• Title/Summary/Keyword: MEMS

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Performance Evaluation of Smart Accelerometers for Structural Health Monitoring (구조 건전성 감시를 위한 스마트 가속도계의 성능 평가)

  • Yi, Jin-Hak;O, Hye-Sun;Yun, Chung-Bang
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.4A
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    • pp.605-609
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    • 2006
  • In this study, two kinds of smart accelerometers are investigated for the application of smart sensors to the structural health monitoring of infrastructures. Smart optical Fiber Bragg Grating (FBG) type and Micro-Electo-Mechanical System (MEMS) type accelerometers are selected for this study and the high sensitive ICP type accelerometer is used for the reference sensor. Small size shaking table tests were performed with 3-story shear building model using random input ground motions. The output only modal identification was carried out using stochastic subspace identification and the performances of sensors are compared in modal domain indirectly. The modal sensitivity method was applied to update the story stiffness of numerical model and the updated results were verified using the additional experiments for the same structure with additional mass.

Influence of flexoelectricity on bending of piezoelectric perforated FG composite nanobeam rested on elastic foundation

  • Ali Alnujaie;Alaa A. Abdelrahman;Abdulrahman M. Alanasari;Mohamed A. Eltaher
    • Steel and Composite Structures
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    • v.49 no.4
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    • pp.361-380
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    • 2023
  • A size dependent bending behavior of piezoelectrical flexoelectric layered perforated functionally graded (FG) composite nanobeam rested on an elastic foundation is investigated analytically. The composite beam is composed of regularly cutout FG core and two piezoelectric face sheets. The material characteristics is graded through the core thickness by power law function. Regular squared cutout perforation pattern is considered and closed forms of the equivalent stiffness parameters are derived. The modified nonlocal strain gradient elasticity theory is employed to incorporate the microstructure as well as nonlocality effects into governing equations. The Winkler as well as the Pasternak elastic foundation models are employed to simulate the substrate medium. The Hamiltonian approach is adopted to derive the governing equilibrium equation including piezoelectric and flexoelectric effects. Analytical solution methodology is developed to derive closed forms for the size dependent electromechanical as well as mechanical bending profiles. The model is verified by comparing the obtained results with the available corresponding results in the literature. To demonstrate the applicability of the developed procedure, parametric studies are performed to explore influences of gradation index, elastic medium parameters, flexoelectric and piezoelectric parameters, geometrical and peroration parameters, and material parameters on the size dependent bending behavior of piezoelectrically layered PFG nanobeams. Results obtained revealed the significant effects both the flexoelectric and piezoelectric parameters on the bending behavior of the piezoelectric composite nanobeams. These parameters could be controlled to improve the size dependent electromechanical as well as mechanical behaviors. The obtained results and the developed procedure are helpful for design and manufacturing of MEMS and NEMS.

Static bending response of axially randomly oriented functionally graded carbon nanotubes reinforced composite nanobeams

  • Ahmed Amine Daikh;Ahmed Drai;Mohamed Ouejdi Belarbi;Mohammed Sid Ahmed Houari;Benoumer Aour;Mohamed A. Eltaher;Norhan A. Mohamed
    • Advances in nano research
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    • v.16 no.3
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    • pp.289-301
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    • 2024
  • In this work, an analytical model employing a new higher-order shear deformation beam theory is utilized to investigate the bending behavior of axially randomly oriented functionally graded carbon nanotubes reinforced composite nanobeams. A modified continuum nonlocal strain gradient theory is employed to incorporate both microstructural effects and geometric nano-scale length scales. The extended rule of mixture, along with molecular dynamics simulations, is used to assess the equivalent mechanical properties of functionally graded carbon nanotubes reinforced composite (FG-CNTRC) beams. Carbon nanotube reinforcements are randomly distributed axially along the length of the beam. The equilibrium equations, accompanied by nonclassical boundary conditions, are formulated, and Navier's procedure is used to solve the resulting differential equation, yielding the response of the nanobeam under various mechanical loadings, including uniform, linear, and sinusoidal loads. Numerical analysis is conducted to examine the influence of inhomogeneity parameters, geometric parameters, types of loading, as well as nonlocal and length scale parameters on the deflections and stresses of axially functionally graded carbon nanotubes reinforced composite (AFG CNTRC) nanobeams. The results indicate that, in contrast to the nonlocal parameter, the beam stiffness is increased by both the CNTs volume fraction and the length-scale parameter. The presented model is applicable for designing and analyzing microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) constructed from carbon nanotubes reinforced composite nanobeams.

