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High rate deposition of poly-si thin films using new magnetron sputtering source

  • Boo, Jin-Hyo;Park, Heon-Kyu;Nam, Kyung-Hoon;Han, Jeon-Geon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.186-186
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    • 2000
  • After LeComber et al. reported the first amorphous hydrogenated silicon (a-Si: H) TFT, many laboratories started the development of an active matrix LCDs using a-Si:H TFTs formed on glass substrate. With increasing the display area and pixel density of TFT-LCD, however, high mobility TFTs are required for pixel driver of TF-LCD in order to shorten the charging time of the pixel electrodes. The most important of these drawbacks is a-Si's electron mobiliy, which is the speed at which electrons can move through each transistor. The problem of low carier mobility for the a-Si:H TFTs can be overcome by introducing polycrystalline silicon (poly-Si) thin film instead of a-Si:H as a semiconductor layer of TFTs. Therefore, poly-Si has gained increasing interest and has been investigated by many researchers. Recnetly, fabrication of such poly-Si TFT-LCD panels with VGA pixel size and monolithic drivers has been reported, . Especially, fabricating poly-Si TFTs at a temperature mach lower than the strain point of glass is needed in order to have high mobility TFTs on large-size glass substrate, and the monolithic drivers will reduce the cost of TFT-LCDs. The conventional methods to fabricate poly-Si films are low pressure chemical vapor deposition (LPCVD0 as well as solid phase crystallization (SPC), pulsed rapid thermal annealing(PRTA), and eximer laser annealing (ELA). However, these methods have some disadvantages such as high deposition temperature over $600^{\circ}C$, small grain size (<50nm), poor crystallinity, and high grain boundary states. Therefore the low temperature and large area processes using a cheap glass substrate are impossible because of high temperature process. In this study, therefore, we have deposited poly-Si thin films on si(100) and glass substrates at growth temperature of below 40$0^{\circ}C$ using newly developed high rate magnetron sputtering method. To improve the sputtering yield and the growth rate, a high power (10~30 W/cm2) sputtering source with unbalanced magnetron and Si ion extraction grid was designed and constructed based on the results of computer simulation. The maximum deposition rate could be reached to be 0.35$\mu$m/min due to a high ion bombardment. This is 5 times higher than that of conventional sputtering method, and the sputtering yield was also increased up to 80%. The best film was obtained on Si(100) using Si ion extraction grid under 9.0$\times$10-3Torr of working pressure and 11 W/cm2 of the target power density. The electron mobility of the poly-si film grown on Si(100) at 40$0^{\circ}C$ with ion extraction grid shows 96 cm2/V sec. During sputtering, moreover, the characteristics of si source were also analyzed with in situ Langmuir probe method and optical emission spectroscopy.

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A Study on M. Scheler's Theory of Perception (막스 셸러의 지각론 연구 - 활력적 충박과 감각지각의 관계 연구 -)

  • Kum, Kyo-young
    • Journal of Korean Philosophical Society
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    • v.130
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    • pp.23-45
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    • 2014
  • It can be said that Scheler's theory of perception is the theory of drive-conditioned perception, in more detail the theory of drive-motoric conditions of perception. Scheler tells us that Immanuel Kant and Ernst Mach were mistaken in their assumption that sensations are purely receptive and primary in all experience. He claims that sensations are not primary but subsequent to a subliminal attention of vital drives(called 'Vor-Liebe und Vor-Interesse' by him). And because sense perception cannot take place without a vital energy of drives that account for the ongoing activity of perception, no object can be perceived unless it stimulates movement in an organism which exercises a count-movement against objects and thereby resisting objects. According to Scheler, an order of foundation such as the preexistence of images prior to perception; the priority of perception with regard to functions of senses; the priority of sense functions with regard to sensations has to be kept in mind. And it has to be kept in mind that the essence of life is pre-empirical, is pure becoming(Werden) and unbecoming(Entwerden), a process in which its two empirical sides are not yet separated. Then it is easy to see that perception is conditioned by vital drives. The drive-conditioned theory of perception is also supported by the fact that the motility of an organism determines its sensory apparatus, an organism has an alphabet of senses that can serve as signs of luring and noticing objects that are meaningful for its drive-motoric behavior. For example a lizard remains undisturbed by a gun shot but runs away from the slightest noise in the grass.

