• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.12
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• pp.1007-1013
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• 2016

This paper presents the development of a magneto-optical encoder for higher precision and smaller size. In general, optical encoders can have very high precision based on the position information of the slate, while their sizes tend to be larger due to the presence of complex and large components, such as an optical module. In contrast, magnetic encoders have exactly the opposite characteristics, i.e., small size and low precision. In order to achieve encoder features encompassing the advantages of both optical and magnetic encoders, i.e., high precision and small size, we designed a magneto-optical encoder and developed a method to detect absolute position, by compensating for the error of the hall sensor using the linear table compensation method. The performance of the magneto-optical encoder was evaluated through an experimental testbed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.250-256
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clarance of table is actively controlled corresponding to the amount of error with the nariable capillary,anmed as ACC. In previous paper,through the basic test, it was confirmed that by the use of ACC,the error motion within 2.7 .mu.m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the freqency bandwidth of 5.5Hz structurally. In this paper,we performed practital compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy,iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error,the linear and angular motion error are improved upto 0.25 .mu.m and 0.4arcsec,which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Journal of Broadcast Engineering
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• v.27 no.5
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• pp.812-815
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• 2022

Images displayed on a digital devices under the sunlight are generally perceived to be darker than the original images, which leads to a decrease in visibility. For better visibility, global luminance compensation or tone mapping adaptive to ambient lighting is required. However, the existing methods have limitations in chrominance compensation and are difficult to use in real world due to their heavy computational cost. To solve these problems, this paper propose a piece-wise linear curves (PLECs)-based image enhancement method to improve both luminance and chrominance. At this time, PLECs are regressed through deep learning and implemented in the form of a lookup table to real-time operation. Experimental results show that the proposed method has better visibility compared to the original image with low computational cost.

• Structural Engineering and Mechanics
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• v.83 no.1
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• pp.93-108
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• 2022

Real-time hybrid simulation (RTHS) was applied to investigate the train-bridge interaction of a high-speed railway system, where the railway bridge was selected as the numerical substructure, and the train was physically tested. The interaction between the two substructures was reproduced by a servo-hydraulic shaking table. To accurately reproduce the high-frequency interaction responses ranging from 10-25Hz using the hydraulic shaking table with an inherent delay of 6-50ms, an adaptive time series (ATS) compensation algorithm combined with the linear quadratic Gaussian (LQG) was proposed and implemented in the RTHS. Testing cases considering different train speeds, track irregularities, bridge girder cross-sections, and track settlements featuring a wide range of frequency contents were conducted. The performance of the proposed ATS+LQG delay compensation method was compared to the ATS method and RTHS without any compensation in terms of residual time delays and root mean square errors between commands and responses. The effectiveness of the ATS+LQG method to compensate time delay in RTHS with high-frequency responses was demonstrated and the proposed ATS+LQG method outperformed the ATS method in yielding more accurate responses with less residual time delays.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.5
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1828-1831
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• 2003

There are various sources causing a position error in a linear motor. This paper focuses on error sources from rotational motions of a table and friction. Rotational errors occur due to imperfections during manufacturing and/or assembly of guide ways, and cause a position error at locations of interest. Friction is another factor deteriorating the position error due to its highly nonlinear behavior. The position error of the linear motor was about 20∼30$\mu\textrm{m}$. After compensating the position errors due to rotational error motions and friction. the remaining errors become about 6～8$\mu\textrm{m}$ and 2～3$\mu\textrm{m}$, respectively. It is shown that the positional accuracy of a linear can be greatly improved by compensating the two error sources.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.