Dry Etching of Flexible Polycarbonate and PMMA in O2/SF6/CH4 Discharges (O2/SF6/CH4 플라즈마를 이용한 플렉시블 Polycarbonate와 PMMA의 건식 식각)

  • Joo, Y.W.;Park, Y.H.;Noh, H.S.;Kim, J.K.;Lee, J.W.
    • Journal of the Korean Vacuum Society
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    • v.18 no.2
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    • pp.85-91
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    • 2009
  • There has been a rapid progress for flexible polymer-based MEMS(Microelectromechanical Systems) technology. Polycarbonate (PC) and Poly Methyl Methacrylate (PMMA), so-called acrylic, have many advantages for optical, non-toxic and micro-device application. We studied dry etching of PC and PMMA as a function of % gas ratio in the $O_2/SF_6/CH_4$ temary plasma. A photoresist pattern was defined on the polymer samples with a mask using a conventional lithography. Plasma etching was done at 100 W RIE chuck power and 10 sccm total gas flow rate. The etch rates of PMMA were typically 2 times higher than those of PC in the whole experimental range. The result would be related to higher melting point of PC compared to that of PMMA. The highest etch rates of PMMA and PC were found in the $O_2/SF_6$ discharges among $O_2/SF_6$, $O_2/CH_4$ and $SF_6/CH_4$ and $O_2/SF_6/CH_4$ plasma composition (PC: ${\sim}350\;nm/min$ at 5 sccm $O_2/5$ sccm $SF_6$, PMMA: ${\sim}570\;nm/min$ at 2.5 sccm $O_2/7.5$ sccm $SF_6$). PC has smoother surface morphology than PMMA after etching in the $O_2/SF_6/CH_4$ discharges. The surface roughness of PC was in the range of 1.9$\sim$3.88 nm. However, that of PMMA was 17.3$\sim$26.1 nm.

International Conference on Electroceramics 2005 (2005년도 국제 전자세라믹 학술회의)

  • 한국세라믹학회
    • Proceedings of the Korean Ceranic Society Conference
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    • 2005.06a
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    • pp.1-112
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    • 2005
  • This report is results of a research on recent R&D trends in electroceramics, mainly focusing on the papers submitted to the organizing committee of the International Conference on Electroceramics 2005 (ICE-2005) which was held at Seoul on 12-15 June 2005. About 380 electroceramics researchers attended at the ICE-2005 from 17 countries including Korea, presenting and discussing their recent results. Therefore, we can easily understand the recent research trends in the field of electroceramics by analyses of the subject and contents of the submitted papers. In addition to the analyses of the papers submitted to the ICE-2005, we also collected some informations about domestic and international research trends to help readers understand this report easily. We analysed the R&D trends on the basis of four main categories, that is, informatics electroceramics, energy and environment ceramics, processing and characterization of electroceramics, and emerging fields of electroceramics. Each main category has several sub-categories again. The informatics ceramics category includes integrated dielectrics and ferroelectrics, oxide and nitride semiconductors, photonic and optoelectronic devices, multilayer electronic ceramics and devices, microwave dielectrics and high frequency devices, and piezoelectric and MEMS applications. The energy and environment ceramics category has four sub-categories, that is, rechargable battery, hydrogen storage, fuel cells, and advanced energy conversion concepts. In the processing and characterization category, there exist domain, strain, and epitaxial dynamics and engineering sub-category, innovative processing and synthesis sub-category, nanostructured materials and nanotechnology sub- category, single crystal growth and characterization sub-category, theory and modeling sub-category. Nanocrystalline electroceramics, electroceramics for smart sensors, and bioceramics sub-categories are included to the emerging fields category. We hope that this report give an opportunity to understand the international research trend, not only to Korean ceramics researchers but also to science and technology policy researchers.

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Improvement of Relative Positioning Accuracy by Searching GPS Common Satellite between the Vehicles (차량 간 GPS 공통 가시위성 검색을 통한 상대위치 추정 정확도 향상에 대한 연구)

  • Han, Young-Min;Lee, Sung-Yong;Kim, Youn-Sil;Song, June-Sol;No, Hee-Kwon;Kee, Chang-Don
    • Journal of Advanced Navigation Technology
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    • v.16 no.6
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    • pp.927-934
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    • 2012
  • In this paper, we present relative positioning algorithm for moving land vehicle using GPS, MEMS IMU and B-CDMA module. This algorithm does not calculate precise absolute position but calculates relative position directly, so additional infrastructure and I2V communication device are not required. Proposed algorithm has several steps. Firstly, unbiased relative position is calculated using pseudorange difference between two vehicles. Simultaneously, the algorithm estimates position of each vehicle using GPS/INS integration. Secondly, proposed algorithm performs filtering and finally estimates relative position and relative velocity. Using proposed algorithm, we can obtain more precise relative position for moving land vehicles with short time interval as IMU sensor has. The simulation is performed to evaluate this algorithm and the several field tests are performed with real time program and miniature vehicles for verifying performance of proposed algorithm.