Effect of Hypersonic Missiles on Maritime Strategy: Focus on Securing and Exploiting Sea Control (극초음속 미사일이 해양전략에 미치는 영향: 해양통제의 확보와 행사를 중심으로)

  • Cho, Seongjin
    • Maritime Security
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    • v.1 no.1
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    • pp.241-271
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    • 2020
  • The military technology currently receiving the most attention is the hypersonic missile. hypersonic is faster than the speed of sound or Mach 5+. The vast majority of the ballistic missiles that it inspired achieved hypersonic speeds as they fell from the sky. Rather than speed, today's renewed attention to hypersonic weapons owes to developments that enable controlled flight. These new systems have two sub-varieties: hypersonic glide vehicles and hypersonic cruise missiles. Hypersonic weapons could challenge detection and defense due to their speed, maneuverability, and low altitude of flight. The fundamental question of this study is: 'What effect will the hypersonic missile have on the maritime strategy?' It is quite prudent to analyze and predict the impact of technology in the development stage on strategy in advance. However, strategy is essential because it affect future force construction. hypersonic missiles act as a limiting factor in securing sea control. The high speed and powerful destructive power of the hypersonic missile are not only difficult to intercept, but it also causes massive ship damage at a single shot. As a result, it is analyzed that the Securing sea control will be as difficult as the capacity of sea denial will be improved geographically and qualitatively. In addition, the concept of Fortress Fleet, which was criticized for its passive strategy in the past, could be reborn in a modern era. There are maritime power projection/defence, SLOC attack/defence in exploiting sea control. The effects of hypersonic missiles on exploiting sea control could be seen as both limiting and opportunity factors.

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Investigation of Plugging and Wastage of Narrow Sodium Channels by Sodium and Carbon Dioxide Interaction (소듐과 이산화탄소 반응에 의한 소듐유로막힘 및 재료손상 현상 연구)

  • Park, Sun Hee;Min, Jae Hong;Lee, Tae-Ho;Wi, Myung-Hwan
    • Korean Chemical Engineering Research
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    • v.54 no.6
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    • pp.863-870
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    • 2016
  • We investigated the physical/chemical phenomena that a slow loss of $CO_2$ inventory into sodium after the sodium-$CO_2$ boundary failure in printed circuit heat exchangers (PCHEs), which is considered for the supercritical $CO_2$ Brayton cycle power conversion system of a sodium-cooled fast reactor (SFR). The first phenomenon is plugging inside narrow sodium channels by micro cracks and the other one is damage propagation referred to as wastage combined with the corrosion/erosion effect. Experimental results of plugging shows that sodium flow immediately stopped as $CO_2$ was injected through the nozzle at $300{\sim}400^{\circ}C$ in 3 mmID sodium channels, whereas sodium flow stopped about 60 min after $CO_2$ injection in 5 mmID sodium channels. These results imply that if pressure boundary of sodium-$CO_2$ fails a narrow sodium channel would be plugged by reaction products in a short time whereas a relatively wider sodium channel would be plugged with higher concentration of reaction products. Wastage by the erosion effect of $CO_2$ (200~250 bar) hardly occurred regardless of the kinds of materials (stainless steel 316, Inconel 600, and 9Cr-1Mo steel), temperature ($400{\sim}500^{\circ}C$), or the diameter of the $CO_2$ nozzle (0.2~0.8 mm). Velocities at the $CO_2$ nozzle were specified as Mach 0.4~0.7. Our experimental results are expected to be used for determining the design parameters of PCHEs for their safeties.

