right (LiDAR), and ARKit framework on the iPhone. Through reliable positioning results and augmented reality (AR) experiences, our indoor positioning system can provide indoor space guidance services.

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Biomimetic Gyroscope Integrated with Actuation Parts of a Robot Inspired by Insect Halteres (평형곤을 모사한 생체모방형 구동부 일체형 각속도 센서)

  • Jeong, Mingi;Kim, Jisu;Jang, Seohyeong;Lee, Tae-Jae;Shim, Hyungbo;Ko, Hyoungho;Cho, Kyu-Jin;Cho, Dong-Il Dan
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.9
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    • pp.705-709
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    • 2016
  • Micro-electro-mechanical systems (MEMS) gyroscopes are widely used in various robot applications. However, these conventional gyroscopes need to vibrate the proof mass using a built-in actuator at a fixed resonance frequency to sense the Coriolis force. When a robot is not moving, the meaningless vibration of the gyroscope wastes power. In addition, this continuous vibration makes the sensor vulnerable to external sound waves with a frequency close to the proof-mass resonance frequency. In this paper, a feasibility study of a new type of gyroscope inspired by insect halteres is presented. In dipterous insects, halteres are a biological gyroscope that measures the Coriolis force. Wing muscles and halteres are mechanically linked, and the halteres oscillate simultaneously with wing beats. The vibrating haltere experiences the Coriolis force if the insect is going through a rotational motion. Inspired by this haltere structure, a gyroscope using a thin mast integrated with a robot actuation mechanism is proposed. The mast vibrates only when the robot is moving without requiring a separate actuator. The Coriolis force of the mast can be measured with an accelerometer installed at the tip of the mast. However, the signal from the accelerometer has multiple frequency components and also can be highly corrupted with noise, such that raw data are not meaningful. This paper also presents a suitable signal processing technique using the amplitude modulation method. The feasibility of the proposed haltere-inspired gyroscope is also experimentally evaluated.

K-DEV: A Borehole Deviation Logging Probe Applicable to Steel-cased Holes (철재 케이싱이 설치된 시추공에서도 적용가능한 공곡검층기 K-DEV)

  • Yoonho, Song;Yeonguk, Jo;Seungdo, Kim;Tae Jong, Lee;Myungsun, Kim;In-Hwa, Park;Heuisoon, Lee
    • Geophysics and Geophysical Exploration
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    • v.25 no.4
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    • pp.167-176
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    • 2022
  • We designed a borehole deviation survey tool applicable for steel-cased holes, K-DEV, and developed a prototype for a depth of 500 m aiming to development of own equipment required to secure deep subsurface characterization technologies. K-DEV is equipped with sensors that provide digital output with verified high performance; moreover, it is also compatible with logging winch systems used in Korea. The K-DEV prototype has a nonmagnetic stainless steel housing with an outer diameter of 48.3 mm, which has been tested in the laboratory for water resistance up to 20 MPa and for durability by running into a 1-km deep borehole. We confirmed the operational stability and data repeatability of the prototype by constantly logging up and down to the depth of 600 m. A high-precision micro-electro-mechanical system (MEMS) gyroscope was used for the K-DEV prototype as the gyro sensor, which is crucial for azimuth determination in cased holes. Additionally, we devised an accurate trajectory survey algorithm by employing Unscented Kalman filtering and data fusion for optimization. The borehole test with K-DEV and a commercial logging tool produced sufficiently similar results. Furthermore, the issue of error accumulation due to drift over time of the MEMS gyro was successfully overcome by compensating with stationary measurements for the same attitude at the wellhead before and after logging, as demonstrated by the nearly identical result to the open hole. We believe that the methodology of K-DEV development and operational stability, as well as the data reliability of the prototype, were confirmed through these test applications.