Multi-scale Analysis of Thin film Considering Surface Effects (표면효과를 고려한 박막구조의 멀티스케일 해석)

  • Cho, Maeng-Hyo;Choi, Jin-Bok;Jung, Kwang-Sub
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.20 no.3
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    • pp.287-292
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    • 2007
  • In general, the response of bulk material is independent of its size when it comes to considering classical elasticity theory. Because the surface to bulk ratio of the large solids is very small, the influence of surface can be negligible. But the surface effect plays important role as the surface to bulk ratio becomes larger, that is, the contribution of the surface effect must be considered in nano-size elements such as thin film or beam structure. Molecular dynamics computation has been a conventional way to analyze these ultra-thin structures but this method is limited to simulate on the order of $10^6{\sim}10^9$ atoms for a few nanoseconds, and besides, very time consuming. Analysis of structures in submicro to micro range(thin-film, wire etc.) is difficult with classical molecular dynamics due to the restriction of computing resources and time. Therefore, in this paper, the continuum-based method is considered to simulate the overall physical and mechanical properties of the structures in nano-scale, especially, for the thin-film.

Development of Earthquake Early Warning System nearby Epicenter based on P-wave Multiple Detection (진원지 인근 지진 조기 경보를 위한 선착 P파 다중 탐지 시스템 개발)

  • Lee, Taehee;Noh, Jinseok;Hong, Seungseo;Kim, YoungSeok
    • Journal of the Korean Geosynthetics Society
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    • v.18 no.4
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    • pp.107-114
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    • 2019
  • In this paper, the P-wave multiple detection system for the fast and accurate earthquake early warning nearby the epicenter was developed. The developed systems were installed in five selected public buildings for the validation. During the monitoring, a magnitude 2.3 earthquake occurred in Pohang on 26 September 2019. P-wave initial detection algorithms were operated in three out of four systems installed in Pohang area and recorded as seismic events. At the nearest station, 5.5 km from the epicenter, P-wave signal was detected 1.2 seconds after the earthquake, and S-wave was reached 1.02 seconds after the P-wave reached, providing some alarm time. The maximum accelerations recorded in three different stations were 6.28 gal, 6.1 gal, and 5.3 gal, respectively. The alarm algorithm did not work, due to the high threshold of the maximum ground acceleration (25.1 gal) to operate it. If continuous monitoring and analysis are to be carried out in the future, the developed system could use a highly effective earthquake warning system suitable for the domestic situation.

Biomimetic Gyroscope Integrated with Actuation Parts of a Robot Inspired by Insect Halteres (평형곤을 모사한 생체모방형 구동부 일체형 각속도 센서)

  • Jeong, Mingi;Kim, Jisu;Jang, Seohyeong;Lee, Tae-Jae;Shim, Hyungbo;Ko, Hyoungho;Cho, Kyu-Jin;Cho, Dong-Il Dan
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.9
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    • pp.705-709
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    • 2016
  • Micro-electro-mechanical systems (MEMS) gyroscopes are widely used in various robot applications. However, these conventional gyroscopes need to vibrate the proof mass using a built-in actuator at a fixed resonance frequency to sense the Coriolis force. When a robot is not moving, the meaningless vibration of the gyroscope wastes power. In addition, this continuous vibration makes the sensor vulnerable to external sound waves with a frequency close to the proof-mass resonance frequency. In this paper, a feasibility study of a new type of gyroscope inspired by insect halteres is presented. In dipterous insects, halteres are a biological gyroscope that measures the Coriolis force. Wing muscles and halteres are mechanically linked, and the halteres oscillate simultaneously with wing beats. The vibrating haltere experiences the Coriolis force if the insect is going through a rotational motion. Inspired by this haltere structure, a gyroscope using a thin mast integrated with a robot actuation mechanism is proposed. The mast vibrates only when the robot is moving without requiring a separate actuator. The Coriolis force of the mast can be measured with an accelerometer installed at the tip of the mast. However, the signal from the accelerometer has multiple frequency components and also can be highly corrupted with noise, such that raw data are not meaningful. This paper also presents a suitable signal processing technique using the amplitude modulation method. The feasibility of the proposed haltere-inspired gyroscope is also experimentally evaluated.

A Study on the Development of Multifuntional Real-Time Inclination and Azimuth Measurement System (다용도 실시간 경사각과 방위각 연속 측정 시스템 개발연구)

  • Kim, Gyuhyun;Cho, Sung-Ho;Jung, Hyun-Key;Lee, Hyosun;Son, Jeong-Sul
    • Journal of the Korean earth science society
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    • v.34 no.6
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    • pp.588-601
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    • 2013
  • In geophysics and geophysical exploration fields, we can use information about inclination and azimuth in various ways. These include borehole deviation logging for inversion process, real-time data acquisition system, geophysical monitoring system, and so on. This type of information is also necessarily used in the directional drilling of shale gas fields. We thus need to develop a subminiature, low-powered, multi-functional inclination and azimuth measurement system for geophysical exploration fields. In this paper, to develop real-time measurement system, we adopt the high performance low power Micro Control Unit (made with state-of-the-art Complementary Metal Oxide Semiconductor technology) and newly released Micro Electro Mechanical Systems Attitude Heading Reference System sensors. We present test results on the development of a multifunctional real-time inclination and azimuth measurement system. The developed system has an ultra-slim body so as to be installed in 42mm sonde. Also, this system allows us to acquire data in real-time and to easily expand its application by synchronizing with a depth encoder or Differential Global Positioning System.