• Title/Summary/Keyword: MCM2

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Study on Via hole formation in multi layer MCM-D substrate using photosensitive BCB (감광성 BCB를 사용한 다층 MCM-D 기판에서 비아홀 형성에 관한 연구)

  • 주철원;최효상;안용호;정동철;김정훈;한병성
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.99-102
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    • 2000
  • Via for achieving reliable fabrication of MCM-D substrate was formed on the photosensitive BCB layer. MCM-D substrate consists of photosensitive BCB(Benzocyclobutene) interlayer dielectric and copper conductors. In order to form the vias in photosensitive BCB layer, the process of BCB and plasme etch using $C_2$F$_{6}$ gas were evaluated. The thickness of BCB after soft bake was shrunk down to 60% of the original. AES analysis was done on two vias, one is etched in $C_2$F$_{6}$ gas and the other is non etched. On via etched in $C_2$F$_{6}$, native C was detected and the amount of native C was reduced after Ar sputter. On via non etched in $C_2$F$_{6}$, organic C was detected and amount of organic C was reduced a little after Ar sputter. As a result of AES, BCB residue was not removed by Ar sputter, so plasma etch is necessary for achieving reliable via.ble via.

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Synthesis and Spectroscopic Characterization of Vanadium incorporated V-AlMCM-41 Molecular Sieves

  • Back, Gern-Ho;Yu, Jong-Sung;Lee, Hye-Young;Lee, Yong-Ill
    • Journal of the Korean Magnetic Resonance Society
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    • v.10 no.2
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    • pp.141-154
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    • 2006
  • A solid-state reaction of $V_2O_5$ with AlMCM-41 followed by calcinations generated $V^{5+}$ species in the mesoporous materials. Dehydration results in the formation of a vanadyl species, $VO^{2+}$, that can be characterized by electron spin resonance (ESR). The chemical environment of the vanadium centers in V-AlMCM-41 was investigated by XRD, EDX, diffuse reflectance UV-VIS, ESR, $^{29}Si,\;^{27}Al,\;and\;^{51}V$ NMR. It was found that the vanadium species on the wall surface and inside the wall of the hexagonal tubular wall of the V-AlMCM-41 were completely oxidized to tetrahedral $V^{5+}$ and transformed to square pyramidal by additional coordination to water molecules upon hydration. The oxidized $V^{5+}$ species on the wall surfaces and inside the wall were also reversibly reduced to $VO^{2+}$ species or lower valences by thermal process.

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XRD Study for the Effect of Aging and Gel Composition on the Crystdlinity of MCM-41 (숙성과 겔 성분이 MCM-41의 결정성에 미치는 효과에 대한 XRD 연구)

  • Park, Dong-Ho;Park, Sung-Soo
    • Journal of the Korean Chemical Society
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    • v.44 no.1
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    • pp.52-59
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    • 2000
  • The reaction gel mixtures of molar composition (0.3${\sim}$2.1) $SiO_2:\;(0.10{\sim}0.50)\;CTABr:\;0.15{\sim}0.23)\;TMAOH:\;(20{\sim}100)\;H_2O$ we prepared and then aged at room temperature for a definite duration. The aged gel is reacted hydrothermally at $150^{\circ}C$ for 2 days. The pH of reaction gel during synthesis is strongly influenced by the concentration of TMAOH and silica source. The pH change affects the phase of product, which is monitored by X-ray diffractometer. With increasing the TMAOH ratio from 0.19 to 0.23, the gel becomes more basic, and the product involves more lamellar phase. At TMAOH ratio lower than 0.19, the hexagonal phase is lower with decrease of pH. The content of the lamellar phase increases at a lower $SiO_2$ concentration, and higher concentrations have a clear detrimental effect on the crystallinity ofMCM-41 due to an excess silica source. The best quality MCM-41 is synthesized from a reaction gel composition of $1.0\;SiO_2:\;0.27\;CTABr:\;0.19\;TMAOH:\;40\;H_2O$. The pH values of this gel, aged one for 24 hr, and reacted one at $150^{\circ}C$ for 2 days are 12.3, 11.5, and 10.5, respectively. Gel aging for 24 h is essential for preparing high quality MCM-41. Longer aging causes a decrease of hexagonal phase.

