• International Journal of Precision Engineering and Manufacturing
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• v.3 no.3
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• pp.62-68
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• 2002

To satisfy the requirement of the one axis linear positioning system, which is following control of the desired trajectory without following error and is the high positioning accuracy, feed-forward loop having cogging force model is proposed. In the one axis linear positioning system with linear PM motor, cogging force acting as disturbance is modeled analytically. Analytic model of cogging force is verified by result measured from positioning system constructed with linear PM motor. Measured result is very similar with proposed analytic model. Cogging force model is used as feet forward loop in control scheme of linear positioning system. Cogging force feed-forward'loop is obtained from analytic model of cogging farce. Trajectory following error is reduced from 300nm to 100nm by applying the proposed cogging farce feed-forward loop. By using analytic model of cogging force, the control scheme is simplified. Also this analytic model is applicable to calculation of characteristic value of positioning system in design process.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.4
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• pp.730-738
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• 2007

As well known when the linear machine is operated between two points repeatedly under positioning control, there are various positioning error at the moment of zero speed owing to the non-linear disturbance like as unpredictable friction force. To remove this positioning error, a simple least order disturbance observer is introduced and is actually implemented in this study. Due to this simple algorithm the over-all machine system can be modified to simple arbitrary given one-mass load without any disturbance. So, the total construction process for positioning control system is much easier than old one. Moreover, to generate a proper effective position profile with the limited actual machine force, a very powerful on-line mass identification algorithm using the load force estimator is presented. In the proposed mass identification algorithm, the exact load mass can be calculated during only one moving stage under a normally generated position profile. All presented algorithm is verified with experimental result with commercial linear servo machine system.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.211-214
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• 1995

A precise open-loop positioning system using linear pulse motor has been developed. The system is operated in a microstepping mode by controlling the electric current. One step of 508 .mu.m (tooth pitch of the linear pulse motor) is divided into 508 micro-steps equally. The displacement is measured with a system using a Fiezeau-type interferometer. Periodical positioning error with a period of the tooth pitch was observed in this system. Therefore, the position is corrected using the error. The error is stored into computer in advance, and the microstep current is corrected on basis of the stored data. Although the positioning error of the system without the correction was .+-.4.5 .mu.m, that with the correction was decreased to .+-.1.0 .mu.m.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.275-284
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• 2011

The accuracy simulation technology of linear motion system is introduced in this paper. Motion errors and positioning errors are simulated using informations on the design parameters of elements of linear motion system. 5 Degree-of-freedom motion error analysis algorithm utilizing the transfer function method and positioning error analysis algorithm which are main frame of accuracy simulation are introduced. Simulated motion errors are compared with experimental results for verifying the effectiveness. Then, using the proposed algorithms, simulation is performed to investigate the effects of ballscrew and linear motor on the motion errors. Finally, the influence of feedback sensor position on the positioning error is also discussed.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• Proceedings of the KIEE Conference
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• 1997.07b
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• pp.409-413
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• 1997

In linear motor positioning systems, nonlinearitys such as friction and cogging exist. These inner system with compliance may cause the steady state error and oscillation. So it is necessary to consider these elements for precision positioning control. In this paper, a nonlinear model of a linear motor positioning system including the friction, cogging and compliance is proposed. The parameters of the proposed model are identified by recursive least-squares method. The validity of the proposed model is confirmed by computer simulation.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.389-392
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• 1996

We propose a method to improve repeatability positioning precision of a linear pulse motor. By using this method the systematic error which may make the precision worse can be suppressed easily. And also we show that Power OP-Amp drive system enables the accidental error to be suppressed in comparison with PWM control drive system using IGBT inverter. As a result of the suppression of systematic and accidental error, improved performance of a linear pulse motor with repetitive positioning control is shown by experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.266-272
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• 1994

An essential ingredient in precision machining is a positioning system that responds quickly and precisely to very small input signal. In this paper, two different positioning systems were presented fot the precision positioning control. The one is a friction drive system, the other is a ballscrew system. The friction drive system was composed of an air sliding guide and a friction drive. The ballscrew system was made of a ballscrew and a linear guide. Nonlinear behaviors of the given systems tend to make the system inaccurate. The paper looked at the phenomena that has caused the positioning error. These apparently nonlinear phenomena can be attributed mainly to the presence of the nonlinear friction and slip effect plus the dynamic change from the microdynamic to the macrodynamic and form the macrodynamic to the microdynamic. For the control of the positioning system, the control algorithm based on a neural network is suggested. The FEL(Feedback Error Learning) controller can learn the inverse dynamics of a nonlinear system by using the neural network controller, and stabilize the system by a linear controller. In the experiment, PTP control is implemented withen the maximum error of 0.05 .mu.m ~0.1 .mu. m when i .mu.m step reference input is applied and that of maximum 1 .mu. m when 100 .mu.m step reference input is given. Sinusoidal inputs with the amplitude of 1 .mu.m and 100 .mu. m are used for the tracking control of the positioning system. Experimental results of the proposed algorithm are shown to be superior to those of conventional PD controls.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.8
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• pp.729-735
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• 2012

A LQG/LTR(linear quadratic Gaussian/loop transfer recovery) controller with an integrator is designed to control the electro-hydraulic positioning system. Without considering the nonlinearity in the dead-zone, computer simulations are performed and show good performances and tracking abilities with the feedback controller based on the linear system model. However, the performance of the closed loop hydraulic positioning system shows big steady-state error in real system because of the dead-zone. In this paper, the feedback controller with a nonlinear compensator is introduced to overcome the dead-zone phenomenon in hydraulic systems. The inverse dead-zone as a nonlinear compensator is used to cancel out the dead-zone phenomenon. Experimental tests are performed to verify the performance of the controller.