Recent research activities on hybrid rocket in Japan

  • Harunori, Nagata
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2011.04a
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    • pp.1-2
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    • 2011
  • Hybrid rockets have lately attracted attention as a strong candidate of small, low cost, safe and reliable launch vehicles. A significant topic is that the first commercially sponsored space ship, SpaceShipOne vehicle chose a hybrid rocket. The main factors for the choice were safety of operation, system cost, quick turnaround, and thrust termination. In Japan, five universities including Hokkaido University and three private companies organized "Hybrid Rocket Research Group" from 1998 to 2002. Their main purpose was to downsize the cost and scale of rocket experiments. In 2002, UNISEC (University Space Engineering Consortium) and HASTIC (Hokkaido Aerospace Science and Technology Incubation Center) took over the educational and R&D rocket activities respectively and the research group dissolved. In 2008, JAXA/ISAS and eleven universities formed "Hybrid Rocket Research Working Group" as a subcommittee of the Steering Committee for Space Engineering in ISAS. Their goal is to demonstrate technical feasibility of lowcost and high frequency launches of nano/micro satellites into sun-synchronous orbits. Hybrid rockets use a combination of solid and liquid propellants. Usually the fuel is in a solid phase. A serious problem of hybrid rockets is the low regression rate of the solid fuel. In single port hybrids the low regression rate below 1 mm/s causes large L/D exceeding a hundred and small fuel loading ratio falling below 0.3. Multi-port hybrids are a typical solution to solve this problem. However, this solution is not the mainstream in Japan. Another approach is to use high regression rate fuels. For example, a fuel regression rate of 4 mm/s decreases L/D to around 10 and increases the loading ratio to around 0.75. Liquefying fuels such as paraffins are strong candidates for high regression fuels and subject of active research in Japan too. Nakagawa et al. in Tokai University employed EVA (Ethylene Vinyl Acetate) to modify viscosity of paraffin based fuels and investigated the effect of viscosity on regression rates. Wada et al. in Akita University employed LTP (Low melting ThermoPlastic) as another candidate of liquefying fuels and demonstrated high regression rates comparable to paraffin fuels. Hori et al. in JAXA/ISAS employed glycidylazide-poly(ethylene glycol) (GAP-PEG) copolymers as high regression rate fuels and modified the combustion characteristics by changing the PEG mixing ratio. Regression rate improvement by changing internal ballistics is another stream of research. The author proposed a new fuel configuration named "CAMUI" in 1998. CAMUI comes from an abbreviation of "cascaded multistage impinging-jet" meaning the distinctive flow field. A CAMUI type fuel grain consists of several cylindrical fuel blocks with two ports in axial direction. The port alignment shifts 90 degrees with each other to make jets out of ports impinge on the upstream end face of the downstream fuel block, resulting in intense heat transfer to the fuel. Yuasa et al. in Tokyo Metropolitan University employed swirling injection method and improved regression rates more than three times higher. However, regression rate distribution along the axis is not uniform due to the decay of the swirl strength. Aso et al. in Kyushu University employed multi-swirl injection to solve this problem. Combinations of swirling injection and paraffin based fuel have been tried and some results show very high regression rates exceeding ten times of conventional one. High fuel regression rates by new fuel, new internal ballistics, or combination of them require faster fuel-oxidizer mixing to maintain combustion efficiency. Nakagawa et al. succeeded to improve combustion efficiency of a paraffin-based fuel from 77% to 96% by a baffle plate. Another effective approach some researchers are trying is to use an aft-chamber to increase residence time. Better understanding of the new flow fields is necessary to reveal basic mechanisms of regression enhancement. Yuasa et al. visualized the combustion field in a swirling injection type motor. Nakagawa et al. observed boundary layer combustion of wax-based fuels. To understand detailed flow structures in swirling flow type hybrids, Sawada et al. (Tohoku Univ.), Teramoto et al. (Univ. of Tokyo), Shimada et al. (ISAS), and Tsuboi et al. (Kyushu Inst. Tech.) are trying to simulate the flow field numerically. Main challenges are turbulent reaction, stiffness due to low Mach number flow, fuel regression model, and other non-steady phenomena. Oshima et al. in Hokkaido University simulated CAMUI type flow fields and discussed correspondence relation between regression distribution of a burning surface and the vortex structure over the surface.