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Reduction Behaviors of Nitric Oxides on Copper-decorated Mesoporous Molecular Sieves

  • Cho, Ki-Sook;Kim, Byung-Joo;Kim, Seok;Kim, Sung-Hyun;Park, Soo-Jin
    • Bulletin of the Korean Chemical Society
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    • v.31 no.1
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    • pp.100-103
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    • 2010
  • In this study, NO reduction behaviors of copper-loaded mesoporous molecular sieves (Cu/MCM-41) have been investigated. The Cu loading on MCM-41 surfaces was accomplished by a chemical reduction method with different Cu contents (5, 10, 20, and 40%). $N_2/77$ K adsorption isotherm characteristics, including the specific surface area and pore volume, were studied by BET's equation. NO reduction behaviors were confirmed by a gas chromatography. From the experimental results, the Cu loading amount on MCM-41 led to the increase of NO reduction efficiency in spite of decreasing the specific surface area of catalysts. This result indicates that highly ordered porous structure in the MCM-41 and the presence of active metal particles lead the synergistical NO reduction reactions due to the increase in adsorption energy of MCM-41 surfaces by the Cu particles.

Fabrication and Characterization of Low Noise Amplifier using MCM-C Technology (MCM-C 기술을 이용한 저잡음 증폭기의 제작 및 특성평가)

  • Cho, H.M.;Lim, W.;Lee, J.Y.;Kang, N.K.;Park, J.C.
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2000.11a
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    • pp.61-64
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    • 2000
  • We fabricated and characterized Low Noise Amplifier (LNA) using MCM-C (Multi-Chip-Module-Cofired) technology for 2.14 GHz IMT-2000 mobile terminal application. First, We designed LNA circuits and simulated it's high frequency characteristics using circuits simulator. For the simulation, we adopted high frequency libraries of all the devices used in LNA samples. By the simulation, Gain was 17 dB and Noise Figure was 1.4 dB. We used multilayer process of LTCC (Low Temperature Co-fired Ceramics) substrate and conductor, resistor pattern for the MCM-C LNA fabrication. We made 2 buried inductors, 2 buried capacitors and 3 buried resistors. The number of the total layers was 6. On the top layer, we patterned microstrip line and pads for the SMT device. We measured the high frequency characteristics, and the results were 14.7 dB Gain and 1.5 dB Noise Figure.

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Evidence of DNA Replication Licensing and Paternal DNA Degradation by MCM7 and ORC2 in the Mouse One-cell Embryo

  • Kim, Chang Jin;Kim, Tae Hoon;Lee, Eun-Woo;Lee, Kyung-Bon
    • Biomedical Science Letters
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    • v.23 no.4
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    • pp.372-379
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    • 2017
  • This study was investigated to test whether paternal DNA that was destined for degradation was properly licensed by testing for the presence of mini-chromosome maintenance protein (MCM) 7 and origin recognition complex (ORC) 2 in the paternal pronuclei. ORC2 is one of the first licensing protein to come on and MCM7 is one of the last licensing protein to come on. Zygotes were prepared by injection of control and treated sperm injection (ICSI). To control for DNA breakage, epididymal spermatozoa were treated with DNase I to fragment the DNA, then injected into oocytes. The presence of MCM7 and ORC2 in the pronuclei of mouse zygotes was tested by immunohistochemistry, just before the onset of DNA synthesis, at 5 h after fertilization, and after DNA synthesis began, at 9 h post fertilization. We found that in all cases, both MCM7 and ORC2 were present in both pronuclei at 5 h after sperm injection, just before DNA synthesis began. This indicates that no matter how extensive the DNA damage, recruitment of licensing proteins to the origins of replication was not inhibited. Sperm DNA fragmentation does not prevent licensing of DNA replication origins. Furthermore, the embryo recognizes DNA that is damaged by nucleases. Our data indicate that the one-cell embryo does harbor a mechanism to prevent the replication of severely damaged DNA from spermatozoa, even though the embryos do not undergo classical apoptosis.

Preparation of Mesoporous Materials and Thin Films It's Application for DNA Sensor

