• Journal of Dental Rehabilitation and Applied Science
• /
• v.29 no.3
• /
• pp.290-298
• /
• 2013

It will be possible to predict the success and failure of the prosthodontic treatment and prevent clinical complications if the oral environment including prostheses and their supporting teeth and periodontium can be monitored in real time. The aim of this report is to introduce the concept of a smart prosthesis, which monitors specific factors in the oral cavity, and investigate its feasibility through a literature review of MEMS (Micro-electro-mechanical System) and Biosensing.

• Journal of the Computational Structural Engineering Institute of Korea
• /
• v.26 no.4
• /
• pp.271-274
• /
• 2013

Inclinometer sensors are widely applied in many fields. Especially in the field of construction of high-rise buildings also measure the horizontal and vertical help has been applied to monitor. Recent micro electro-mechanical system(MEMS) technology with the development of the many sensors have been developed. In this paper, a MEMS inclinometer is based on a MEMS accelerometer. The sensor can measure the angle of inclination using the relationship between static acceleration and gravity acceleration from an accelerometer. From this principle, inclinometer has been developed that has more accurate. The accuracy is proved by the experiment with laser displacement. Results in the experiment express high-accuracy, stability and economics of MEMS inclinometer. In conclusion, wireless MEMS inclinometer sensor is expected to be applicable in the areas of construction and many other industries with accurate and convenient monitoring system.

• Journal of the Semiconductor & Display Technology
• /
• v.3 no.2
• /
• pp.23-26
• /
• 2004

Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.

• 전기의세계
• /
• v.42 no.11
• /
• pp.23-29
• /
• 1993

최근에 마이크로 머신의 여러 연구분야중에서 Micro-Electro-Magnetic-Mechanical-System(MEMS)분야가 연구의 최대 관심사로 떠오르며, 완전집적 전자력 구동 액츄에이터와 센서의 개발, 실용 및 응용에 여러 세계적인 굴지의 연구소 및 회사가 속속 참여하고 있다는 것은 시사해주는 바가 크다.

• Progress in Medical Physics
• /
• v.25 no.2
• /
• pp.116-121
• /
• 2014

Next future, The bio technology will be a rapidly developing. This paper is the scattering beam measurement of the red blood cell (RBC) and the fabrication of the micro cell biochip using the bio micro electro mechanical system (Bio-MEMS) process technology. The Major process method of Bio-MEMS technology was used the buffered oxide etchant (BOE), electro chemical discharge (ECD) and ultraviolet sensitive adhesives (UVSA). All experiments were the 10 times according to the process conditions. The experiment and research are required the ultraviolet expose, the micro fluid current, the cell control and the measurement of the output voltage Vpp (peak to peak) waveform by scattering angles. The transmitting and receiving of the laser beam was used the single mode optical fiber. The principles of the optical properties are as follows. The red blood cells were injected into the micro channel. The single mode optical fiber was inserting in the guide channel. The He-Ne laser beam was focusing in the single mode optical fiber. The transmission He-Ne laser beam is irradiating to the red blood cells. The manufactured guide channel consists of the four inputs and the four outputs. The red blood cell was allowed with the cylinder pump. The output voltage Vpp waveform of the scattering beam was measured with a photo detector. The receiving angle of the output optical fiber is $0^{\circ}$, $5^{\circ}$, $10^{\circ}$, $15^{\circ}$. The magnitude of the output voltage Vpp waveform was measured in the decrease according to increase of the reception angles. The difference of the output voltage Vpp waveform is due differences of the light transmittance of the red blood cells.

• 제어로봇시스템학회:학술대회논문집
• /
• 2002.10a
• /
• pp.39.1-39
• /
• 2002

We present nanoactuators and nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Major technical difficulties in the high-precision MEMS are arising from the fabrication uncertainty and electrical noise problems. In this paper, we present high-precision actuators and detectors, overcoming the technical limitations placed by the conventional MEMS technology. For the nano-precision actuation, we present a nonlinearly modulated digital actuator (NMDA). NMDA composed of a digital microactuator and a nonlinear micromechanical modulator. The nonlinear micromechanical modulator is intended to purify the actuation errors in the stroke of the digital a...

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
• /
• v.36 no.2
• /
• pp.75-84
• /
• 2018

The purpose of this study is that the low-cost mobile mapping system using INS (Inertial Navigation System) based on MEMS (Micro Electro Mechanical System) could decipher the interpretation of road facility with the accuracy of x, y 0.546m plane error. Even though the MMS (Mobile Mapping System) technology as a new measurement technology has been used vividly to set up geographic information by some world leading surveying equipment manufacturers, the domestic technology is still in its beginning stage. Several domestic institutes and companies tried to catch up the leading technology but they just produced prototypes which needs more stabilization. Through this thesis, we developed low-cost mobile mapping system installed with INS based on MEMS after time synchronizing sensors for MMS such as LiDAR (Light Detection And Ranging), CCD (Charge Coupled Device), GPS/INS (Global Positioning System / Inertial Navigation System) and DMI (Distance Measurement Instrument).

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.18 no.5
• /
• pp.674-680
• /
• 2017

Touch Screen Panel (TSP) is a widely used personal handheld device and as a large display apparatus. This study examines micro bump fabrication technology for TSP test process. In the testing process, as TSP is changed, should make a new micro bump for probing and modify the testing program. In this paper we use a maskless lithography system to confirm the potential to fabricatemicro bump to reducecost and manufacturing time. The requiredmaskless lithography system does not use a mask so it can reduce the cost of fabrication and it flexible to cope with changes of micro bump probing. We conducted electro field simulation by pitches of micro bump and designed the lithography pattern image for the maskless lithography process. Then we conducted Photo Resist (PR) patterning process and electro-plating process that are involved in MEMS technology to fabricate micro bump.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.10
• /
• pp.188-195
• /
• 2004

In this paper, we fabricated fluidic devices like micro-channel, pump, mixer and particular gas separator with the technology of stereolithouaphy using RP(rapid-prototyping). The fabricated fluidic devices are expected to be applied to develop Lab-on-a chip type liquid analyzer. Stereolithography technology seems effective for fabricating MEMS(Micro Electro Mechanical System) with complicated structure because it makes three dimensional fabrication possible but, exclusive devices are needed to be developed fur fabricating even more microscopic MEMS structure.

• Journal of Electrical Engineering and Technology
• /
• v.1 no.2
• /
• pp.263-267
• /
• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.