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Studies on the quantitative changes of Organic acid and Sugars during the fermentation of Takju (탁주(濁酒) 양조중(釀造中) 유기산(有機酸) 및 당류(糖類)의 소장(消長)에 관(關)한 연구(硏究))

  • Kim, Chan-Jo
    • Applied Biological Chemistry
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    • v.4
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    • pp.33-42
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    • 1963
  • 1. Two fermentation methods have been compared for the production of Takju (Korean native Sake). One method (S1) uses 'Nuruk' (Korean mold wheat) and the other method (S2) uses 'Nuruk' and mold rice. The chemical analysis of source material, also, have been made in order the check the quantitative changes during the fermentation. The results are summarized below: a. The rate of fermentation was slower for the S2 method than for the S1 method. However, the residual sugar in the S2 method was smaller and the amount of alcohol produced the same as with the S1 method. This was true in spite of the fact that the total initial sugar content for the S2 method was 10 percent below that of S1. b. With both the S1 and S2 methods, 80 percent of the total alcohol production was obtained with in 3 to 4 days. c. The pH value of the base material at the beginning of fermentation was markedly different between the two methods I.e.6.0 to 6.2 for S1 and 4.8 to 5.2 for S2. However, after one or two day the pH of both materials was about the same 4.0 to 4.2 and remained at this value unit the fermentation was complete. 2. Organic acids and Sugars in the source materials have been detected by the paper partition chromatography(p.p.c.) method and the followings are obtained. a. Important Organic acids are Fumalic, malic Succinic, Citric, Acetic aicds in polished rice and Fumalic, Succinic, Acetic, Citric, Malic and Oxalic acids 'Nuruk'. The same kinds of acids as in the rice are found in mold rice, However, amount of Citrice acid is markedly increased in mold rice. b. The important Sugar, Glucose, Fructose and Raffinose in polished rice, Gulcose, Fructo, se, Xylose and one which supposed to be Kojibjose in 'Nuruk'. Glucose and those supposed to be Isomaltose, Kojibiose and Sakebiose and found in rice mold, however, no Sucrose, which was exist in polished rice, was found. 3. The important Organic acids found in fermenting mash using the p.p.c. method were Lactic, Succinic and Acetic. Citric acid identified early in the fermentation, S2 method. remained throughout. However, with the S1 method Cirtic acid was detected only during the late stage of fermentation. Sugars not found in the original materials were two which supposed to be Isomaltotriose and Pentose. Maltose found at the beginning of the fermentation disappeared within one day, Isomaltose was detected throughout the period of fermentation. 4. The Somogyi method which was employed to determine the quantitative changes of sugars in the orginal meterial and mach, showed that polished rice containes in order and in largest amounts Sucrose, Glucose, Raffinose and Fructose. 'Nuruk' contained almost equal quantities of Glucose and Fructose. However, the Glucose content of the mold rice exceeded that originally in the polished rice by 25 or 30 times. Only a small quantity of free sugars was found in the mash at the end of the fermentation.

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An analysis of daily lives of children in Korea, Japan and China (한국, 중국, 일본 유아들의 일상생활에 대한 비교연구)