  • Han, Seung-Jun;Heo, Soon-Young;Park, Keun-Ho;Lee, Soo;Kim, Byung-Kwan;Kim, Jin-Heung
    • Journal of the Korean Applied Science and Technology
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    • v.21 no.4
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    • pp.345-351
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    • 2004
  • Highly ordered pure-silica MCM-41 materials possessing well-defined morphology have been successfully prepared with surfactant used as a template. The fabrication of mesoporous silica has received considerable attention due to the need to develop more efficient materials' for catalysis, separations, and chemical sensing. The surface modified MCM-41 was used as anadsorbent for biomolecules. Silica-supported organic groups and DNA adsorption on surface modified MCM-41 were investigated by FT-IR and UV-Vis spectrometer, respectively. The use of MCM-41 as the modification of electrode surfaces were investigated electrochemical properties of metal mediators with biomolecules. The modified ITO electrodes increased peak currents for a redox process of $[Ru(bpy)_3]^{2+}$ relative to the bare electrode. The electrochemical detection of DNA by cyclic voltammetry when the current is saturated in the presence of the mediator appeared more sensitive due to a higher catalytic current on the MCM-41 supported electrodes modified by carboxylic acid functional groups. The carboxyl or amine groups on the surface of MCM-41 interact and react with the $-NH_2$ groups of guanine and backbone, respectively. Highly ordered mesoporous materials with organic groups could find applications as DNA sensors.

Characteristics of p-Xylene Adsorption using Functionalized Mesoporous Silica (관능기화 메조포러스 실리카를 이용한 파라자일렌 흡착 특성)

  • Kim, Sang-Hyoun;Park, Jonghoon;Kang, Seok-Tae;Chung, Jae-Woo;Kim, Soo-Hong;Cho, Yunchul;Lee, Chae-Young
    • Journal of the Korean GEO-environmental Society
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    • v.13 no.6
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    • pp.27-31
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    • 2012
  • This study was designed to examine the feasibility of functionalized mesoporous silica as the adsorbent for benzene, toluene, ethylbenzene, and xylene isomers (BTEX) in groundwater. p-Xylene was used as the model compound of BTEX. A series of functionalized mesoporous silica with MCM-41 type of structure was synthesized using a co-condensation method. Monoamine, triamine, nitrile, phenyl, and octyl groups were functionalized to the mesoporous silica structure. Adsorption sites for p-Xylene in a functionalized mesoporous silica were Si-O-Si covalent bond, the surfactant, and the functional group. Octyl-functionalized mesoporous silica with stearyltrimethylammonium chloride as a surfactant showed the highest adsorption ability. The maximum xylene adsorption capacity of the octyl-functionalized mesoporous silica with stearyltrimethylammonium chloride based on Langmuir model was 4.17 mmol/g on $20^{\circ}C$, which was 2.9 times higher than that of MCM-41.

High Selective Oxidation of Alcohols Based on Trivalent Ion (Cr3+ and Co3+) Complexes Anchored on MCM-41 as Heterogeneous Catalysts

  • Shojaei, Abdollah Fallah;Rafie, Mahboubeh Delavar;Loghmani, Mohammad Hassan
    • Bulletin of the Korean Chemical Society
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    • v.33 no.8
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    • pp.2748-2752
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    • 2012
  • Cr(III) and Co(III) complexes with acetylacetonate were anchored onto a mesoporous MCM-41 through Schiff condensation. The materials were characterized by XRD, FT-IR, BET, CHN and ICP techniques. Elemental analysis of samples revealed that one C=N bond was formed through Schiff condensation on MCM-41 surface. The catalysts were tested for the alcohol oxidations using t-butyl hydroperoxide (TBHP) and $H_2O_2$ as oxidant. The catalytic experiments were carried out at both room temperature and reflux condition. Various solvents such as dichloromethane, acetonitrile and water were examined in the oxidation of alcohols. Among the different solvents, catalytic activity is found more in acetonitrile. Further, the catalysts were recycled three times in the oxidation of alcohols and no major change in the conversion and selectivity is observed, which shows that the immobilized metal-acetylacetonate complexes are stable under the present reaction conditions.

V-Band filter using Multilayer MCM-D Technology (MCM-D 공정기술을 이용한 V-BAND FILTER 구현에 관한 연구)

  • Yoo Chan-Sei;Song Sang-Sub;Part Jong-Chul;Kang Nam-Kee;Cha Jong-Bum;Seo Kwang-Seok
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.43 no.9 s.351
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    • pp.64-68
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    • 2006
  • Novel system-on-package (SOP) - D technology to improve the mechanical and thermal properties of a MCM-D substrate was suggested. Based on this investigation, the two types of band pass filters for the V-band application with unique structure were designed and implemented using 2-metals, 3-BCB layers. The first type using distributed resonator had the insertion loss below 2.6 dB at 55 GHz and group delay was below 0.06 ns. For the second type with edge coupled structure, the insertion loss and group delay were 3 dB and 0.1 ns, respectively. Suggested MCM-D substrate with band pass filter can be used to evaluate mm-Wave system including flip-chip bonded MMIC.