• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.191-197
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• 2003

As mechanical components are miniaturized, the demand on micro die and mold is increasing. Micro mechanical components usually have high hardness and good conductivity. So micro electrical discharge machining (MEDM) is an effective way to machine those components. In micro cavity fabrication using MEDM, it is observed that the bottom surface of cavity is distorted. Electric charges tend to be concentrated at the sharp edge. At the center of the bottom surface, debris can not be drawn off easily. These two phenomena make the bottom surface of the electrode and workpiece distort. As machining depth increases, the distorted shape of electrode approaches hemisphere. This process is affected by capacitance and the size of electrode. By using a smaller electrode than the desired cavity size and appropriate tool movement, bottom shape distortion can be prevented.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.44-48
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• 2005

As mechanical components are miniaturized, the demands on micro die/mold are increasing. Micro mechanical components usually have high hardness and good conductivity. Micro electrical discharge machining (MEDM) can thus be an effective way to machine those components. In micro cavity fabrication using MEDM, it is observed that the bottom surface of the cavity is distorted. Electric charges tend to be concentrated at the sharp edge, and debris cannot be drawn off easily at the center of the bottom surface. These two phenomena make the bottom surface of electrode and workpiece distort. As machining depth increases, the distorted shape of the electrode approaches hemisphere. This process is affected by both capacitance and the size of electrode. By using a smaller electrode than the desired cavity size and appropriate tool movement, bottom shape distortion can be prevented.

• Transactions of Materials Processing
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• v.14 no.3 s.75
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• pp.251-256
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• 2005

3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.2
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• pp.180-186
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• 2011

This paper describes a micro electrical discharge machining (MEDM) technique that uses an insulated tool in combination with ultrasonic vibration to drill micro holes. As the machining depth becomes deeper, the dispersion of debris and circulation of the dielectric fluid are difficult to occur. Consequently, machining becomes unstable in the machining region and unnecessary electrochemical dissolution and secondary discharge sparking occur at the tool side face. To reduce the amount of unnecessary side machining, an insulated tool was used. Ultrasonic vibration was applied to the MEDM work fluid to better remove debris. Through these methods, a $1000\;{\mu}m$ thick stainless steel plate was machined by using a $73\;{\mu}m$ diameter electrode. The diameters of the hole entrance and exit were $96\;{\mu}m$ and $88\;{\mu}m$, respectively. It took only 351s to completely drill one hole.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.11a
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• pp.255-259
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• 2004

3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.55-61
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• 1998

Recently, the needs of machining technologies of very small parts have been increasing with advent of micro-revolution. These technologies have mostly used the method applied to semi-conductor production process such as LIGA, etc. But they have serious difficulties to settle down in terms of workpiece materials, machining thickness, 3-dimensional structure. Therefore. mciro-machining technology using EDM(Electrical Discharge Machining) was proposed. It is very difficult to machine the micro-parts (microshaft, microhole) using conventional machining. Micro-machining using BDM can machine the micro-parts easily because it requires little machining force. This MEDM(Micro-EDM) need the capabilities to move a electrode and control a discharge energy precisely, and the gap control strategy to maintain the optimal discharge condition is necessary. Therefore, in this study, the new EDM machine with high precision motion stage and high-performance EDM device was developed. Using this MEDM machine, we have machined microshaft and microhole with various shapes and sizes.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.227-232
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• 2003

In order to make a deep and precise micro-hole, electrode wear and clearance between the electrode and the workpiece are important parameters using micro-electrical discharge machining. In this study, experiments were carried out to show the characteristics of electrode wear and radial clearance with respect to the depth of machined hole. Electrode wear varied with respect to the depth of hole. With deeper machined hole, bigger clearance was observed. Also it was found that the diameter of electrode influences machining characteristics of deep holes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1080-1084
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• 2001

In manufacturing a micro die with half spherical cavity by MEDM, it is necessary to prepare an electrode with the same shape. This paper suggests a simple method to manufacture a half spherical electrode based on tool wear. The tool wears more rapidly at the edge of a cylindrical electrode. In order to make a half spherical micro electrode, cylindrical electrode was fed into the workpiece by the distance of its radius. The d/R(depth/Radius) value varied with respect to capacitance and electrode diameter. The smaller the size of electrode was, the closer the electrode tip geometry approached to a half sphere.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.922-925
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• 2000

As mechanical components require size minimization and high precision, micro die machining technology has been developed in many fields. to machine a micro die by EDM, sometimes, a polygonal electrode is use. Machining corners by MEDM shows special characteristics. Physically, electrons are concentrated in sharp region and a high potential level is established in this region. Also, the electrode can't be rotated when machining a polygonal cavity, and machined debris can not drawn off easily. Discharge concentration in corners and 2nd discharge by machined debris result in distortion of corner shape. This phenomena can be improved by shaking the electrode. This method is also shown to be effective in improving surface roughness by circulation of machining fluid resulting from movement of the electrode.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.47-53
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• 2005

Microholes with high aspect ratio are required in microstructures. Among various methods for producing the microhole, micro electrical discharge machining (MEDM) is very effective and useful process. But, it is difficult to machine the high aspect ratio holes below $100\;{\mu}m$ in diameter because machining condition becomes unstable due to bad removal of debris at deep hole. In this paper, ultrasonic vibration is applied to MEDM work fluid to make a high aspect ratio micro hole. It is shown that the vibration is effective in circulating the debris and increasing the machining rate. As a result, produced was a micro hole with $92\;{\mu}m$ entrance diameter, $81\;{\mu}m$ exit diameter and aspect ratio 23.