  • Kisook Lee;Mira Chung;Hyunjung Kim
    • Korean Journal of Culture and Social Issue
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    • v.12 no.5_spc
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    • pp.81-98
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    • 2006
  • The objective of this research is to do a cultural comparison on the daily lives of the children of Korea, Japan and China. To achieve this objective, the questionnares were distributed to the 2940 mothers of children from the ages of 3 to 6 in the countries of Korea, Japan and China. The target audience consisted of 941 mothers living in Seoul and Kyunggi area for Korea, 1007 mothers living in Tokyo for Japan, and 992 mothers living in Beijing for China. As a result of the research, we found out that firstly, although children in general got up anytime between 7:00am to 9:00am and went to bed between 8:00pm and 11:00pm, 61.5% of the Korean children went to bed after 10pm and 16.8% after 11pm. Besides that, we found that compared to 3.51% of Korean children who got up before 6am, 13.41% of Japanese children and 17.24% of Chinese children got up before 6:00am. So we could see that the Korean children got up later and went to bed later than their Japanese and Chinese counterpart. This pattern could also be seen in the average rising time and bed time. Korean children went to bed at 10:00pm and woke up at 7:75am whereas the Japanese children went to bed at 9:28pm and woke up at 7:39am, and the Chinese children went to bed at 9:05pm and woke up at 7:05am. The average sleeping hours for Japanese children was 10.12 hours, 9.50 hours for the Chinese and 9.75 hours for the Korean. As a result, we could see that the Korean children went to bed later, got up later and slept fewer hours than their Japanese and Chinese counterparts. Also, since the rising time and bedtime of the Korean children was later than those of the Chinese and Japanese counterparts, the former s' breakfast and dinner time was also much later. Secondly, we looked at the time children went off to and came back from institutes such as kindergarten and child care centers. The Chinese were earliest at going with average attendance at 7:83am, the Japanese came next at 8:59am and the Korean children were last at 8:90am, whereas the Japanese came first in coming back home at 3:36pm, Korean next at 3:91pm and the Chinese last at 5:46pm. Next when we looked at the hours spent at the kindergartens and child care centers, Japan spent 6.76 hours, Korea 7.01 hours and China spent the longest hours with 9.63 hours. Excluding China where all preschool institutes are centralized into kindergartens, we nest looked at time children went to and came back from the institutes as well as the time spent there. In the case of kindergarten, there was not much difference but in the case of child care centers, the Japanese children went to the child care centers mach earlier and came home later than the Korean children. Also, the time spent at the child care center was much longer for the Japanese than the Korean children. This fact coincides with the Korean mothers' number one wish to the kindergartens and child care centers i.e. for the institutes to prolong their school hours. Thus, the time spent at child care centers for Korea was 7.75 hours, 9.39 hours for Japan and 9.63 hours for China. The time for Korea was comparatively much shorter than that of Japan and China but if we consider the fact that 50% of the target audience was working mothers, we could easily presume that the working parents who usually use the child care centers would want the child care centers to prolong the hours looked after their children. Besides this, the next most wanted wish mothers have towards the child care centers and kindergartens was for those institutes to "look after their children when sick". This item showed high marks in all three countries, and the marks in Korea was especially higher when compared to Japan and China. Thirdly, we looked at the private extracurricular activities of the children. We found that 72.6% of the Korean children, 61.7% of the Japanese children, and 64.6% of the Chinese children were doing private extracurricular activities after attending kindergarten or day care centers. Amongst the private extracurricular activities done by Korean children, the most popular one was worksheet with 51.9% of the children doing it. Drawing (15.20%) and English (11.6%) came next. Swimming (21.95%) was the most popular activity for Japan, with English (17.48%), music (15,79%) and sports (14.70%) coming next. For China, art (30.95%) was first with English (22.08%) and music (19.96%) following next. All three countries had English as the most popular activity related to art and physical activities after school hours, but the rate for worksheet studies was much higher for Korea compared to Japan China. The reason Koreans universally use worksheet in because the parents who buy the worksheet are mothers who have easy access to advertisement or salespeople selling those products. The price is also relatively cheap, the worksheet helps the children to grow the basic learning ability in preparation for elementary school, and it is thought to help the children to build the habit of studying everyday. Not only that but it is estimated that the worksheet education is being conducted because parents can share the responsibility of the children's learning with the worksheet-teacher who make home visits. Looking at the expenses spent on private extracurricular activities as compared to income, we found that China spent 5% of income for activities outside of regular education, Korea 3% and Japan 2%. Fourthly, we looked at the amount of time children spent on using multimedia. The majority of the children in Korea, Japan and China watch television almost every day. In terms of video games, the Japanese children played the games the most, with Korea and China following next. The Korean children used the computer the most, with Japan and China next. The Korean children used about 21.17% of their daily time on computers which is much more than the Japanese who used 20.62% of their time 3 or 4 times a week, or the Chinese. The Chinese children were found to use considerably less time on multimedia compared to the Korean of Japanese.